Accuracy: Basic Type, Size: 63, Motor Type: S3 (200W Output, Incremental Encoder), Lead, mm: A (Size 40: 16mm, Size 63: 20mm, Size 100: 25mm), Stroke: 500mm

Accuracy: Basic Type, Size: 63, Motor Type: 200W Output, Incremental Encoder, Lead, mm: Size 40: 16mm, Size 63: 20mm, Size 100: 25mm, Stroke: 500mm, Motor Option: -, Cover: -, Cable Type: -, Cable Length: -, Driver Type: -, I/O Connector: -, Option: -

Series: LEKFS, Size: 40, Motor Mounting Position: In-line, Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm), Stroke: 500, Motor Option: w/o Option, Seal Band Stopper: Standard, Actuator Cable Type, Length: R5 (5), Controller: C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type), Controller Mounting: 7 (Screw Mounting)

Series: LEKFS, Size: 25, Motor Mounting Position: In-line, Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm), Stroke: 500, Motor Option: w/o Option, Seal Band Stopper: Standard, Actuator Cable Type, Length: R5 (5), Controller: C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type), Controller Mounting: 8 (DIN Rail Mounting)

Series: LEKFS, Size: 16, Motor Mounting Position: R (Right Side Parallel), Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm), Stroke: 500, Motor Option: w/o Option, Seal Band Stopper: Standard, Actuator Cable Type, Length: R5 (5), Controller: CP1 (JXCP1, PROFINET, Direct Input Type), Controller Mounting: 7 (Screw Mounting

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

r5 L+' tL-l-s!" 5 (+ (Note 1)Maximum slalion I (Nole2)(+)aid()indicabnredireclionolDCsolnoidvalvewthliqhi.su'ge!olagesdppreser iNole 3) Seds VFS3o0HOM ls also Dossible aNote 1 I [,!

LX Series Compact Electric Actuators

I ':"1 6 65 274 1 7 7 1 7 7 6 52 55 -r5 loo . 6 . 202 202 6 8 65 320 227 227 6 47 75 litzs . 70 345 252 252 6 47 150 6 8 370 277 2 7 7 r 1 65 T-slot A dimensions T-slot B dimensions $unies tX$ tilo To 0[dEl' tlect|'ic Acl||at0 AC Servo Motor 100vAc TS45O1N -rslsotl I Nole 1) l Applicable Applicable TarnaFwa Sek I 2OOVAC TS45O1N AppLicable L Applicable 3 -.'

Vacuum

Y, Z directions 3limes each 12.6FS or lesis at 25'C 01: Rl/8. [.r5 x 0 8, Tl: NPT1/8, M5 x 0 8.

NVEPA|VEFseies

This "minimum level" may be adjusted to any point between zero and 500 mA allowing changes in total c nent scale. Ohe "Zero" adjustment may be INCREASED by turning the NULL ad.iustnent screw docl$ise (to the riglrt). (See figure 6-2) DITHER The dither frequency may be adiusted to minimize hysteresis.

-fl Seies

r5 L+' tL-l-s!" 5 (+ (Note 1)Maximum slalion I (Nole2)(+)aid()indicabnredireclionolDCsolnoidvalvewthliqhi.su'ge!olagesdppreser iNole 3) Seds VFS3o0HOM ls also Dossible aNote 1 I [,!

Vacuum

Y, Z directions 3limes each 12.6FS or lesis at 25'C 01: Rl/8. [.r5 x 0 8, Tl: NPT1/8, M5 x 0 8.

Accuracy: Basic Type, Size: 63, Motor Type: S3 (200W Output, Incremental Encoder), Lead, mm: A (Size 40: 16mm, Size 63: 20mm, Size 100: 25mm), Stroke: 500mm, Motor Option: None, Cover: w/o Cover, Cable Type: S (Standard), Cable Length: 5m, Driver Type: A1 (LECSA1-S, 100~120V, Incremental, Pulse Input)

Accuracy: Basic Type, Size: 63, Motor Type: S3 (200W Output, Incremental Encoder), Lead, mm: A (Size 40: 16mm, Size 63: 20mm, Size 100: 25mm), Stroke: 500mm, Motor Option: None, Cover: w/o Cover, Cable Type: S (Standard), Cable Length: 5m, Driver Type: A1 (LECSA1-S, 100~120V, Incremental, Pulse Input), I/O Connector: H (Connector)

Accuracy: Basic Type, Size: 63, Motor Type: S3 (200W Output, Incremental Encoder), Lead, mm: A (Size 40: 16mm, Size 63: 20mm, Size 100: 25mm), Stroke: 500mm, Motor Option: None, Cover: w/o Cover, Cable Type: R (Robotic, Flexible), Cable Length: 2m, Driver Type: A1 (LECSA1-S, 100~120V, Incremental, Pulse Input)

Accuracy: Basic Type, Size: 63, Motor Type: 200W Output, Incremental Encoder, Lead, mm: Size 40: 16mm, Size 63: 20mm, Size 100: 25mm, Stroke: 500mm, Motor Option: None, Cover: w/o Cover, Cable Type: Standard, Cable Length: 5m, Driver Type: LECSA1-S, 100~120V, Incremental, Pulse Input, I/O Connector: -, Option: -

Accuracy: Basic Type, Size: 63, Motor Type: 200W Output, Incremental Encoder, Lead, mm: Size 40: 16mm, Size 63: 20mm, Size 100: 25mm, Stroke: 500mm, Motor Option: None, Cover: w/o Cover, Cable Type: Standard, Cable Length: 5m, Driver Type: LECSA1-S, 100~120V, Incremental, Pulse Input, I/O Connector: Connector, Option: -

Accuracy: Basic Type, Size: 63, Motor Type: 200W Output, Incremental Encoder, Lead, mm: Size 40: 16mm, Size 63: 20mm, Size 100: 25mm, Stroke: 500mm, Motor Option: None, Cover: w/o Cover, Cable Type: Robotic, Flexible, Cable Length: 2m, Driver Type: LECSA1-S, 100~120V, Incremental, Pulse Input, I/O Connector: -, Option: -

Fluoropolymer Piping Equipment

-R5 LQ3T21-R6 LQ3T31-R1 LQ3T31-R2 LQ3T31-R5 LQ3T31-R6 LQ3T32-R1 LQ3T32-R5 LQ3T41-R1 LQ3T41-R5 LQ3T51-R1 LQ3T51-R5 LQ3T61-R1 LQ3T61-R5 4 x 3 1/4" x 5/32" 2 1 TL TIL TLM TILM 6 x 4 2 3/8" x 1/4" 3 TD TID 1/4" x 5/32" TH TIH 10 x 8 3 1/2" x 3/8" 4 8 x 6 12 x 10 4 3/8" x 1/4" 19 x 16 5 25 x 22 6 3/4" x 5/8" Note) For details of the applicable tubing sizes, refer to page 945. 5 1/2" x 3/8" 3/8

Size: 25, Motor Mounting Position: Bottom Mounting Type, AC Servo Motor: 100W Output, Absolute Encoder, Stroke: 500mm, Motor Option: None, Cable: Robotic Flexible Cable, Cable Length: 5m, Driver: -, I/O Connector: -

Series: Belt Drive, Size: 25, Motor: A [Servo Motor (24 VDC)], Lead: T, Stroke: 500mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: With, Positioning Pin Hole: Housing B (Bottom), Actuator Cable: Robotic Flexible Cable, Actuator Cable Length: 5m, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Mounting: -, Communication Plug Connector