Main Body Peripheral Component: Peripheral Components, Input Power Supply: DC 24V, Position Detection: Incremental, I/O Module: PNP, Motor Type: Step motor (24‑V DC servo), Step data (points): 64, Actuator/cable type: LER50K-1, I/O cable length / communication plug(m): Without I/O cable, Controller/driver mounting method: Screw mounting type

Table Accuracy: Basic, Size: 50, Max. Rotation Torque: K (High Torque, LER10: 0.3; LER30: 1.2; LER50: 10), Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: R (Robotic Type Cables, Flexible Type), Actuator Cable Length: 3 (3)

Table Accuracy: Basic, Size: 50, Max. Rotation Torque: High Torque, LER10: 0.3; LER30: 1.2; LER50: 10, Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: Robotic Type Cables, Flexible Type, Actuator Cable Length: 3, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Option: -, Communication Plug Connector

Fluoropolymer Piping Equipment

C2 H2 (E2) L2 Class 3 to 5 LQ1E3A-R3 3/8" 1/8" 24 15 21 14 35.5 31.5 28 16.5 1.8 LQ1E4A-R2 1/2" 1/4" 6 9 9 24 20 21 17 43 38.5 28 23 3.6 LQ1E4A-R3 1/2" 3/16" 15 14 35.5 31.5 16.5 2.9 LQ1E4A-R4 1/2" 1/8" 1.8 LQ1E5A-R2 3/4" 3/8" 39.5 20 36 17 54 47.5 49 23 5.8 46 LQ1E5A-R3 3/4" 1/4" 3.6 LQ1E5A-R4 3/4" 3/16" 15 14 51 42 16.5 2.9 LQ1E6A-R2 1" 1/2" 24 21 56.5 52.5 28 9 46 LQ1E6A-R3

High Vacuum Angle Valve

None XLF16-30-1-2 XLF25-30-1-2 XLF40-30-1-2 XLF50-30-1-2 XLF63-30-1-2 XLF80-30-1-2 Yes XLF16A-30-1-2 XLF25A-30-1-2 XLF40A-30-1-2 XLF50A-30-1-2 XLF63A-30-1-2 XLF80A-30-1-2 XLF High temperature None XLF16-30-1H-2 XLF25-30-1H-2 XLF40-30-1H-2 XLF50-30-1H-2 XLF63-30-1H-2 XLF80-30-1H-2 Yes XLF16A-30-1H-2 XLF25A-30-1H-2 XLF40A-30-1H-2 XLF50A-30-1H-2 XLF63A-30-1H-2 XLF80A-30-1H-2 XLFV General use

2

Symbol Size 01 R1/8, Rc1/8 02 R1/4, Rc1/4 03 R3/8, Rc3/8 04 R1/2, Rc1/2 Thread connection Fittings Applicable tubing O.D.

Aluminum High Vacuum Angle Valve

No. 1 2 2-1 3 4 5 6 7 8 8-1 8-2 9 10 O-ring Part No.

S Couplers Series KKA

Body size Port size KKA3 S-01 M KKA3 P-01 M R1 / 8 R1 / 8 1 / 8 KKA3 S-02M 1 / 8 KKA3 P-02M R1 / 4 R1 / 4 KKA3 S-03 M KKA3 P-03 M R3 / 8 R3 / 8 KKA4 S-02M KKA4 P-02M R1 / 4 R1 / 4 KKA4 S-03 M 1 / 4 KKA4 P-03 M 1 / 4 R3 / 8 R3 / 8 KKA4 S-04 M KKA4 P-04 M R1 / 2 R1 / 2 KKA6S-03 M KKA6P-03 M R3 / 8 R3 / 8 KKA6S-04 M KKA6P-04 M 1 / 2 1 / 2 R1 / 2 R1 / 2 KKA6S-06M KKA6P-06M R3 / 4 R3 / 4 Built-in

Table of Contents

Series KKA Series KKA P.15-2-89 to 15-2-95 Stainless steel type Male thread type Port size Series KKA3 KKA4 KKA6 R1/8 R1/4 R3/8 R1/2 R3/4 Female thread type Port size Series KKA3 KKA4 KKA6 Rc1/8 Rc1/4 Rc3/8 Rc1/2 Rc3/4 Series KK13 15-2-74 3 Series KK S Couplers M5 size (Series KK2) is newly added.

KJ

Series KKA Series KKA P.15-2-89 to 15-2-95 Stainless steel type Male thread type Port size Series KKA3 KKA4 KKA6 R1/8 R1/4 R3/8 R1/2 R3/4 Female thread type Port size Series KKA3 KKA4 KKA6 Rc1/8 Rc1/4 Rc3/8 Rc1/2 Rc3/4 Series KK13 15-2-74 3 Series KK S Couplers M5 size (Series KK2) is newly added.

Table of Contents

Port size 02 03 04 R1/4 R3/8 R1/2 Flow valve: Series ASQ Model Model Applicable tubing O.D.

Battery-less

Size Order no. 20 16 LE-D-2-7 25 LE-D-2-2 32, 40 LE-D-2-3 Replacement Parts/Grease Pack Applied portion Order no.

ASR

Port size 02 03 04 R1/4 R3/8 R1/2 Flow valve: Series ASQ Model Model Applicable tubing O.D.

Title not found

(mm) Model R3/8 KQGT04-00 KQGT06-00 KQGT08-00 KQGT10-00 KQGT12-00 4 6 8 10 12 R1/4 10 R3/8 R3/8 12 R1/2 Straight Union Straight Union Union "Y" Union "Y" Applicable tubing O.D. (mm) Model Applicable tubing O.D.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

10.3 2.8 depth 6.2 19 2-Color Display Digital Flow Switch PF2M7(-L) Series Dimensions PF2M7m-m1/2(-L) 48 A Width across flats B 18 OUT1 OUT2 DC(+) 10.2 DC() 1.4 38.5 (30.9) 13 3 2 x Female thread Port size: 1, 2 2 x 3.4 18 [mm] 28 Model A B P PF2M701/702/705/710/ 725/750-01(-L) 66 14 2.8 depth 8.4 8 PF2M701/702/705/710/ 725/750-N1(-L) 68 14 2.8 depth 8.4 2 x P PF2M701/702/705/710/ 725/750

For post-stoppage positioning and locking

Connector pin arrangement Type Connector pins and arrangement 1 2 3 4 E2E-X7D1-M1J-T10.3M OUT ( ) OUT () 1 Pallet Lock Cylinder W-R1/W-R3 Series Dimensions W-R1-S2Position of fulcrum 2 x 18.5 Proximity switch mounting bracket 68 Proximity switch (Option) 117 15 15 26 26 2 x Rc3/8 36.5 6.5 R5 30 50 190 117 250 220 200 140 30 60 2 x M8 x 1.25 thread depth 13 (External cover mounting screw

High Vacuum Angle Valve

None XLF16-30-1-2 XLF25-30-1-2 XLF40-30-1-2 XLF50-30-1-2 XLF63-30-1-2 XLF80-30-1-2 Yes XLF16A-30-1-2 XLF25A-30-1-2 XLF40A-30-1-2 XLF50A-30-1-2 XLF63A-30-1-2 XLF80A-30-1-2 XLF High temperature None XLF16-30-1H-2 XLF25-30-1H-2 XLF40-30-1H-2 XLF50-30-1H-2 XLF63-30-1H-2 XLF80-30-1H-2 Yes XLF16A-30-1H-2 XLF25A-30-1H-2 XLF40A-30-1H-2 XLF50A-30-1H-2 XLF63A-30-1H-2 XLF80A-30-1H-2 XLFV General use

Refrigerated Air Dryers

Applicable air dryer IDF-S0189 IDF22E IDF-S0147 IDF37E Applicable air dryer Symbol Thread type and port size Applicable air dryer Male thread A side Female thread B side 601 R1/2 NPT1/2 IDF4E, IDU4E 603 R3/4 NPT3/4 IDF6E to 11E, IDU6E to 11E 604 NPT1 Rc1 IDF22E, IDU22E 605 R1 NPT1 IDF15E1, IDU15E1 606 NPT1 1/2 Rc1 1/2 IDF37E, IDU37E 607 NPT2 Rc2 IDF100F to 150F 609 R3/8 NPT3/8 IDF1E to 3E

VQZ1000/2000/3000

AXT100-20-2-05 AXT100-20-2-06 AXT100-20-2-01 AXT100-20-2-02 AXT100-20-2-03 AXT100-20-2-04 Rated voltage 24 VDC 12 VDC 100 VAC 200 VAC 110 VAC 220 VAC Circuit with Indicator Light AC circuit DC circuit 1 2 1 2 NL R R LED NL: Neon light R: Resister LED: Emitting diode R: Resister 2-7-33 Base Mounted 34 34 Series VQZ1000/2000/3000 Be sure to read before handling.

IDX-OM-W017

(Ex.) 10-2 1.6MPaADH4 000-04 IDFA4E 15E1-23-L N.O() 1.6MPa 0.051.6MPa (Rc1/2IDFA3E to 11E) 25mm (Rc3/4IDFA15E1) 32mm (R1/2IDFA3E11E) (R3/4 X R1/2IDFA15E1) (R1/2) (L) IDFA Series 10-1 10 1 IDX-OM-W017 10 L 10-3 1. Rc1/2 1) R3/4: 28 30Nm R1/2 ,R3/4 2. 3. (27mm)(22mm) () () () 10-4 1. 2. 3.