Size: 10, Motor Size: Standard, Lead Screw Type, mm: LEP*6: 4; LEP*10: 5, Stroke: 50mm, Motor Cable Mounting Direction: Entry on Left Side, Actuator Cable Type: Standard Cable, Actuator Cable Length, m: 3, Controller Type: LECP6, Step Data Input Type, NPN, I/O Cable Length, m: 3, Communication Plug Connector: None, Controller Mounting: DIN Rail Mounting, DIN Rail not Included

Size: 10, Motor Size: Standard, Lead Screw Type, mm: K (LEP*6: 4; LEP*10: 5), Stroke: 50mm, Motor Cable Mounting Direction: L (Entry on Left Side), Actuator Cable Type: S (Standard Cable), Actuator Cable Length, m: 1 (1.5), Controller Type - LEC, JXC: 1N (LECP1, Programless Type, NPN), I/O Cable Length for LEC: 1 (1.5)

Size: 10, Motor Size: Standard, Lead Screw Type, mm: LEP*6: 4; LEP*10: 5, Stroke: 50mm, Motor Cable Mounting Direction: Entry on Left Side, Actuator Cable Type: Standard Cable, Actuator Cable Length, m: 1.5, Controller Type - LEC, JXC: LECP1, Programless Type, NPN, I/O Cable Length for LEC: 1.5, Controller Mounting: -, Communication Plug Connector or I/O Cable Length for JXC: -

Electric Actuator/Slider Type

LECSC -S5 LECSS -S5 Motor mounting position S6 Nil Without option B With lock 100 100 to to 1000 1000 Refer to the applicable stroke table.

Environment

3 e r t r Motor type* Nil Basic type H High precision type Symbol Type Output [W] Actuator size Compatible driver S2 AC servo motor (Incremental encoder) 100 25 LECSA-S1 w Size e Motor mounting position S3 AC servo motor (Incremental encoder) 200 32 LECSA-S3 Nil Top mounting D In-line 25 32 S6 AC servo motor (Absolute encoder) 100 25 LECSB-S5 LECSC-S5 LECSS-S5 S7 AC servo motor (Absolute

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

LECSS-S5 200 to 1500 *3 Refer to the applicable stroke table for details.

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

Digital Flow Switch Series PFA For Air Series PFW For Water

Symbol 100 200 500 50 10 Rc NPT G 01 02 03 04 1/8 1/4 3/8 1/2 PFA510, 550 PFA511, 521 PFA551 Specifications PFA511 PFA521 PFA551 PFA510 PFA550 Model Measured fluid Dry air, N2 Detection type Heater type 20 to 200l/min 50 to 500l/min 10 to 100l/min 1 to 10l/min 5 to 50l/min Flow rate measurement range Operating pressure range 0 to 0.5MPa Withstand pressure 1.0MPa 3kPa (at 50l/min) 3kPa

Table of Contents

Note AM IDG30/30H/30L IDG50/50H/50L IDG60/60H/60L/60S IDG75/75H/75L/75S IDG100/100H/100L/100S q w e r t Body Aluminum alloy Platinum silver coated Misc. Case Stainless steel Orifice Stainless steel Holder Aluminum alloy Aluminum Silencer Resin + Copper alloy Replacement Parts Part no. No.

IDG

Note AM IDG30/30H/30L IDG50/50H/50L IDG60/60H/60L/60S IDG75/75H/75L/75S IDG100/100H/100L/100S q w e r t Body Aluminum alloy Platinum silver coated Misc. Case Stainless steel Orifice Stainless steel Holder Aluminum alloy Aluminum Silencer Resin + Copper alloy Replacement Parts Part no. No.

Series IDG

Note IDG30, 30H, 30L IDG5, 50H, 50L IDG60, 60H, 60L, 60S IDG75, 75H, 75L, 75S IDG100, 100H, 100L, 100S 1 2 3 4 5 Body Aluminum alloy Platinum silver coating Case Stainless steel Orifice Stainless steel Holder Silencer Aluminum alloy Aluminum Resin + Copper alloy Replacement parts Part number No.

Digital Flow Switches

Sensor 1l/min 5l/min 10l/min 20l/min 50l/min 100l/min 200l/min 500l/min Flow rate range 1l/min 10l/min PF2A510 0.5l/min 10.5l/min 5l/min 50l/min PF2A550 52.5l/min 2.5l/min 10l/min 100l/min PF2A511 105l/min 5l/min 20l/min 200l/min 210l/min 10l/min PF2A521 50l/min 500l/min 525l/min 25l/min PF2A551 Sensor Flow rate range 0.5l/min 2l/min 5l/min 10l/min 20l/min

PFA/PFW

/min (0.18 to 1.77SCFM) 0.5l/min (0.02SCFM) l/min, CFM x 10-2 Instantaneous flow rate Cumulative flow rate Display units l, ft3 x 10-1 0 to 0.5MPa (0 to 72psi) 1.0MPa (145psi) 3kPa (50l/min) [0.44psi (1.77SCFM)] 0 to 9l (0 to 35,300 ft3) 0 to 50C (32 to 122F) with no condensation 5% F.S. or less 1% F.S. or less Operating pressure range Withstanding pressure Pressure loss Cumulative flow

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Since the marked point is below the curve for 50l/min (ANR), the maximum rate will be about 50l/min (ANR).

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Since the marked point is below the curve for 50l/min (ANR), the maximum rate will be about 50l/min (ANR).

PA3000/5000/PAX1000

Since the marked point is below the curve for 50l/min (ANR), the maximum rate will be about 50l/min (ANR).

Digital Flow Switches, Series PF2A, Series PF2W

SET MODE SD SG RD RS-232C COM S.STOP OUT1OUT2OUT3OUT4OUT5 AC100~240V Pulse counter M/C Flow control for each branch line For Air P.2 50l/min 10l/min 500l/min 200l/min 100l/min 12000l/min 6000l/min 3000l/min Flow rate measurement range l/min Integrated display type Remote type Output specifications Port size (Rc, NPT, G) 1/8 1/4 3/8 1/2 11/2 1 2 Switch output Analog output Accumulated pulse

Size: 10, Motor Size: Standard, Lead Screw Type, mm: K (LEP*6: 4; LEP*10: 5), Stroke: 25mm, Motor Cable Mounting Direction: Top Entry, Actuator Cable Type: S (Standard Cable), Actuator Cable Length, m: 5

Size: 10, Motor Size: Standard, Lead Screw Type, mm: K (LEP*6: 4; LEP*10: 5), Stroke: 75mm, Motor Cable Mounting Direction: Top Entry, Actuator Cable Type: S (Standard Cable), Actuator Cable Length, m: 5

Size: 10, Motor Size: Standard, Lead Screw Type, mm: K (LEP*6: 4; LEP*10: 5), Stroke: 50mm, Motor Cable Mounting Direction: Top Entry, Actuator Cable Type: S (Standard Cable), Actuator Cable Length, m: 5