Table Accuracy: Basic Type, Size: 50, Max. Rotation Torque: High Torque, LER10: 0.32; LER30: 1.2; LER50: 10, Motor Cable Entry: Entry of Left Side, Actuator Cable Type: Robotic Cable, Flexible Cable, Actuator Cable Length: 5m, Controller Type: LECP6, Step Data Input Type, PNP, I/O Cable Length: 5m, Communication Plug Connector: -, Controller Mounting: -

Table Accuracy: Basic, Size: 50, Max. Rotation Torque: K (High Torque, LER10: 0.3; LER30: 1.2; LER50: 10), Rotation Angle: 2 (External Stopper: 180°), Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: R (Robotic Type Cables, Flexible Type), Actuator Cable Length: 1 (1.5)

Table Accuracy: Basic, Size: 50, Max. Rotation Torque: High Torque, LER10: 0.3; LER30: 1.2; LER50: 10, Rotation Angle: External Stopper: 180°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: Robotic Type Cables, Flexible Type, Actuator Cable Length: 1.5, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Option: -, Communication Plug Connector or I/

Series IDG

Note 3) Includes dew point indicator purge air flow rate of 1l/min (ANR) (0.035SCFM) (inlet air pressure at 0.7MPa) (101.5psi).

Digital Flow Switches

Sensor 1l/min 5l/min 10l/min 20l/min 50l/min 100l/min 200l/min 500l/min Flow rate range 1l/min 10l/min PF2A510 0.5l/min 10.5l/min 5l/min 50l/min PF2A550 52.5l/min 2.5l/min 10l/min 100l/min PF2A511 105l/min 5l/min 20l/min 200l/min 210l/min 10l/min PF2A521 50l/min 500l/min 525l/min 25l/min PF2A551 Sensor Flow rate range 0.5l/min 2l/min 5l/min 10l/min 20l/min

Tamper Proof and Flat Head Screw

JIS symbol 1/8, 5/32 3/16, 1/4 3/8 5/16 3/16, 1/4 1/4 3/16 1/4, 5/16 1/2 Inch sizes 3/8 5/32 Flow rate l/min (ANR) {Nl/min} 920 660 230 420 1390 290 460 1050 100 130 Controlled (Free) Effective area mm flow 14 10 3.5 6.5 21 4.5 7 16 2 1.5 1l/min=0.035SCFM 18mm2=1Cv Note 1) Flow rate values are at a pressure of 0.5MPa (72.5psi) and temperature of 20C (68F).

Digital Flow Switches, Series PF2A, Series PF2W

/min 1l/pulse 10 to 210l/min 10 to 210l/min 20 to 200l/min 2l/min 2l/pulse 25 to 525l/min 25 to 525l/min 50 to 500l/min 5l/min 5l/pulse Accumulated pulse flow rate exchange value (Pluse width: 50ms) l/min, CFM x 10-2 l/min, CFM x 10-1 Real-time flow rate Accumulated flow Display units Note 1, 2) l, ft3 x 10-1 Operating fluid temperature Linearity Repeatability Temperature characteristics

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Note 3) Includes dew point indicator purge air flow rate of 1l/min (ANR) (inlet air pressure at 0.7MPa).

PFA/PFW

to 4 (0.02 to 0.4) NPN PNP Rc 3/8 1/2 3/4 3/4 3/4 NPT 3/8 1/2 G 3/8 1/2 New PFW704 Integrated display type PFW720 New PFW740 PFW300 New PFW310 New PFW320 Display unit PFW301 New Separate type PFW311 New PFW321 New PFW504 Sensor unit PFW520 New PFW540 3 Series PFA Digital Flow Switch for Air How to order 10 02 27 PFA7 Flow rate range 1 to 10l/min 5 to 50l/min 10 50 Wiring specifications 1l

CLA

1l!l!

Multistage Ejector (N)ZL Series

1 2 3 4 5 6 Time to reach vacuum [S] Time to reach vacuum [S] Viewing the graphs The graphics indicate the time required to reach a vacuum pressure determined by adsorption conditions for work pieces, etc., starting from atmospheric pressure in a 1l sealed tank.

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L RR,IU1 E, A, L, t MM NX Part no A2 NDHIO boreSlzc D1l m l!:;;I~ '!I!

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Note 3) Includes dew point indicator purge air flow rate of 1l/min (ANR) (inlet air pressure at 0.7MPa).

Air Cylinder RSQ Series Stopper Cylinder

q o 9 l l / 10i11) 20\22) M 1 0 . 2 E Min. lead wire bending radius: 10 rNole 4lTh I our shows an o.rendedpisron tod .Note Jl Lor ( lare arhro. olF roLcF -.os re p'o{deo onr o_ rFe oo qde, lNole 1l Dimensions for moders wlhoutan aulo sw ich ar61he same as the above.

PA3000/5000/PAX1000

Note 3) Includes dew point indicator purge air flow rate of 1l/min (ANR) (inlet air pressure at 0.7MPa).

FSQ seies

q o 9 l l / 10i11) 20\22) M 1 0 . 2 E Min. lead wire bending radius: 10 rNole 4lTh I our shows an o.rendedpisron tod .Note Jl Lor ( lare arhro. olF roLcF -.os re p'o{deo onr o_ rFe oo qde, lNole 1l Dimensions for moders wlhoutan aulo sw ich ar61he same as the above.

New

Rc Special voltage With light Without DIN connector (With surge voltage suppressor) G 24 VAC 12 VDC 48 VAC NPT 1K 1L Rc 220 VAC 240 VAC Applicable to air and water (VXN<2) Conduit terminal 1M 1W (With surge voltage suppressor) 24 VAC 12 VDC 48 VAC 1N 1P 1Q 1R 1Y 1S 1T 2A 2B 2C 2D 2E 2F Enter symbols in the order below when ordering a combination of electrical option, other option. 220 VAC

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W j j 1l flats 12 / IE Adaplor plate i!1 ~~~ Flat with rib T ~ . ~ Deep type/ zpnOD'16D only l..!.

PF-OMM0004_C

L/min 0.0) 1.722.0 L/min ( 1.7 L/min 0.0) 0.355.50 L/min ( 0.35 L/min 0.00) 20350 L/min ( 20 L/min 0) 7140 L/min ( 7 L/min 0) 0.355.50 L/min 1.722.0 L/min 3.555.0 L/min 7140 L/min 20350 L/min 0.01 L/min 0.1 L/min 1 L/min 2 L/min (50 ms) 0.05 L/pulse 0.1 L/pulse 0.5 L/pulse 1 L/pulse 2 L/pulse 090 () 070 ( ) L/minL 3F.S. 3F.S. 2F.S. 2 5%F.S.(25 ) 3 3 9.9 L 9 L 4 0.1L 0.5L 1L

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

-% , , ",",""" 1l-,:e!"6 ,tL--!9!!",qL+r |L-.!.S!"jqt+r , _^99!j,, r , .-i9!3r r-) tL--sq:L,d r+ ,_!t, r I 5.d"." 1l^:eqBi5, , lL--9s!L,. r+l ,.i9!4rr t I L_l-g!!",o r+l .-^AAr r L.^t9!3, , , ,..' ".' lt+e!',' L , .sL-.1f.:q%,1 , tL jq!"s L+, tLl9!"s L+l ,-;e!j., /..js!i2'L r . , , , , " " , 1 1 + n " , , r 6 * , . " , 1 f 4 : e ! 3 q , , t l ! g ! ! , , + r l r c o M . 2 { + l .r!9!