SMC's series LER electric rotary table is available in a basic or high precision style, and features a low profile, space-saving design.  A digital control allows easy setting of the angular speed, and angular acceleration/deceleration, etc.  Rotation angle is possible up to 320° (310° on LER10).  Up to 6.6 N·m of rotation torque (3.3 N·m of pushing torque available).  The rotation speed

SMC's series LER electric rotary table is available in a basic or high precision style, and features a low profile, space-saving design.  A digital control allows easy setting of the angular speed, and angular acceleration/deceleration, etc.  Rotation angle is possible up to 320° (310° on LER10).  Up to 6.6 N·m of rotation torque (3.3 N·m of pushing torque available).  The rotation speed

SMCs series LER electric rotary table is available in a basic or high precision style, and features a low profile, space-saving design.? A digital control allows easy setting of the angular speed, and angular acceleration/deceleration, etc.? Rotation angle is possible up to 320 (310 on LER10).? Up?to 6.6 N?m of rotation torque (3.3 N?m of pushing torque available).? The rotation speed of

SMC's series LER electric rotary table is available in a basic or high precision style, and features a low profile, space-saving design.? A digital control allows easy setting of the angular speed, and angular acceleration/deceleration, etc.? Rotation angle is possible up to 320 (310 on LER10).? Up?to 6.6 N?m of rotation torque (3.3 N?m of pushing torque available).? The rotation speed of

Main Body Peripheral Component: Peripheral Components, Input Power Supply: DC 24V, Position Detection: Incremental, I/O Module: PNP, Motor Type: Step motor (24‑V DC servo), Step data (points): 64, Actuator/cable type: LER10J, I/O cable length / communication plug(m): Without I/O cable, Controller/driver mounting method: Screw mounting type

Rotation Torque: J (Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6), Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: S (Standard Cable), Actuator Cable Length: 1 (1.5)

Oscillation Angle A: 310°, Torque (Range)(N⋅m): Less than 1, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Rigidity Accuracy: Standard, Environment, Applications: High-Speed, Valves: Not Provided, Torque(N⋅m): 0.22, Size: 10, Motor cable entry direction: Basic type (entry on the right side), Actuator cable type: Standard cable, Actuator cable length(m): 1.5, Controller

Rotation Torque: J (Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6), Rotation Angle: 3 (External Stopper: 90°), Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: S (Standard Cable), Actuator Cable Length: 1 (1.5)

Rotation Torque: J (Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6), Rotation Angle: 2 (External Stopper: 180°), Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: S (Standard Cable), Actuator Cable Length: 1 (1.5)

Table Accuracy: Basic, Size: 10, Max. Rotation Torque: Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6, Rotation Angle: External Stopper: 90°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: Standard Cable, Actuator Cable Length: 1.5, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Option: -, Communication Plug Connector or I/O Cable Length for JXC: -

Oscillation Angle A: [180°] External Stopper, Torque (Range)(N⋅m): Less than 1, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Rigidity Accuracy: Standard, Environment, Applications: High-Speed, Valves: Not Provided, Torque(N⋅m): 0.22, Size: 10, Motor cable entry direction: Basic type (entry on the right side), Actuator cable type: Standard cable, Actuator cable

High Vacuum Angle Valve

-30-1-1 XLF80-30-1 XLF80A-30-1 XLF80-30-1H XLF80A-30-1H XLFV80-30-1 XLFV80A-30-1 XLD80-30-1 XLD80-30-1H XLDV80-30-1 XLG80-30-1-1 XLG80-30-1H-1 XLGV80-30-1 63 XLA63-30-1 XLA63A-30-1 XLA63-30-1H XLA63A-30-1H XLAV63-30-1 XLAV63A-30-1 XLC63-30-1-1 XLC63-30-1H-1 XLCV63-30-1-1 XLF63-30-1 XLF63A-30-1 XLF63-30-1H XLF63A-30-1H XLFV63-30-1 XLFV63A-30-1 XLD63-30-1 XLD63-30-1H XLDV63-30-1 XLG63-30-1

Made to Order

CQS series Stroke S2 Part no. denotation B Stroke S1 Part no. denotation A B + Stroke S2 B + Stroke S1 A + Stroke (S1 + S2) (mm) Bore size (mm) Stroke Both of S1, S2 A B L 12 3.5 41 (51) 17 (22) 5 to 30 16 17 (22) 3.5 41 (51) 20 19.5 (29.5) 4.5 48 (68) -X -X 5 to 50 25 22.5 (32.5) 5 55 (75) Note 1) ( ): Denotes the dimensions with auto switch.

Aluminum High Vacuum Angle Valve

-30-1-1 XLF80-30-1 XLF80A-30-1 XLF80-30-1H XLF80A-30-1H XLFV80-30-1 XLFV80A-30-1 XLD80-30-1 XLD80-30-1H XLDV80-30-1 XLG80-30-1-1 XLG80-30-1H-1 XLGV80-30-1 63 XLA63-30-1 XLA63A-30-1 XLA63-30-1H XLA63A-30-1H XLAV63-30-1 XLAV63A-30-1 XLC63-30-1-1 XLC63-30-1H-1 XLCV63-30-1-1 XLF63-30-1 XLF63A-30-1 XLF63-30-1H XLF63A-30-1H XLFV63-30-1 XLFV63A-30-1 XLD63-30-1 XLD63-30-1H XLDV63-30-1 XLG63-30-1

1

X416 1 2 1 1 1 1 1 Stroke adjusting unit Combination description Holder mounting bracket MY2H X168 Bore size Stroke Auto switch Suffix X417 1 1 1 1 2 1 1 L, H, LS, HS Nil W Z L H LZ HZ Nil W L H With X416 (1 pc.) on only one side With X416 (2 pcs.) (With each 1pc. for both sides) With X416 on one side, X417 on the other side (1 pc.)

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

CDRBU2W10, 15-S CDRBU2W20, 30-S CRB2 CRBU2 CRB1 2 x S2 2 x S1 2 x S1 MSU 2 x S2 CRJ Rotary actuator CRA1 CRQ2 2 x S1 2 x S1 2 x S1 2 x S1 Rotary actuator MSQ (34.5: Connector type) MSZ A port B port CRQ2X MSQX 2 x R A port B port 2 x R MRQ 1 Auto switch Auto switch 2 5 20.5 (26.5: Connector type) 1.

SV

TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE1 US C R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.

Series SV

TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE1 US C R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.

Table of Contents

8") N3 (5/32") N7 (1/4") N7 (1/4") VQD P. 2-4-18 P. 2-4-20 Built-in silencer Built-in silencer C C3 (3.2) C4 (4) M5 (M5 thread) C6 (6) kit N1 (1/8") N3 (5/32") N7 (1/4") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) kit C6 (6) N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") P. 2-4-50 P. 2-4-54 Built-in

PC Wiring System Series PCW

1 2 3 4 CN7 1 2 3 4 CN8 1 2 3 4 CN9 1 2 3 4 CNA 1 2 3 4 CNB 1 2 3 4 CNC 1 2 3 4 CND 1 2 3 4 CNE 4 3 2 1 24 VDC 2 *S2 (S2) 3 0 VDC CNF 4 S1 OUTPUT Output connector 3 Series PCW-EC PC Wiring System e-con Type Circuit Diagram PCW-EC16ZBM00 PCW-EC16ZBM01 [Applicable PLC example: Mitsubishi Electric Corporation A1SX41, A1SY42] 0 1 2 3 4 5 6 7 8 9 A B C D E F 8 6 4 2 40 38 36 34 32 30 28 26 24