0.4

Bore size MB, CA2 series Pressure 0.5 MPa Load factor 50% Stroke 500 mm CM2 series Pressure 0.5 MPa Load factor 50% Stroke 300 mm CJ2 series Pressure 0.5 MPa Load factor 50% Stroke 60 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VQC1101 800 700 600 500 400 300 200 100 0 VQC2101 It

VS 8-2/VS 8-4

The dimension is added by 47 mm at 1 piece addition. 7/8 inch connector type Rc, G (According to ISO1179-1), NPTF 1/8" Pilot port 2 x Rc, G (According to ISO1179-1), NPTF 3/8" 3(R) port Rc, G (According to ISO1179-1), NPTF 1/8" Pilot exhaust port M4 x 7 earth thread 56.6 11.5 8 30 57.5 82 35.5 31.3 22 28.5 181.5 11.3 13.5 19 2 x Rc, G (According to ISO1179-1), NPTF 3/8" 1(P) port 2n x Rc,

New

For Air Upstream pressure of valve P1 z 1.0 MPa Downstream pressure of valve (P2) [MPa] 1.0 0.8 Subsonic Critical 0.9 0.6 pressure 0.8 0.7 Sonic 0.4 0.6 0.5 0.4 0.2 0.3 0.2 0.1 0 2 50 100 150 200 250 300 400 350 3 100 200 300 400 500 4 400 600 800 1,000 1,200 5 200 1,400 600 1,000 7 350 700 8 400 700 1,000 1,300 10 500 700 10 700 1,000 Flow rate Q [L/min (ANR)] How to read the graph The sonic

0.4

400 300 200 100 0 VQ2101 Port size: 8 One-touch fitting It is when the cylinder is extending that is meter-out controlled by speed controller which is directly connected with cylinder, and its needle valve with being fully open.

AC

(AR300, 400, 500 only) Bowl can be attached and detached with one hand.

VQ5000

In addition, 3 of the wiring types are available with IP65 enclosures. 50 63 80 100 125 140 160 180 200 250 1100 1000 900 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VQ5100--04 VQ5101--04 IP65 compatible Enclosure Individual wiring type kit (Connector) C It is when the cylinder is extending that is meter-out controlled by speed

Table of Contents

, 450, 500, 600, 700, 800 4000 32 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 40 5000 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 6000 63 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 Made to Order Specifications (For details, refer to page 10-21-1.)

Modular Design with Uniform Body Style

300 600 0 150 100 50 200 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] AFM40-D AFD40-D 0.02 0.02 Pressure drop [MPa] Pressure drop [MPa] P1 = 0.5 MPa P1 = 0.3 MPa P1 = 0.5 MPa P1 = 0.3 MPa P1 = 0.7 MPa P1 = 0.7 MPa 0.01 0.01 0 0 0 600 400 200 800 1000 0 100 200 500 400 300 600 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 72 AFM20-D to AFM40-D Series AFD20-D to AFD40-D Series Dimensions

Manifold Regulator Modular Type ARM2500/3000 Series

x 1/4 ARM3000: 2n x 3/8 SRH SRP SRF ITV IC Dimensions For products with pressure gauge, pressure gauges are shipped together with product.

3

300 200 100 20 200 400 600 800 1000 25 200 400 600 800 1000 1200 1400 Flow rate Q [kg/h] ( ): Saturated steam holding heat (kcal/kg) ( ): Saturation temperature (C) For Water How to read the graph The pressure differential to generate a flow rate of 25 L/min water is as follows.

REC

Air cushion Cushion Screw-in type Piping M5 x 0.8 Relief port size 50 to 400 mm/s Piston speed Mounting Basic style, Axial foot style, Rod side flange style Head side flange style Auto switch can be mounted.

Sine Cylinder Series REC

Relief port size M5 x 0.8 Piston speed 50 to 400 mm/s Mounting Basic style, Axial foot style, Rod side flange style Head side flange style Auto switch can be mounted.

Sine Cylinder Series REC

Relief port size M5 x 0.8 Piston speed 50 to 400 mm/s Mounting Basic style, Axial foot style, Rod side flange style Head side flange style Auto switch can be mounted.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

A Bore size (mm) 12 16 20 25 L L1 Rod end male thread 5 st 10 st 3.5 14 46.4 51.4 Rod end nut 3.5 15.5 44.5 49.5 4.5 18.5 49 54 5 22.5 50.5 55.5 Flange bracket material: Carbon steel Double Clevis Style Double clevis style: CDQ2A A B CL CB Bore size (mm) 12 16 20 25 2N CD CT CU CW CX CZ L L1 N RR 5 st 5 st 5 st 10 st 10 st 10 st Special cap bolt CD hole H10 Shaft d9 12 5 4 7 14 5 10 3.5

Clean Air Module

400 300 0.2 MPa 300 200 200 0.1 MPa 100 100 0 1 2 3 4 5 6 7 8 9 11 10 0 0.1 0.2 0.3 0.4 0.5 Number of needle rotations Fluid pressure (MPa) Model: LLB3-1-P1R1VSF and LLB4-1-P1R1VSF Supplied pressure: 0.5 MPa Pressure setting condition and measured position: Pressure is set by turning the regulator knob with ON/OFF valve turned off.

Style: H (Single Axis Type), Size: 25, Motor Mounting Position: LU (Symmetric, Bottom Mounting), Stroke: 400, Motor Option: B (w/Lock), Actuator Cable Type: S (Standard Cable), Actuator Cable Length: 5 (5m), Controller Type - LEC, JXC: 2N [LECP2, Programless Type (w/Stroke Study), NPN], I/O Cable Length for LEC: 5 (5m), Controller Mounting: D (DIN Rail Mounting)

7

VX3 Conduit (With surge voltage suppressor) VXA Flat terminal 2A 2B 2C 2D 2E 2F 2G 2H 2V 2J 2K 2L 2M 2N 2P 2Q 2R 2S 2W 2T 24 VDC 100 VAC 110 VAC 200 VAC 230 VAC 48 VAC 220 VAC 240 VAC 24 VAC 12 VDC 24 VDC 100 VAC 110 VAC 200 VAC 230 VAC 48 VAC 220 VAC 240 VAC 24 VAC 12 VDC Made to Order Produced upon receipt of order. Please contact SMC for lead times.

Size: 32, Motor Mounting Position: Top Mounting, Stroke: 400, Motor Option: w/o Option, Stroke Adjustment Unit: W (Both Sides), Actuator Cable Type: S (Standard Cable), Actuator Cable Length: 1 (1.5m), Controller Type - LEC, JXC: 2N [LECP2, Programless Type (w/Stroke Study), NPN], I/O Cable Length for LEC: 1 (1.5m)

Size: 25, Motor Mounting Position: Top Mounting, Stroke: 400, Motor Option: w/o Option, Stroke Adjustment Unit: W (Both Sides), Actuator Cable Type: S (Standard Cable), Actuator Cable Length: 3 (3m), Controller Type - LEC, JXC: 2N [LECP2, Programless Type (w/Stroke Study), NPN], I/O Cable Length for LEC: 3 (3m), Controller Mounting: D (DIN Rail Mounting)

Size: 32, Motor Mounting Position: U (Bottom Mounting), Stroke: 400, Motor Option: w/o Option, Stroke Adjustment Unit: W (Both Sides), Actuator Cable Type: S (Standard Cable), Actuator Cable Length: 5 (5m), Controller Type - LEC, JXC: 2N [LECP2, Programless Type (w/Stroke Study), NPN], I/O Cable Length for LEC: 1 (1.5m)