VQ5000

Master station PLC made by Mitsubishi Electric Corporation Series MELSEC-A AJ71PT32-S3, AJ71T32-S3 A1SJ71PT32-S3 Max. 64 stations, connected to remote I/O stations (Max. 512 points). No. of output points, 16 points. No. of sta. occupied, 2 stations T unit Can be connected with PLC I/O card for serial transmission.

2

Wall Note) For air-cooled type, leave a space of at least 600 mm between the heat exhausting surface and the wall. For water-cooled type, leave a space at least 600 mm between the facility water piping side and the wall. Leave at least 600 mm on the sides indicated with .

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

, 700, 800 900, 1000, 1200 300, 400, 500, 600, 700, 800, 900 1000, 1200, 1500 Work load [kg] Note 2) Horizontal 30 55 45 85 Vertical 5 10 10 20 Up to 500 1200 600 1200 600 501 to 600 1050 520 1200 600 601 to 700 780 390 1200 600 701 to 800 600 300 930 460 801 to 900 480 240 740 370 901 to 1000 390 190 600 300 1001 to 1100 320 160 500 250 1101 to 1200 270 130 420 210 1201 to 1300 360 180

Environment

20: LEY63A Motorless 50 LAT 0 0 200 400 600 800 1200 1000 Speed [mm/s] LZ Allowable Stroke Speed [mm/s] LC3F2 Model AC servo motor Lead Stroke [mm] Symbol [mm] 30 50 100 150 200 250 300 350 400 450 500 600 700 800 A 12 900 600 B 6 450 300 C 3 225 150 LEY25 Motor mounting position: Top/Parallel, In-line 100 W /40 (Motor rotation speed) (4500 rpm) (3000 rpm) A 20 1200 800 B 10 600 400 C

Compact 5-Port Solenoid Valve

JSY1000 series clamp bracket Wiring (JSY1000 series) JSY11M-15P-1A JSY11M-15P-2A F D-sub connector V Pm Flat ribbon cable V TC Spring type terminal block box V T Terminal block box V L Lead wire V S6 EX600 V Sm EX250 V Smm EX260 V S3 EX120 V Manifold Parts Nos.

VQ5000

Port P Port R2 Unit mounting position IP65 available Kit T1 With terminal blocks 1 to 12 stations D side U side Without SI unit With general purpose type SI unit Mitsubishi: MELSECNET/MINI-S3 data link system Mitsubishi: MELSECNET/MINI-S3 data link system (2 power supply systems) OMRON: SYSBUS wire system Sharp: Satellite I/O link system NKE: Simplified wiring (16 point output) Sanks: S-LINK

Battery-less

L1 [mm] 300 X Me 200 m 100 0 Work load m [kg] 0 1 2 3 4 5 600 Horizontal/Bottom 500 L2 400 L2 [mm] 300 Y Me m 200 100 0 Work load m [kg] 0 1 2 3 4 5 600 Me 500 400 L3 [mm] m 300 L3 Z 200 100 0 Work load m [kg] 0 1 2 3 4 5 600 500 L4 400 L4 [mm] 300 X Me 200 m 100 0 Work load m [kg] 0 1 2 3 4 5 600 Me 500 400 m L5 [mm] 300 Wall L5 Y 200 100 0 Work load m [kg] 0 1 2 3 4 5 600 500 400 L6 [mm

Digital Gap Checker

.: 600 kPa 1: Compared with the ISA2 with 0.2 MPa pressure gauge.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Port P Port R2 Unit mounting position IP65 available Kit T1 With terminal blocks 1 to 12 stations D side U side Without SI unit With general purpose type SI unit Mitsubishi: MELSECNET/MINI-S3 data link system Mitsubishi: MELSECNET/MINI-S3 data link system (2 power supply systems) OMRON: SYSBUS wire system Sharp: Satellite I/O link system NKE: Simplified wiring (16 point output) Sanks: S-LINK

Vacuum System Peripherals:

Mitsubishi Electric Corp.: MELSECNET MINI-S3 Data Link System B Special specifications OMRON Corp.: SYSBUS Wire System C SHARP Corp.: Satellite I/O Link System D Matsushita Electric Works, Ltd.: MEWNET-F System E NKE Corp.: Uni-wire System (16 points output) F1 When creating the special specifications, complete the stations table on the right.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

M There are currently 3 versions available: version 1 products (V1.m or S1.m), version 2 products (V2.m or S2.m), and version 3 products (V3.m or S3.m). Keep in mind that in order to write a backup file (.bkp) to another controller with the JXC-BCW, it needs to be the same version as the controller that created the file.

LEF-OM007xx

*Refer to the table of Applicable stroke 6mm 6mm 8mm 8mm 10mm 10mm B B Cable type *Applicable stroke Standard produced upon receipt of order Without cable Nil Without cable Nil 100 100 200 200 300 300 400 400 500 500 600 600 700 700 800 800 900 900 1000 1000 Robotic type cable R Robotic type cable R 11-LEFS25 11-LEFS25 Standard cable S Standard cable S 11-LEFS32 11-LEFS32 Motor cable

LEJ-OM004xx

Crean class Amount of Type Speed recommended vacuum (mm/s) ISO 14644-1 Fed.Std.209D aspiration 6 1000 10 5 100 20 4 10 30 6 1000 50 5 100 60 4 10 70 6 1000 20 5 100 30 4 10 50 6 1000 30 5 100 70 4 10 90 600 11-LEJS40 1200 600 *Please aspirate it from the port on both sides when aspirating 50/min(ANR). Please select "D" about the type. 11-LEJS63 1200 * Based on SMC test condition.

LEC-OM07605CN

STO 13.3.3 3.2.2 ISO/EN ISO 13849-1 3 PL d 24 V EMG S4 S3 KM1 S2 KM1 K3 +24 V XS0 XS1 Z00 Z10 Z20 KM1 MELSEC (QS90SR2S) KM1 X0 COM0 24G X1 COM1 Z01 Z11 Z21 CN8 STO1 S1 EMG () STO2 STOCO M K3 TOFB1 TOFCOM 0 V TOFB2 20 S1STO (STO ) S2(STO ) S3ON S4OFF KM1 K3 EMG CN3 EM1 EM2 M . STOS1EMG0 STO[AL. 63 STO] 13.

Table of Contents

1000 20 20100, 200, 300, 400, 500, 600, 800 25 1200 100, 200, 300, 400, 500, 600, 800, 1000 25 Data 2 axes 1500 32 Note) Please contact SMC if it is used by exceeding the maximum stroke length.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Cable length 1 2 3 4 7 300mm 500mm 1000mm 2000mm 5000mm 497 4/5 port solenoid valve Series 10-SYJ3000 2 position single [ ]: AC G H G H With bracket: 10-SYJ3123-M3-F Grommet (G), (H): 10-SYJ3123-M3 G: Approx. 300 H: Approx. 600 (Lead wire length) 54.4[56.6] 28.4 32.2 22 2-3.5 (For mounting) 3.2 7.1 13.2 16.4 10 + 8.2 A B 4 19.3 7 11.5 Manual override 34.7[41.7] M3 x 0.5 (A, B port) 2-1.8

Title not found

N lszo-oH /Pressure Center 5 GJ1.81(300) H:23.62(600) Leading wire length Manual ovorrido o (PE Port) w/filter ' r ' r ' 1 ' I : : : ' ' M type plug connector/Nv4t320-OM/Closd Center tMzi!

Vacuum

Workpiece: Generic term for the object which is to be adsorbedVacuum Pressure Equivalents Chart Unit Conversion Table -14.7 760 29.9 -101.3 -13.5 700 27.6 -93.3 1 1 _ 6 600 23.6 -80.0 -9.7 500 19.7 -66.7 400 15.8 -53.3 -5.8 300 1 1 . 8 -40.0 -3.9 200 7.9 -26.7 100 3.9 .

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

of gravity [mm] A, B: Distance to guide shaft [mm] g: Gravitational acceleration [9.8 m/s2] M2 M1 M3 m x g m x g Guide shaft mounting surface m x g Central axis of guide Central axis of cylinder Dynamic Moment Moment generated by the load equivalent to impact at the stroke end We: Load equivalent to impact [N] m : Load mass [kg] U: Max. speed [mm/s] g: Gravitational acceleration [9.8 m/s3

20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021650/20Ball screwLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)6517528725Non-magnetizing lock1977.924 VDC 010%