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400 300 200 100 0 VF B VFR VP4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 800 700 600 500 400 300 200 100 0 VZS C VFS VS4 800 700 600 500 400 300 200 100 0 VQ7 D EVS VFN 800 700 600 500 400 300 200 100 0 E It is when the cylinder is extending that is meter-out

LG1H

Maximum acceleration: 2000mm/s2 Positioning time (sec.)

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MHS2-50D MHS2-50D D400 400 F Pressure 0.6 MPa Pressure 0.6 MPa 20Internal grip Gripping force (N) 300 300 0.5 MPa 0.5 MPa 0.4 MPa 0.4 MPa 200 200 0.3 MPa 0.3 MPa 0.2 MPa 0.2 MPa 100 100 0.1 MPa 0.1 MPa 0 0 20 20 40 40 60 60 Gripping point L (mm) Gripping point L (mm) MHS2-63D MHS2-63D Pressure 0.6 MPa Pressure 0.6 MPa 600 600 0.5 MPa 0.5 MPa Gripping force (N) 0.4 MPa 0.4 MPa 400 400 0.3

LEF-OM002xx

H 8 W(kg) 15 30 6 10 20 4 5 2 10 0 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 V (mm/s) V (mm/s) V(mm/s) LEFS16 LEFS25 LEFS32 LECPA Horizontal Transfer 50 12 B B 20 B 10 A A 40 W(kg) A W(kg) H H W(kg) 15 8 30 6 10 20 4 10 5 2 0 0 0 0 100 200 300 400 500 600 0 100 200 300 400 500 600 0 100 200 300 400 500 600 V(mm/s) V (mm/s)

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

LEKFS32 LEKFS40 1000 1000 1000 800 800 800 L1 L1 [mm] L1 [mm] L1 [mm] 600 600 600 X 400 400 400 200 200 200 0 0 0 0 5 10 15 20 25 30 35 0 10 20 30 40 50 60 70 0 10 20 30 40 50 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 Horizontal/Bottom 800 800 800 L2 L2 [mm] L2 [mm] L2 [mm] 600 600 600 Y 400 400 400 Mer m 200 200 200 0 0 0 0 5 10 15 20 25 30 35 0 10 20 30 40 50 0 10 20

MY1

For detailed selection procedures, refer to pages 8-11-92 and 8-11-93. 10 10 10 100 200 300 400 500 1000 100 200 300 400 500 1000 100 200 300 400 500 1000 Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) 8-11-90 8-11-91 87 Series MY1HT Model Selection Following are the steps for selecting the most suitable Series MY1 to your application. Calculation of Guide Load Factor 1.

Series SV

S1 S2 S1 S2 S1 S2 S1 Master unit V BDH SD FG SD FG SD FG SD FG CANL Twisted pair wire with shield FG BDL Class 3 ground Class 3 ground Class 3 ground Class 3 ground CANH V+ Connect the shielding wire to the SD terminal.

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, 450, 500, 600, 700, 800 4000 32 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 40 5000 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 6000 63 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 Made to Order Specifications (For details, refer to page 10-21-1.)

SV

R1 R2 SG FG 24 V 0 V S1 S2 SG 24 V 0 V S1 S2 R1 R2 SG FG 24 V 0 V S1 S2 R1 R2 SG FG 24 V 0 V Ground either the reception side or the transmission side of the shielding wire shield.

1

Series CQ2 Stroke S2 Part no. denotation B Stroke S1 Part no. denotation A Stroke S2 Part no. denotation B Stroke S1 Part no. denotation A Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com B + Stroke S2 B + Stroke S1 B + Stroke S2 B + Stroke S1 A + Stroke (S1 + S2)

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Stroke (mm) Up to 10 Up to 30 Up to 50 Up to 75 Up to 100 Max. speed (mm/s) Up to 400 more than 400 Up to 400 more than 400 Up to 400 more than 400 Up to 400 more than 400 Up to 400 more than 400 (5) (6) (7) 6 10 15 Selection graph (8) (9) (10) (11) (12) (13) (14) (15) 20 25 32 The maximum speeds for 6 to 32 are: 6, 10: Up to 800 mm/s; 15, 20: Up to 700 mm/s; 25, 32: Up to 600 mm/s Caution

CATALOG

, 450, 500 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 Fluid Air Proof Ppressure 1.5MPa / 214PSI Max Operating Pressure 1.52MPa

LG1H

Maximum acceleration: 3000mm/s2 Positioning distance (mm) 400 200 100 10 1 40.4 20.4 10.4 1.4 0.5 10 4.5 2.5 1.5 0.6 0.5 100 Speed (mm/s) 2.1 1.3 0.9 0.6 0.5 250 1.4 1.0 0.8 0.6 0.5 500 C D A B Values will vary slightly depending on the operating conditions. 149 4 Series LG1H20 Standard Motor High Rigidity Direct Acting Guide Without Coupling Motor Output Ground Ball Screw 100W 15mm /20mm

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VZ314--01 (Piping: 6 x 1 m) Speed controller/Silencer AS3301F-02-06/AN110-01 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VZ314--01 (Piping:8 x 1 m) AS3301F-02-08/AN110-01 Speed controller/Silencer It is when the cylinder is extending that is meter-out controlled by speed

Electric Actuator / Slider Type 《 AC Servo Motor 》

90 or less (No condensation) Motor output [W] / size [mm] 100/40 200/60 400/60 specificatio Type of Motor AC servo motor (100/200VAC) Electric [Type of Motor: S2,S3,S4] Incremental 17bit encoder (Resolution: 131072 p/rev) n [Type of Motor: S6,S7,S8] Absolute 18bit encoder (Resolution: 262144 p/rev) Encoder [Type of Motor: T6,T7,T8] [With LECSB-T/LECSS-T] Absolute 22bit encoder (Resolution

240

) Lead 10 (LEPY10LJ) 0.5 1 0 400 300 0 100 Speed [mm/s] 0 400 300 0 100 Speed [mm/s] 200 200 LEPY10 (Motor size: Basic) Horizontal Vertical 7 3 Lead 5 (LEPY10K) 6 2.5 5 2 Work load [kg] Work load [kg] 4 Lead 5 (LEPY10K) 1.5 3 1 2 Lead 10 (LEPY10J) Lead 10 (LEPY10J) 0.5 1 0 400 300 0 100 Speed [mm/s] 0 400 300 0 100 Speed [mm/s] 200 200 Note) The maximum value of the work load for the positioning

Support Guide/11-LEFG Series

Operating conditions Model: LEFG40 Size: 40 Mounting orientation: Horizontal Acceleration [mm/s2]: 3000 Work load [kg]: 20 Work load center position [mm]: Xc = 0, Yc = 50, Zc = 200 2. Select the graphs for horizontal of the (11-)LEFG40 on page 60. LZ 3. Lx = 400 mm, Ly = 250 mm, Lz = 1500 mm 4.

Electric Slide Table / High Precision Type 《 AC servo motor 》

385 Max. speed[mm/s] 400 200 400 200 400 200 Pushing speed [mm/s] *2 35 or less 30 or less Actuator specifications Max. acceleration/deceleration[mm/s2] 5000 Positioning repeatability [mm] 0.01 Lost motion [mm] *3 0.1 or less Lead [mm] (including pulley ratio) 12 6 20 10 16 8 Impact/Vibration resistance [m/s2] *4 50/20 Ball screw Ball screw(In-line) Actuation type Belt[1.25:1] Ball screw

LEKF-OMZ0035

Weight[kg] Series LEKFS25 Stroke [mm] 50 100 150 200 250 300 350 400 450 500 600 700 800 S2 2.0 2.1 2.3 2.4 2.6 2.7 2.8 2.9 3.1 3.2 3.5 3.7 4.0 Motor type T6 2.1 2.2 2.4 2.5 2.7 2.8 2.9 3.0 3.2 3.3 3.6 3.8 4.1 Additional weight with lock [kg] 0.2 Series LEKFS32 Stroke [mm] 50 100 150 200 250 300 350 400 450 500 600 700 800 900 1000 S3 3.4 3.6 3.8 4.0 4.3 4.5 4.7 4.9 5.1 5.3 5.8 6.2 6.6 7.1

LEF-OM006xx

500 600 V(mm/s) 0 100 200 300 400 500 600 V(mm/s) 0 0 100 200 300 400 500 600 V (mm/s) LEFS 16 LEFS 25 LEFS 32 50 12 20 W(kg) W(kg) 10 W(kg) W(kg) W(kg) W(kg) 6 40 6 15 8 30 8 6 8 10 5 5 20 4 5 12 10 16 10 12 16 10 2 0 0 0 0 100 200 300 400 500 600 V (mm/s) 0 100 200 300 400 500 600 V(mm/s) 0 100 200 300 400 500 600 V(mm/s) -9- (1)(DC24V) LEFS40 (mm) 1) 200, 300, (400), 500