2

) Note 12) Note 12) Note 12) Note 12) Note 12) 221 Air Combination Series AC20-B to AC60-B Modular F.R.L.

High Vacuum Angle Valve

XLA XLFV/With solenoid valve J XL XL XLQ XM XY M N Port P D(Pressure port) XSA K L P R XVD XGT Port R (Exhaust port) CYV (mm) (mm) J J K L M N K L M N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 Model XLFV-63 XLFV-80 XLFV-100 XLFV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 49.7 12 4 2 67 21.7 12 4 2 128.5 58 12 4 2 Other dimensions

Aluminum High Vacuum Angle Valve

XLA XLFV/With solenoid valve J XL XL XLQ XM XY M N Port P D(Pressure port) XSA K L P R XVD XGT Port R (Exhaust port) CYV (mm) (mm) J J K L M N K L M N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 Model XLFV-63 XLFV-80 XLFV-100 XLFV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 49.7 12 4 2 67 21.7 12 4 2 128.5 58 12 4 2 Other dimensions

Table of Contents

N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.

KJ

N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.

Table of Contents

137 160 17 36.5 62.9 6 140 163 18.5 37.5 63.9 18.5 8 67.3 25.3 24.3 21 R3/8 49.2 57.4 52.4 25.9 51 46 20 130 153 21 32.6 59 10 133 156 22 34.4 60.8 20.9 12 219 237 21 32.6 62.8 18.5 10 86.3 30 29.7 25 R3/8 65.5 67.6 60.1 27.7 61.2 53.7 20.6 221 239 22 34.4 64.6 20.9 12 239 257 21 32.6 62.8 18.5 10 86.3 30 29.7 25 R1/2 65.5 71.1 63.6 27.7 62.9 55.4 24.1 239 259 22 34.4 64.6 20.9 12 Note 1

Battery-less

LEFS LEFB LEY LEYG LESYH LES LESH LEHF LER JXC51/61 JXC 1 a1 a a1 a2 b a2 a I = m1 + m2 3 a12 3 a22 I = m 12 a2 I = m 12 a2 I = m1 12 4a12 + b2 12 4a22 + b2 + m2 5. Thin rectangular plate (cuboid) Position of the rotation shaft: Passes through the center of gravity of the plate and perpendicular to the plate. (The same applies to thicker cuboids.) 6.

Title not found

(mm) Model R3/8 KQGT04-00 KQGT06-00 KQGT08-00 KQGT10-00 KQGT12-00 4 6 8 10 12 R1/4 10 R3/8 R3/8 12 R1/2 Straight Union Straight Union Union "Y" Union "Y" Applicable tubing O.D. (mm) Model Applicable tubing O.D.

ASR

137 160 17 36.5 62.9 6 140 163 18.5 37.5 63.9 18.5 8 67.3 25.3 24.3 21 R3/8 49.2 57.4 52.4 25.9 51 46 20 130 153 21 32.6 59 10 133 156 22 34.4 60.8 20.9 12 219 237 21 32.6 62.8 18.5 10 86.3 30 29.7 25 R3/8 65.5 67.6 60.1 27.7 61.2 53.7 20.6 221 239 22 34.4 64.6 20.9 12 239 257 21 32.6 62.8 18.5 10 86.3 30 29.7 25 R1/2 65.5 71.1 63.6 27.7 62.9 55.4 24.1 239 259 22 34.4 64.6 20.9 12 Note 1

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

or less 4 x R3 or less 4 x R3 or less Panel thickness 1 to 3.2 mm 1 This is the minimum value when the rear ported type is selected for the piping entry direction.

High Vacuum Angle Valve

Nil FKM 1349-80*1 N1 EPDM 2101-80*1 P1 Barrel Perfluoro 70W Q1 Kalrez 4079 R1 Chemraz SS592 R2 SS630 R3 SSE38 S1 VMQ 1232-70*1 T1 FKM for Plasma 3310-75*1 *1 Values at normal temperature, excluding gas permeation *2 Refer to Construction on page 12 for changed part. Number corresponds with the parts number on the construction drawing.

VQZ1000/2000/3000

L dimension 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 285.5 21 273 No.

Refrigerated Air Dryers

Applicable air dryer IDF-S0189 IDF22E IDF-S0147 IDF37E Applicable air dryer Symbol Thread type and port size Applicable air dryer Male thread A side Female thread B side 601 R1/2 NPT1/2 IDF4E, IDU4E 603 R3/4 NPT3/4 IDF6E to 11E, IDU6E to 11E 604 NPT1 Rc1 IDF22E, IDU22E 605 R1 NPT1 IDF15E1, IDU15E1 606 NPT1 1/2 Rc1 1/2 IDF37E, IDU37E 607 NPT2 Rc2 IDF100F to 150F 609 R3/8 NPT3/8 IDF1E to 3E

IDX-OM-W017

T 12-1 . 12-1 12-2 . 12-1 12-3 . 12-2 12-4 . 12-2 12-5 . 12-3 13 V 13-1 . 13-1 13-2 . 13-2 13-3 . 13-2 14 14-1 . 14-1 IDFA Series 2 IDX-OM-W017 i i i 1 () OFF 3 ON OFF i-1 IDFA Series i 1 IDX-OM-W017 i i-1-1 3 IDFA Series i-1-1 i 2 IDX-OM-W017 i i 2 5 i-2-1 IDFA Series IDX-OM-W017 i i-2 i-2-2 3 i-2-3 50 i-2-4 i-2-5 0 IDFA Series i-2-2 4 IDX-OM-W017 i i-2-6

High Purity Fluoropolymer

M) 12 10 12 N 30 3/8" 6 36 21 33.1 28 11 22 30 H 28.5 1/2" 10 Class 4, 5 19 12 19 35 1/2" LQ2B52-M 7 42.5 46 40 32 14 28 36 LQ2B54-M LQ2B53-M 33.5 3/4" 12 Inch sizes Connection threads R/NPT Model Applicable tubing O.D.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

x 10 10 x 8 12 x 10 10 x 8 19 x 16 12 x 10 19 x 16 12 x 10 25 x 22 19 x 16 25 x 22 19 x 16 Tubing O.D.

Prevents Micro-Bubbles

Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Tubing size Plug Tubing size Plug Body class Body class Symbol 2 3 4 5 Body class 2 3 4 5 2 to 5 2 to 5 LVC 6 1/4" 6 1/4" LVA 2 2 8 8 10 3/8" 10 3/8" Base type LVH A Stacking type 10 3/8" 10 3/8" Manifold stations LVD 3 3 12 1/2" 12 1/2" 02 2 stations LVQ 12 1/2" 12 1/2" 05 5 stations 4 4 LQ 19, 3/4" 19, 3/4" 12 1/2" 12 1/2" LVN 5

Series KC Self-seal Fittings

Tube size/ Connecting female thread size Body size Type KBV1-M5 KBV1-M6 KBV2-M5 M5 0.8 M6 1 M5 0.8 M6 1 KBV1-04 KBV1-06 KBV2-06 4 6 KBV2-M6 KBV2-R1 KBV3-R1 KBV3-R2 KBV4-R2 KBV4-R3 KBV2-08 KBV3-08 8 Branch elbow module: KBZ 1 8 Rc(PT) KBV3-10 10 Applicable tube O.D. KBV3-12 12 KBV4-12 KBV4-16 Part No.

KB

Style Tube size/ Connecting female thread size Body size KBV1-M5 KBV1-M6 KBV2-M5 M5 X 0.8 M6 X 1 M5 X 0.8 M6 X 1 KBV1-04 KBV1-06 KBV2-06 4 6 KBV2-M6 KBV2-R1 KBV3-R1 KBV3-R2 KBV4-R2 KBV4-R3 KBV2-08 KBV3-08 8 Branch elbow module: KBZ 1 8 Rc(PT) KBV3-10 10 KBV3-12 12 KBV4-12 KBV4-16 Tube O.D. Part No.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

SET POS. 6 6 4-R3 6 6 PAX 4-R3 4-R3 (Max. 91) 325 PB (Max. 91) 191 87 60 87 60 112 112 17-5-55 14 Series LVD Fitting Assembly Procedure Assemble fittings following the procedure shown below.