Table Accuracy: H (High Precision), Size: 50, Max. Rotation Torque: K (High Torque, LER10: 0.3; LER30: 1.2; LER50: 10), Rotation Angle: 3 (External Stopper: 90°), Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: R (Robotic Type Cables, Flexible Type), Actuator Cable Length: 5 (5)

Table Accuracy: H (High Precision Type), Size: 50, Max. Rotation Torque: K (High Torque, LER10: 0.32; LER30: 1.2; LER50: 10), Motor Cable Entry: L (Entry of Left Side), Actuator Cable Type: R (Robotic Cable, Flexible Cable), Actuator Cable Length: 5 (5m)

Table Accuracy: High Precision, Size: 50, Max. Rotation Torque: High Torque, LER10: 0.3; LER30: 1.2; LER50: 10, Rotation Angle: External Stopper: 180°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: Robotic Type Cables, Flexible Type, Actuator Cable Length: 5, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Option: -, Communication Plug Connector

Table Accuracy: High Precision, Size: 50, Max. Rotation Torque: High Torque, LER10: 0.3; LER30: 1.2; LER50: 10, Rotation Angle: External Stopper: 90°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: Robotic Type Cables, Flexible Type, Actuator Cable Length: 5, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Option: -, Communication Plug Connector

Table Accuracy: High Precision Type, Size: 50, Max. Rotation Torque: High Torque, LER10: 0.32; LER30: 1.2; LER50: 10, Motor Cable Entry: Entry of Left Side, Actuator Cable Type: Robotic Cable, Flexible Cable, Actuator Cable Length: 5m, Controller Type - JXC: -, Controller Mounting: -, Communication Plug Connector for DeviceNetâ„¢: -

Fluoropolymer Piping Equipment

5/32" 3/8" x 1/4" 3/4" x 5/8" 3/4" x 5/8" 3/4" x 5/8" 1/2" x 3/8" 3/8" x 1/4" 1/2" x 3/8" 1/2" x 3/8" 3/8" x 1/4" 1/4" x 5/32" 1/4" x 5/32" 1" x 7/8" 1" x 7/8" 1" x 7/8" 1" x 7/8" 3/4" x 5/8" 1/2" x 3/8" 3/4" x 5/8" 3/4" x 5/8" 1/2" x 3/8" 3/8" x 1/4" 1/4" x 5/32" 1/4" x 5/32" LQ3T2A-R1 LQ3T2A-R5 LQ3T3A-R1 LQ3T3A-R2 LQ3T3A-R5 LQ3T3A-R7 LQ3T3A-R9 LQ3T4A-R1 LQ3T4A-R2 LQ3T4A-R5 LQ3T4A-R6 LQ3T4A-R7

Battery-less

1 !

VQZ1000/2000/3000

(B) 2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note) Except VQZ1000 and metal seal type.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Body (1) (1) With (1) With (w/o light) Base mounted 5 Note 1) Applicable to VQZ2000 and 3000.

2

Connection thread Metric 2, 3.2, 4, 6, 8 M3 x 0.5, M5 x 0.8, M6 x 1.0 Metric 3.2, 4, 6, 8, 10, 12, 16 M5 x 0.8 R, Rc, G1/8, 1/4, 3/8, 1/2 10, 12, 16 R, Rc1/8, 1/4, 3/8, 1/2 Inch 1/8", 5/32", 1/4", 5/16" 3/8", 1/2" 10-32UNF NPT1/8, 1/4, 3/8, 1/2 1/8", 5/32", 3/16", 1/4" 10-32UNF 5/16", 3/8", 1/2" NPT1/16, 1/8, 1/4, 3/8, 1/2 Inch 1/8", 3/16", 1/4" 5/16", 3/8", 1/2" M5 x 0.8 R, Rc1/8, 1/4, 3

For post-stoppage positioning and locking

0 0.5 0.4 0.3 0.2 0.1 1 Supply pressure [MPa] 2 4 3 Connector pin arrangement Type Connector pins and arrangement 1 2 3 4 E2E-X7D1-M1J-T10.3M OUT ( ) OUT () 1 Pallet Lock Cylinder W-R1/W-R3 Series Dimensions W-R1-S2Position of fulcrum 2 x 18.5 Proximity switch mounting bracket 68 Proximity switch (Option) 117 15 15 26 26 2 x Rc3/8 36.5 6.5 R5 30 50 190 117 250 220 200 140 30 60 2 x M8

Table Accuracy: H (High Precision Type), Size: 50, Max. Rotation Torque: K (High Torque, LER10: 0.32; LER30: 1.2; LER50: 10)

Oscillation Angle A: 360°, Torque (Range)(N⋅m): 10 to Less than 20, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Operation Method: Others, Rigidity Accuracy: High Rigidity, High Accuracy, Environment, Applications: High-Speed, Valves: Not Provided, Torque(N⋅m): 10, Size: 50, Motor cable entry direction: Basic type (entry on the right side), Actuator cable type

Rotating Torque: K (High Torque, LER10: 0.3; LER30: 1.2; LER50: 10), Rotation Angle: 1 (Continuous Rotation: 360°)

Rotation Torque: K (High Torque, LER10: 0.32; LER30: 1.2; LER50: 10), Motor Cable Entry: Basic Type, Entry on Right Side, Actuator Cable Type: S (Standard Cable), Actuator Cable Length: 1 (1.5m)

Table Accuracy: High Precision Type, Size: 50, Max. Rotation Torque: High Torque, LER10: 0.32; LER30: 1.2; LER50: 10, Motor Cable Entry: Basic Type, Entry on Right Side, Actuator Cable Type: Robotic Cable, Flexible Cable, Actuator Cable Length: 3m, Controller Type: LECP6, Step Data Input Type, PNP, I/O Cable Length: 1.5m, Communication Plug Connector: None, Controller Mounting: DIN Rail Mounting

Table Accuracy: High Precision Type, Size: 50, Max. Rotation Torque: High Torque, LER10: 0.32; LER30: 1.2; LER50: 10, Motor Cable Entry: Basic Type, Entry on Right Side, Actuator Cable Type: Standard Cable, Actuator Cable Length: 3m, Controller Type: LECP6, Step Data Input Type, PNP, I/O Cable Length: 3m, Communication Plug Connector: -, Controller Mounting: -

Table Accuracy: High Precision Type, Size: 50, Max. Rotation Torque: High Torque, LER10: 0.32; LER30: 1.2; LER50: 10, Motor Cable Entry: Basic Type, Entry on Right Side, Actuator Cable Type: Standard Cable, Actuator Cable Length: 1.5m, Controller Type: LECP6, Step Data Input Type, NPN, I/O Cable Length: 1.5m, Communication Plug Connector: -, Controller Mounting: -

Table Accuracy: High Precision Type, Size: 50, Max. Rotation Torque: High Torque, LER10: 0.32; LER30: 1.2; LER50: 10, Motor Cable Entry: Basic Type, Entry on Right Side, Actuator Cable Type: Standard Cable, Actuator Cable Length: 5m, Controller Type: LECP6, Step Data Input Type, PNP, I/O Cable Length: 5m, Communication Plug Connector: -, Controller Mounting: -

Table Accuracy: High Precision Type, Size: 50, Max. Rotation Torque: High Torque, LER10: 0.32; LER30: 1.2; LER50: 10, Motor Cable Entry: Basic Type, Entry on Right Side, Actuator Cable Type: Standard Cable, Actuator Cable Length: 5m, Controller Type: LECP6, Step Data Input Type, PNP, I/O Cable Length: 5m, Communication Plug Connector: None, Controller Mounting: DIN Rail Mounting