Series: LEKFS, Size: 32, Motor Mounting Position: Left Side Parallel, Motor Type: Battery-less absolute, 24VDC, Step, Lead: Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm, Stroke: 200, Motor Option: w/o Option, Seal Band Stopper: Standard, Actuator Cable Type, Length: 3, Controller: -, Controller Mounting: -, Communication Plug Connector, I/O Cable: -

Industrial Filter

(Port size: R3/4) OUT of filtered fluid (Port size: R1 or R2) DRAIN Port to discharge all fluid when replacing the element. (Port size: R3/4) Table 1. Description and function of parts No.

2-Color Display Digital Flow Switch Series PFM

or less 4 x R3 or less 4 x R3 or less 4 x R3 or less 4 x R3 or less 4 x R3 or less Panel thickness 1 to 3.2 mm Panel thickness 1 to 3.2 mm Note) Piping entry direction: Minimum dimensions for bottom side piping.

Vacuum

&lfifitweBftl L x 36mm W x 59mm H, 4409 Houu incneasd by 250% tage nozzle design allows for suction tlow of to 250% higher than traditional single stage 3-stage nozzle design -in 0ne-Iomt Hffn$ ilt-in One,Touch fittings (O% SUP / O% VAC) for quick and easy process connection. filhn & txlau$ $ilemen f ilter and exhaust Silencer are an part of the vacuum ejector module. exhaust oDtion is also

Vacuum

&lfifitweBftl L x 36mm W x 59mm H, 4409 Houu incneasd by 250% tage nozzle design allows for suction tlow of to 250% higher than traditional single stage 3-stage nozzle design -in 0ne-Iomt Hffn$ ilt-in One,Touch fittings (O% SUP / O% VAC) for quick and easy process connection. filhn & txlau$ $ilemen f ilter and exhaust Silencer are an part of the vacuum ejector module. exhaust oDtion is also

10

U side 7 6 5 4 3 2 D side Stations 1 Cable 6 to 12 G1/2 G1/2 (44) R3 R4 T E D R1, R6 R5 R2 F F n x 1/8,1/4 OUT port (For common SUP type) IN port (For individual SUP type) (mm) n (stations) Size Dimensions 2 3 4 5 6 7 8 9 10 86 100 90 108 103 121 L1 L2 L1 L2 L1 L2 122 136 126 144 144 162 158 172 162 180 185 203 194 208 198 216 226 244 230 244 234 252 267 285 266 280 270

ASR

(mm) Port size Balancing pressure 6 8 10 12 Pressure valve ASR430F-02 ASR530F-02 ASR530F-03 ASR630F-03 ASR630F-04 Flow valve ASQ430F-02 ASQ530F-02 ASQ530F-03 ASQ630F-03 ASQ630F-04 R1/4 R1/4 R3/8 R3/8 R1/2 Pressure valve Flow valve Speed controller Speed controller 15-16-3 4 Air Saving Valve Pressure Valve Flow Valve Series ASR/Series ASQ How to Order Pressure valve: Series ASR ASR F20 4 3

ASR

(mm) Port size Balancing pressure 6 8 10 12 Pressure valve ASR430F-02 ASR530F-02 ASR530F-03 ASR630F-03 ASR630F-04 Flow valve ASQ430F-02 ASQ530F-02 ASQ530F-03 ASQ630F-03 ASQ630F-04 R1/4 R1/4 R3/8 R3/8 R1/2 Pressure valve Flow valve Speed controller Speed controller 15-16-3 Air Saving Valve Pressure Valve Flow Valve Series ASR/Series ASQ How to Order Pressure valve: Series ASR ASR F20 4 3 0

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

or less 4 x R3 or less 4 x R3 or less 4 x R3 or less 4 x R3 or less 4 x R3 or less Panel thickness 1 to 3.2 mm Panel thickness 1 to 3.2 mm Note) Piping entry direction: Minimum dimensions for bottom piping.

High Vacuum Angle Valve

Nil FKM 1349-80*1 N1 EPDM 2101-80*1 P1 Barrel Perfluoro 70W Q1 Kalrez 4079 R1 Chemraz SS592 R2 SS630 R3 SSE38 S1 VMQ 1232-70*1 T1 FKM for Plasma 3310-75*1 *1 Values at normal temperature, excluding gas permeation *2 Refer to Construction on page 5 for changed part. Number corresponds with the parts number on the construction drawing.

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

or less 4 x R3 or less 67 or more 739 Series ZSE80/ISE80 Dimensions Panel mount (Bottom ported) 50 40 24.2 7.5 51.2 71.1 38.6 Panel-cut dimensions 360.3 36 x n pcs. + 4 x (n pcs. 1) 360.3 36 4 x R3 or less 4 x R3 or less 740 Series ZSE80/ISE80 2-Color Display Digital Pressure Switch For General Fluids F in brackets stand for the function codes.

IDX-OM-M051

/4 R3/4 20 50 165 475 9902 1030 950 Facility water outlet 1.3 Name and function of parts Terminal block for signal (Symbol: W5) (Symbol: W5) R3/4 R3/4 Refer to 6.3 Outer dimensions 6 5 IDF100F~150F-W IDX-OM-M051 Air Dryer 6.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

material Part numbers indicating changed seal material and leakage Leakage Pa m3/s or less Note 1) Compound No. 1349-80 Symbol Nil N1 Seal material FKM EPDM BARREL PERFLUORO Changed part Note 2) Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 2101-80 2, 3 2 3 Nil A B C P1 70W 1.3 x 10-11 (FKM) 1.3 x 10-9 1.3 x 10-8 Kalrez 1.3 x 10-10 (FKM) Q1 R1 R2 R3

S Couplers Series KK/KKH/KK13

Series KK13 Series KK13 Series KK13 Manufactured by RECTUS AG 163 Variations Variations Series KK Series KK 165 to 173 Male thread type Port size Series M5 R1/8 R1/4 R3/8 R1/2 R3/4 KK2 KK3 KK4 KK6 Female thread type Port size M5 Series Rc1/8 Rc1/4 Rc3/8 Rc1/2 KK2 KK3 KK4 KK6 Nut fitting type (for fiber reinforced urethane hose) Applicable hose I.D.

Table of Contents

, 175, 200 250, 300, 350, 400 78.5 1.5 62.5 12 10 6 42 11.5 9 93 M5 21 21 30 M6 x 1.0 15 M6 x 1.0 5.6 9.5 5.5 1/8 37.5 13.5 28.5 26 WA WB Bore size (mm) Standard stroke (mm) R S T U VA VB X XA XB YY YL Z 100 to 175 st 200 to 250 st 300 to 400 st 100 to 175 st 200 to 250 st 300 to 400 st 75 st or less 75 st or less 25, 50, 75, 100, 125, 150, 175, 200, 250 16 20 25 200 24 54 25 3 62 3.5 46

Air Cylinder

Operating Pressure 250 psi 17.5 kgf/cm) Min.

20

VMG1-06-150-300 VMG1-06-200-300 VMG1-06-150-600 VMG1-06-200-600 VMG1-06-150-100 VMG1-06-200-100 VMG1-06-150-150 VMG1-06-200-150 VMG1-08-250-100 VMG1-08-300-100 VMG1-08-350-100 VMG1-08-250-150 VMG1-08-300-150 VMG1-08-350-150 VMG1-08-250-300 VMG1-08-300-300 VMG1-08-350-300 VMG1-08-250-600 VMG1-08-300-600 VMG1-08-350-600 31 32 33 34 35 36 37 38 41 42 43 44 45 46 47 48 49 50 51 52 300 mm Note

20

VMG1-06-150-300 VMG1-06-200-300 VMG1-06-150-600 VMG1-06-200-600 VMG1-06-150-100 VMG1-06-200-100 VMG1-06-150-150 VMG1-06-200-150 VMG1-08-250-100 VMG1-08-300-100 VMG1-08-350-100 VMG1-08-250-150 VMG1-08-300-150 VMG1-08-350-150 VMG1-08-250-300 VMG1-08-300-300 VMG1-08-350-300 VMG1-08-250-600 VMG1-08-300-600 VMG1-08-350-600 Nozzle size Nozzle length 1.5 2 1.5 2 1.5 2 1.5 2 2.5 3 3.5 2.5 3 3.5 2.5

V100

Station n L1 L2 L1 L2 Station 2 52 43 63 54 Station 20 340 331 369 360 3 68 59 80 71 4 84 75 97 88 5 100 91 114 105 6 116 107 131 122 7 132 123 148 139 8 148 139 165 156 9 164 155 182 173 10 180 171 199 190 11 196 187 216 207 12 212 203 233 224 13 228 219 250 241 14 244 235 267 258 15 260 251 284 275 16 276 267 301 292 17 292 283 318 309 18 308 299 335 326 19 324 315 352 343 Port size M5

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Lx = 400 mm, Ly = 250 mm, Lz = 1500 mm 4.