SX

supply 24 V 0 V 24 V 0 V D G D G 24 V 0 V Slave unit (S1 unit) Slave unit (S1 unit) Slave unit Master station (S1 unit) SG B A SG B A FG SG B A FG SG B A FG FG Power supply 24 V 0 V Twisted pair wire with shielding DG 1-6-115 116 SX3000: Serial Transmission Unit/Plug-in SS5X3-45SStations UC4 C6 (Pitch) P = 10.5 DIN rail release button 2-One-touch fittings (P , R port) Applicable tubing O.D

High Vacuum Angle Valve

Model XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 Rated voltage for heater 90 to 240 VAC Heater assembly quantity 1 1 1 1 H4 100C 100 V 200/40 200/50 400/100 600/150 Heater assembly quantity used Heater power W (Nominal value) Inrush/Power consumption (Option symbol, Operating voltage) 200 V 800/40 800/50 1600/100 2400/150 Heater assembly quantity 1 1 1 1 2 H5 120C 100 V 200/40 400/70 400/

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note 1) 25P Note 1) 26P 20P Side entry Side entry Side entry Connector entry direction Connector entry direction Connector entry direction P. 523 P. 527 P. 531 P. 535 Top entry Side entry Top entry Top entry Side entry Side entry Without cable S0 S1 S2 S3 U0 U1 U2 U3 S0 S1 S2 S3 0 1 2 3 U0 U1 U2 U3 U0 U1 U2 U3 S0 S1 S2 S3 Without cable Without cable With cable (1.5 m) With cable (3 m) With

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note 1) 25P Note 1) 26P 20P Side entry Side entry Side entry Connector entry direction Connector entry direction Connector entry direction P. 523 P. 527 P. 531 P. 535 Top entry Side entry Top entry Top entry Side entry Side entry Without cable S0 S1 S2 S3 U0 U1 U2 U3 S0 S1 S2 S3 0 1 2 3 U0 U1 U2 U3 U0 U1 U2 U3 S0 S1 S2 S3 Without cable Without cable With cable (1.5 m) With cable (3 m) With

1 Blow Gun Series VMG K
M
H
D
MS Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com T
VMG Pressure loss is less than 1%. (nozz

nozzle 900 400 KNL3-06-200 KNS-R02-110-8 KNL6-06-200 800 350 Flow rate [l/min (ANR)] Flow rate [l/min( ANR)] 700 300 600 250 KNS-R02-090-8 KNL3-06-150 500 KNL6-06-150 200 400 KNS-R02-100-4 150 300 100 KNS-R02-075-4 200 50 100 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Supply pressure [MPa] Supply pressure [MPa] 15-7-5 6 Series VMG Dimensions VMG11/Piping

Electric Actuators

T-slot 2 dimensions Compatible Motors Switch Internal Circuit D-Y7GL Motor output (W) Motor model Brake Manufacturer Power supply voltage (VAC) Motor specification symbol Controller driver model + Brown lead wire 100/110 200/220 100 200 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230 LC1-1B1H1Without brake (Horizontal specification) Main circuit

Table of Contents

Caution 5 150 100 200 300 1.

ITV

(Error number 5) Blue S1 White Vs Black S2 Set Pressure Range Vs: Power supply 24 VDC 12 to 15 VDC The regulating pressure range, by unit of standard measured pressure, is shown in the table below. One of the preset pressures P1 through P4 is selected by the ON/OFF combination of S1 and S2.

Air-hydro Unit

W QL S QB NL P 50 100 200 300 400 600 700 800 500 CC63-S1-G CC100-S1-G CC100-L1-G CC160-L1-G CC63-S1-G CC100-1-G CC160-L1-G 11 9.5 30 0 3 86 62.5 28 228.5 278.5 378.5 503.5 603.5 728.5 13 7 2 5 120 32 82.5 33 286 386 511 611 736 836 7 2 13 120 32 33 5 92 399 524 624 1049 949 749 849 Hexagon socket head cap screw is used for mounting hole. 7 0 185 46 2.5 20 120 29 D-X Technical Data

Table of Contents

Series MSQ Rotary Table Rack & Pinion Style Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 . Features. Model Selection . Series MSQ Rotary Table: Basic Type/High Precision Type Rack & Pinion Style Size: 1, 2, 3, 7. How to Order . Specifications. Construction. Dimensions . Series MSQ Rotary Table: Basic Type/High Precision Type Rack & Pinion Style Size: 10, 20, 30, 50, 70, 100, 200.

CC

stroke W S QL QB P NL 800 700 600 500 400 300 200 100 50 -X CC63-S1-G CC100-S1-G CC100-L1-G CC160-L1-G CC63-S1-G CC100-1-G CC160-L1-G 9.5 11 0 30 86 3 28 62.5 728.5 603.5 503.5 378.5 278.5 228.5 7 13 2 32 120 5 33 82.5 611 511 386 286 836 736 207 13 2 32 120 5 33 92 624 524 399 949 849 749 1049 Hexagon socket head cap screw is used for mounting hole. 7 20 2.5 46 185 0 29 120 Data 10-17

CRB2/CRBU2/CRB1

A parallel keyway is used instead of chamfer for size 40. +5 0 +5 0 +4 0 = Max. = 200 +4 0 = Max. = 110 End of rotation e g e n g a n r a r n n o o i t i a t a t End of rotation o t o R R Chamfer (Start of rotation) Chamfer (Start of rotation) (90) (45) A port B port A port B port Start of rotation is the position of the chamfer (keyway) when B port is pressurized.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

After returning to the origin position, the SETON and INP signals are output. 0 Absolute: 200 Operation w [Specify Step No.2 to input the DRIVE signal.] 200 Absolute: 100 Step data No. defining operation The operation starts by specifying a registered step data No. to input the DRIVE signal.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Example: -XA31A32 Change rotation range between 0 to 200 10, 15, 20, 30, 40 Change rotation range between 0 to 110 Reversed shaft Fluorine grease These specifications are not available for rotary actuators with auto switch unit and angle adjuster. A total of four XA and XC combinations is available.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Example: -XA31A32 Change rotation range between 0 to 200 10, 15, 20, 30, 40 Change rotation range between 0 to 110 Reversed shaft Fluorine grease These specifications are not available for rotary actuators with auto switch unit and angle adjuster. A total of four XA and XC combinations is available.

Table of Contents

Refer to pages starting with 140 for mounting. 18 T-slot 2 dimensions Compatible Motors Switch Internal Circuit D-Y7GL Motor output (W) Motor model Brake Manufacturer Power supply voltage (VAC) Motor specification symbol Controller driver model + Brown lead wire LC1-1B1H1100/110 200/220 100 200 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230

Electric Actuator with Integrated Guide

Motor output (W) Motor model Compatible driver model Power supply voltage (V AC) Motor dimension (mm) 100/115 MSD021P1E MSM021P1A Matsushita Electric Industrial Co., Ltd. 95 MSM022P1A 200 200/230 MSD023P1E 100/115 MR-C20A1 Mitsubishi Electric Corporation 89 200 HC-PQ23 200/230 MR-C20A 100/115 SGDE-02BP 200 SGME-02BF12 Yasukawa Electric Corporation 96.5 200/230 SGDE-02AP SGME-02AF12 Refer

Proposals for Energy Saving

D Outside diameter L1 1.5 2 2 2.5 2.5 3 1.5 2 2 2.5 2.5 3 6 6 8 8 10 10 6 6 8 8 10 10 300 300 300 300 300 300 600 600 600 600 600 600 KNL3-06-150 KNL3-06-200 KNL3-08-200 KNL3-08-250 KNL3-10-250 KNL3-10-300 KNL6-06-150 KNL6-06-200 KNL6-08-200 KNL6-08-250 KNL6-10-250 KNL6-10-300 O.D.

Digital Gap Checker

0.03 mm 0.30 0.03 0.15 0.20 0.02 0.10 0.01 mm 0.10 0.01 0.05 0.05 mm 0.02 mm 0 0 0 Supply pressure [kPa] 75 100 125 150 175 200 225 Supply pressure [kPa] 75 100 125 150 175 200 225 Supply pressure [kPa] 75 100 125 150 175 200 225 Piping length: 5 m Piping length: 5 m Piping length: 5 m Reference pressure 0.06 Reference pressure 0.30 Reference pressure 0.60 The distance of switch ON [mm]

CEx-OMQ0011

P16 S1 S1 S1 S1 S2 S2 S2 S2 ... ... ... ... S32 S32 S32 S32 0.5mm) 1 2 2. 3.