2

Applicable air dryer IDF100F IDF125F, 150F IDF190D, 240D IDF370D Capacity Type 360 400 400 400 7 kVA 9 kVA 14 kVA 18 kVA 540 650 650 650 400 450 450 450 260 300 300 300 300 350 350 350 11 13 13 13 30 40 40 40 94 kg Three220, 240, 380, 400, 415, 440 V (50/60 Hz) phase 109 kg 200V (50/60 Hz) D 4 x F A Double152 kg turn (mm) 179 kg 43 Optional Accessories Series IDF/IDU Air Preparation Equipment

Environment

0 300 200 400 100 500 600 Speed [mm/s] Speed [mm/s] LEPY LEPS LEY32m LEY32m for acceleration/deceleration: 2000 mm/s2 LER 90 50 80 Lead 4: LEY32C LEH 40 42 Horizontal work load [kg] Vertical work load [kg] 70 Lead 4: LEY32C LEY -X5 60 Lead 8: LEY32B 30 50 11LEFS 40 20 21 Lead 8: LEY32B 30 11LEJS Lead 16: LEY32A 20 10 Lead 16: LEY32A 10 25A0 0 0 300 200 400 100 500 600 0 300 200 400 100 500

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

400 500 500 200 200 LEY 0 0 0 0 0 10 5 15 20 0 10 5 15 20 30 25 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 LES Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 LEPY LEPS 1000 1000 800 800 1500 1500 Horizontal L2 [mm] L2 [mm] L2 [mm] L2 [mm] LER L2 600 600 1000 1000 Y m Me 400 400 LEH 500 500 200 200 LEY -X5 0 0 0 0 0 10 5 15 20 0 10 5 15 20 30 25 0 10 40 50 20 30 0 10

Compact 5-Port Solenoid Valve

JSY1000 series clamp bracket Wiring (JSY1000 series) JSY11M-15P-1A JSY11M-15P-2A F D-sub connector V Pm Flat ribbon cable V TC Spring type terminal block box V T Terminal block box V L Lead wire V S6 EX600 V Sm EX250 V Smm EX260 V S3 EX120 V Manifold Parts Nos.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note 1) 25P Note 1) 26P 20P Side entry Side entry Side entry Connector entry direction Connector entry direction Connector entry direction P. 523 P. 527 P. 531 P. 535 Top entry Side entry Top entry Top entry Side entry Side entry Without cable S0 S1 S2 S3 U0 U1 U2 U3 S0 S1 S2 S3 0 1 2 3 U0 U1 U2 U3 U0 U1 U2 U3 S0 S1 S2 S3 Without cable Without cable With cable (1.5 m) With cable (3 m) With

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note 1) 25P Note 1) 26P 20P Side entry Side entry Side entry Connector entry direction Connector entry direction Connector entry direction P. 523 P. 527 P. 531 P. 535 Top entry Side entry Top entry Top entry Side entry Side entry Without cable S0 S1 S2 S3 U0 U1 U2 U3 S0 S1 S2 S3 0 1 2 3 U0 U1 U2 U3 U0 U1 U2 U3 S0 S1 S2 S3 Without cable Without cable With cable (1.5 m) With cable (3 m) With

Table of Contents

P1 Sensor S1 S3 S2 S4 P2 S1, S2: Fix orifice S3: Variable orifice (adjusted by setting dial) S4: Detection nozzle 16-8-6 7 Series ISA2 Air Catch Sensor Internal Circuit and Wiring Circuit and Wiring for 2 Port Solenoid Valve NPN open collector output DC (+) Without indicator light DC circuit Without display light AC Circuit OUT Main circuit of switch Main circuit of switch Load 1 DC (+) 1

Battery-less

Lx = 400 mm, Ly = 250 mm, Lz = 1500 mm 4.

LEF-OM007xx

32 200 S3 200 to 230VAC LECSA2 A2 200 to 230VAC LECSA2 A2 Both side D Both side D 40 400 S4 40 400 S4 100 to 120VAC 100 to 120VAC LECSB1 LECSB1 B1 B1 25 100 S6 25 100 S6 Motor option 32 200 S7 AC servo motor (Absolute encoder 32 200 S7 AC servo motor (Absolute encoder LECSB2 LECSB2 200 to 230VAC B2 200 to 230VAC B2 B1,B2 B1,B2 Without lock Nil Without lock Nil 400 400 40 40 S8 S8 Cable length

LEC-OM07605CN

PE_ _ ]) [] PE01 **FCT1 1 0h 0h PE03 *FCT2 2 0003h 0003h PE04 **FBN 1 1 1 PE05 **FBD 1 1 1 PE06 BC1 400 400 [r/min] [r/min] PE07 BC2 100 100 [kpulse [kpulse ] ] PE08 DUF 10 10 [rad/s] [rad/s] PE10 FCT3 3 0h 0h PE34 **FBN2 2 1 1 PE35 **FBD2 2 1 1 PE41 EOP3 E-3 _ _ _ x 0 1 [Pr. PB51] 5 0h _ _ x _ 0h _ x _ _ 0h x _ _ _ 0h 5 42 5. 5.2.6 3 ([Pr.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

C 1 LE N 1 P Controller Actuator part number Option (Except cable specifications and actuator options) Example: Enter LEFS16A-400 for the LEFS16A-400B-R11N1.

VQ5000

Master station PLC made by Mitsubishi Electric Corporation Series MELSEC-A AJ71PT32-S3, AJ71T32-S3 A1SJ71PT32-S3 Max. 64 stations, connected to remote I/O stations (Max. 512 points). No. of output points, 16 points. No. of sta. occupied, 2 stations T unit Can be connected with PLC I/O card for serial transmission.

Main Body Peripheral Component: Peripheral Components, Input Power Supply: DC 24V, Position Detection: Incremental, I/O Module: PNP, Motor Type: Step motor (24‑V DC servo), Step data (points): 64, Actuator/cable type: LEL25LT-600, I/O cable length / communication plug(m): 1.5, Controller/driver mounting method: DIN rail mounting type

Table of Contents

300 200 100 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 MY3B max.

Digital Gap Checker

This reduces noise considerably compared with A much lower air consumption is required than the current model. the current model. 1: Conditions: Unseated for 5 seconds and seated for 20 seconds (For G type) Comparison of detection circuit ISA3 New New Current model (ISA2) A B EXH port EXH port P1 Sensor Sensor SUP port S1 S3 SUP port S2 Sensor S1 S4 S2 Detection port P2 Detection port C D

AC Servo Motor Driver (MECHATROLINK-III type)

Station Address S1 S2 00H to 02H: Disabled 0 0 to 2 (Do not use these addresses.) 03H (Factory setting) 0 3 04H 0 4 EFH E F F0H to FFH: Disabled F 0 to F (Do not use these addresses.) (2) Settings of the DIP Switch S3 The following table shows the settings of the DIP switch (S3). Switch No.

LEJ-OM004xx

D. *2 (4) S troke [mm] Standard Produced upon receipt of order 300 200 400 500 600 700 800 900 1000 1200 1500 Str o k e (m m ) Ty pe LEJS40 LEJS63 *2Strok es other than standard and produced up o n receipt o f order are available as special orders, so plea s e contact with our com pany . (9) Driver type *4 (7) Cable type *4 *5 *6 Com patible driv er P owe r supply v oltage [V ] Without

Serial Network

EX141-SSD1 (with network M12 Connector) EX140-SSD1-X16 (with network AMP connector) EX120/121/122-SMJ1 EX124 (U, D)-SMJ1 EX140-SMJ1 SDS SQ1000/2000, SZ3000/5000 N 0 16 VQ, SX, SY & SV VQ2000/4000/5000 SQ1000/2000, SZ3000/5000 N Y N 16 16 16 16 16 16 0 0 0 0 0 CC-Link EX120/121/122-SMB1 EX123/124(U, D)-SMB1 IN313-MB1 N Y N VQ, SX, SY & SV VQ2000/4000/5000 (N)VFR/S, (N)VZS, ISO MelsecNet Mini-S3

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

-X 20Data Table (1) 100 Total operation cycles (10,000) 50 40 30 20 10 100 200 300 400 500 700 1000 Stroke (mm) Inner Cover Holding Screw Tightening Torques [Nm] Tightening torque Model Screw size CYV15 0.3 M3 x 0.5 CYV32 2.45 M6 x 1 Plate Stroke adjustment screw (inner cover) Hexagon wrench Inner cover holding screw direction + direction 8-18-11

, 500600, 700, 800, 9001000501510001000100094076062052020,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.022050/20Ball screwLinear guide5 to 4090 or less (No condensation)400 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)2102302181275Non-magnetizing