IDX-OM-W017

(Ex.) 10-2 1.6MPaADH4 000-04 IDFA4E 15E1-23-L N.O() 1.6MPa 0.051.6MPa (Rc1/2IDFA3E to 11E) 25mm (Rc3/4IDFA15E1) 32mm (R1/2IDFA3E11E) (R3/4 X R1/2IDFA15E1) (R1/2) (L) IDFA Series 10-1 10 1 IDX-OM-W017 10 L 10-3 1. Rc1/2 1) R3/4: 28 30Nm R1/2 ,R3/4 2. 3. (27mm)(22mm) () () () 10-4 1. 2. 3.

High Purity Fluoropolymer

Replacement part type L shows the parts for LQ-GL and LQ-GM. 33 High Purity Fluoropolymer Fittings & Tubing Series LQ1 2 Dimensions LQ-GJ LQ-GK LQ-GJ 36 30 45 (adjustable) 117 76 24 LQ-GK 36 SET POS. 53 127 43 63 (Max. 50) 114 53 43 63 LQ-GM LQ-GL 50 50 207 85 342 85 LQ-GL 40 28 SET POS. 40 28 LQ-GM 4-R3 SET POS. 6 6 4-R3 6 6 4-R3 4-R3 (Max. 91) 325 (Max. 91) 191 87 60 87 60 112 112 34 Series

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Temperature specifications Symbol Nil M9N (L) M9P (L) M9B (L) A90 (L) A93 (L) M9// Symbol Nil H0 Temperature range 5 to 60C 5 to 150C Without auto switch (without built-in magnet) Remarks Auto switch D-M9N (L) D-M9P (L) D-M9B (L) D-A90 (L) D-A93 (L) Solid state switch 6. No. of auto switches/Detecting position Quantity Without auto switch 2 pcs. 1 pc. 1 pc.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Model H G L M N E B F LQ (E) 2-B 12 19 10 12 6 8 10 4 6 LQ2T22 LQ2T21 4 6 LVN L 18 34.5 19 12 19.9 SMC 1/4 LQ2T52 LQ2T51 LQ2T42 LQ2T41 LQ2T33 LQ2T32 LQ2T31 F (M) (M) TI/ TIL 43 5 24 22 9 18 26.2 52 42.5 (E) (E) G H PA L L 6 30 21 28 11 22 33.1 59.5 51 Class 2, 3 PAX 7 36 26 32 14 28 40 58.5 PB (M) N Inch sizes Applicable tubing O.D.

XM, XY

(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) Nil XL H0 Solid state auto switch y Number of auto switches/Detecting position XLQ Quantity Without auto switch 2 pcs. 1 pc. 1 pc.

Prevents Micro-Bubbles

SET POS. 53 127 43 63 VX3 (Max. 50) 114 VXA 53 VN 43 63 LVC LVA LVH LVD LQ-GM LQ-GL LVQ LQ 50 LVN 50 207 85 TI/ TIL 342 85 LQ-GL 40 28 PA SET POS. 40 28 LQ-GM 4-R3 SET POS. 6 6 4-R3 6 6 PAX 4-R3 4-R3 (Max. 91) 325 PB (Max. 91) 191 87 60 87 60 112 112 17-5-37 35 Series LV Fitting Assembly Procedure Assemble fittings following the procedure shown below.

LVQ

LQ-GL 50 50 207 85 342 85 LQ-GL 40 28 SET POS. 40 28 LQ-GM 4-R3 SET POS. 6 6 4-R3 6 6 4-R3 4-R3 (Max. 91) 325 (Max. 91) 191 87 60 87 60 112 112 17-5-84 Fitting Assembly Procedure Assemble fittings following the procedure shown below.

IDX-OM-M051

Acid consumption [pH4.8](mgCaCO3/L) 100 or less 50 or less 50 or less Total hardness (mgCaCO3/L) 200 or less 70 or less 70 or less Calcium hardness (mgCaCO3/L) 150 or less 50 or less 50 or less Ionic state silica (mgSiO2/L) 50 or less 30 or less 30 or less Iron (mg/L) 1.0 or less 0.3 or less 1.0 or less Copper (mg/L) 0.3 or less 0.1 or less 1.0 or less Reference items Sulfide ions (mg/L)

IDX-OM-Z004

200 50 50 (mg/L) 200 50 50 [pH4.8](mgCaCO3/L) 100 50 50 (mgCaCO3/L) 200 70 70 (mgCaCO3/L) 150 50 50 (mgSiO2/L) 50 30 30 (mg/L) 1.0 0.3 1.0 (mg/L) 0.3 0.1 1.0 (mg/L) (mg/L) 1.0 0.1 1.0 (mg/L) 0.3 0.3 0.3 (mg/L) 4.0 4.0 4.0 6.07.0 1 2 JIS K 0101 2 a b c 4.2 IDF100150F-W 4 2 IDX-OM-Z004 4 (3) 1 Y Y , Y Y (4) 3 2 (5) 1( 2 3 4 a) 1. 1.5 2. 4.2

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

SET POS. 53 127 43 63 VX3 (Max. 50) 114 VXA 53 VN 43 63 LVC LVA LVH LVD LQ-GM LQ-GL LVQ LQ 50 LVN 50 207 85 TI/ TIL 342 85 LQ-GL 40 28 PA SET POS. 40 28 LQ-GM 4-R3 SET POS. 6 6 4-R3 6 6 PAX 4-R3 4-R3 (Max. 91) 325 PB (Max. 91) 191 87 60 87 60 112 112 17-5-55 14 Series LVD Fitting Assembly Procedure Assemble fittings following the procedure shown below.

Vacuum

44[lq I lrars wurh:8 ,t ic I Appl|cable lube o D oP Applicable lube O.D oP " l " l ' l ' l E f F f e f n l e ^ | o L I r E t #l#ffiJ'xl,LI v ZPRlOB 1 0 1 6 25133.! 50 20 71 25 76 13.8 5.5 ZPRtSB 18 527 sB6.'52.!

Vacuum

44[lq I lrars wurh:8 ,t ic I Appl|cable lube o D oP Applicable lube O.D oP " l " l ' l ' l E f F f e f n l e ^ | o L I r E t #l#ffiJ'xl,LI v ZPRlOB 1 0 1 6 25133.! 50 20 71 25 76 13.8 5.5 ZPRtSB 18 527 sB6.'52.!

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

l Rc(PT) 1/8 lll In-line SY C4(4) C6(6) C8(8) Rc(PT)1/8 2 stations: 193 Addition per/ station: 54 VV5QZ25 VQZ2 50 VQZ2 51 VQZ2000 lll l l Rc(PT) 1/4 2 to 20 stations SYJ In-line SX 2 stations: 398 Addition per/ station: 102 1(P)port Rc(PT)3/8 35(R)port Rc(PT)1/4 C6(6) C8(8) C10(10) Rc(PT)1/4 l l VV5QZ35 VQZ3 50 VQZ3 51 VQZ3000 2 to 20 stations VK In-line lll VZ Note 1) Threaded port.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

L: L plug connector with lead wire LO: L plug terminal without lead wire M: M plug connector with lead wire MO: M plug terminal without lead wire 5 5 (R1) 1 (P) 3 (R2) Except VQZ1000 and metal seal style.

KB

D L A2 A1 M Part No.

Series KC Self-seal Fittings

A1 M A2 D L Part No.

Industrial Filters

(Except for products with an internal capacity of less than 40 L) Note 7) Confirm the lead time with each order.

One-touch Fittings

Q D M L 1: D is maximum diameter.

OMR0032

Phase A RESET GND FG 4 RESET Yellow Yellow Brown 5 FG Green Green 15.3 Actuator cable (1) How to Order L A T H 1 1 Cable length (L) 1 1m 3 3m Note) There is direction for the actuator cable. 5 5m Connect the actuator side to the card motor.

Table of Contents

(mm) Gripping point L (mm) Gripping point L (mm) Gripping point L (mm) Note) Distance to the gripping point L of single acting type is shortened by spring return.