Table of Contents

S1 S2 PS P1 Indicator light Vacuum source Pressure sensor Z I SE1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Adjustment needle S3 S4 P2 ZSP Adsorption (0.3 to 1.2) ISA2 Internal Circuit and Wiring Example IS Lead wire colors inside ( ) are those prior to conformity

Electric Actuator/Slider Type

800 800 800 800 L4 L4 [mm] L4 [mm] L4 [mm] L4 [mm] 600 600 600 600 Me X 400 400 400 400 m 200 200 200 200 0 0 0 0 0 10 20 30 50 40 0 20 40 60 80 0 10 5 15 20 0 10 5 15 20 30 25 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 Me L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 600 600 600 600 L5 Wall Y 400 400 400 400 200 200 200 200 0 0 0 0 0 10 20 30 50

LEKF-OMZ0035

Weight[kg] Series LEKFS25 Stroke [mm] 50 100 150 200 250 300 350 400 450 500 600 700 800 S2 2.0 2.1 2.3 2.4 2.6 2.7 2.8 2.9 3.1 3.2 3.5 3.7 4.0 Motor type T6 2.1 2.2 2.4 2.5 2.7 2.8 2.9 3.0 3.2 3.3 3.6 3.8 4.1 Additional weight with lock [kg] 0.2 Series LEKFS32 Stroke [mm] 50 100 150 200 250 300 350 400 450 500 600 700 800 900 1000 S3 3.4 3.6 3.8 4.0 4.3 4.5 4.7 4.9 5.1 5.3 5.8 6.2 6.6 7.1

2

10 10 P1 = 0.5 MPa P1 = 0.7 MPa IDG 20 20 P1 = 0.7 MPa IDG100 IDG75 30 30 IDG75H IDG100H 40 40 50 50 0 200 400 600 800 1000 0 400 800 1200 1600 Outlet air flow rate (L/min [ANR]) Outlet air flow rate (L/min [ANR]) Standard dew point40C [Symbol: L], 60C [Symbol: S] IDG30LA, IDG50LA IDG60LA, IDG60SA Outlet air atmospheric pressure dew point (C) Outlet air atmospheric pressure dew point (C)

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

800 1500 1500 LEL L1 L1 [mm] L1 [mm] L1 [mm] L1 [mm] 600 600 1000 1000 X m Me LEM 400 400 500 500 200 200 LEY 0 0 0 0 0 10 5 15 20 0 10 5 15 20 30 25 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 LES Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 LEPY LEPS 1000 1000 800 800 1500 1500 Horizontal L2 [mm] L2 [mm] L2 [mm] L2 [mm] LER L2 600 600 1000 1000 Y m Me 400 400 LEH

Environment

20: LEY63A Motorless 50 LAT 0 0 200 400 600 800 1200 1000 Speed [mm/s] LZ Allowable Stroke Speed [mm/s] LC3F2 Model AC servo motor Lead Stroke [mm] Symbol [mm] 30 50 100 150 200 250 300 350 400 450 500 600 700 800 A 12 900 600 B 6 450 300 C 3 225 150 LEY25 Motor mounting position: Top/Parallel, In-line 100 W /40 (Motor rotation speed) (4500 rpm) (3000 rpm) A 20 1200 800 B 10 600 400 C

ISA2

P1 Sensor S1 S3 S2 S4 P2 S1, S2: Fix orifice S3: Variable orifice (adjusted by setting dial) S4: Detection nozzle 16-8-6 7 Series ISA2 Air Catch Sensor Internal Circuit and Wiring Circuit and Wiring for 2 Port Solenoid Valve NPN open collector output DC (+) Without indicator light DC circuit Without display light AC Circuit OUT Main circuit of switch Main circuit of switch Load 1 DC (+) 1

Compact 5-Port Solenoid Valve

JSY1000 series clamp bracket Wiring (JSY1000 series) JSY11M-15P-1A JSY11M-15P-2A F D-sub connector V Pm Flat ribbon cable V TC Spring type terminal block box V T Terminal block box V L Lead wire V S6 EX600 V Sm EX250 V Smm EX260 V S3 EX120 V Manifold Parts Nos.

Battery-less

800 800 800 L2 L2 [mm] L2 [mm] L2 [mm] L2 [mm] 600 600 600 600 Y 400 400 400 400 Mer m 200 200 200 200 0 0 0 0 0 2 4 6 8 10 12 14 0 10 20 30 40 50 0 10 20 30 40 50 60 0 5 10 15 20 25 30 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 2000 2000 Mep 1500 1500 1500 1500 L3 [mm] L3 [mm] L3 [mm] L3 [mm] m 1000 1000 1000 1000 L3 Z 500 500 500 500 0 0 0 0 0 5 10 15 20 25 30

Vacuum System Peripherals:

ZM ZH ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com r Stations ZL Indicate X for the position of ejector/valve, etc.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Terminal name Details V+ Power supply (+) for DeviceNet CAN_H Communication wire (High) Drain Grounding wire/Shielded wire CAN_L Communication wire (Low) V Power supply () for DeviceNet w USB cable JXC-W2-U 800 For IO-Link 800 Straight type JXC-CL-S * The communication plug connector for IO-Link is an accessory. e Controller setting software (CD-ROM) JXC-W2-S 120 Communication plug connector

LEF-OM007xx

*Refer to the table of Applicable stroke 6mm 6mm 8mm 8mm 10mm 10mm B B Cable type *Applicable stroke Standard produced upon receipt of order Without cable Nil Without cable Nil 100 100 200 200 300 300 400 400 500 500 600 600 700 700 800 800 900 900 1000 1000 Robotic type cable R Robotic type cable R 11-LEFS25 11-LEFS25 Standard cable S Standard cable S 11-LEFS32 11-LEFS32 Motor cable

Serial Network

Call toll-free 1-800-SMC-SMC1 to reach a branch near you. Solutions for the Automotive Industry SERIAL NETWORKS SOLENOID VALVE MANIFOLDS Because of the enormity and complexity of many Automotive Industry applications, Serial Network systems provide the solutions needed to handle such challenges.

VQ5000

Port P Port R2 Unit mounting position IP65 available Kit T1 With terminal blocks 1 to 12 stations D side U side Without SI unit With general purpose type SI unit Mitsubishi: MELSECNET/MINI-S3 data link system Mitsubishi: MELSECNET/MINI-S3 data link system (2 power supply systems) OMRON: SYSBUS wire system Sharp: Satellite I/O link system NKE: Simplified wiring (16 point output) Sanks: S-LINK

Table of Contents

, 300, 350 400, 450, 500 15 1000 (2) 20 1500 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800 25, 32 3000 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800, 900, 1000 40 3000 Note 1) Please contact SMC if the maximum stroke will be exceeded.

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

MTS MY CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX Caution Particulate Generation Characteristics Caution 1. A sine cushion (smooth start-up, soft stop) function is included in the standard specifications.

ZSP1

S1 S2 PS P1 Indicator light Vacuum source Pressure sensor Z I SE1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Adjustment needle S3 S4 P2 ZSP Adsorption (0.3 to 1.2) ISA2 Internal Circuit and Wiring Example IS Lead wire colors inside ( ) are those prior to conformity

LEJ-OM004xx

D. *2 (4) S troke [mm] Standard Produced upon receipt of order 300 200 400 500 600 700 800 900 1000 1200 1500 Str o k e (m m ) Ty pe LEJS40 LEJS63 *2Strok es other than standard and produced up o n receipt o f order are available as special orders, so plea s e contact with our com pany . (9) Driver type *4 (7) Cable type *4 *5 *6 Com patible driv er P owe r supply v oltage [V ] Without

INFORMATION Step Motor Controller 5 types of communication protocols New New

For single axis Actuator cable type/length Nil Without cable S1 Standard cable 1.5 m S3 Standard cable 3 m S5 Standard cable 5 m R1 Robotic cable 1.5 m R3 Robotic cable 3 m R5 Robotic cable 5 m R8 Robotic cable 8 m*1 Option Caution Nil Without option S With straight type DeviceNet communication plug for JXCD1 T With T-branch type DeviceNet communication plug for JXCD1 [CE-compliant products

When the LEF is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein..Body size: 16, 25, 32, 40, Ball screw drive , Applicable stroke range: 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000, 2 types of motors: servo motor ball screw drive or step motor belt drive , Controller mounting: screw or DIN