Body Size: 16, Type: R (Standard), Motor: Step Motor (Servo DC24V), Lead Screw: K (Size 8: 4mm, Size 16: 5mm, Size 25: 8mm), Stroke: 100mm, Lock: None, Body Option: Basic, Mounting: w/o Side Holder, Actuator Cable: R (Robotic Flexible Cable), Actuator Cable Length: 1 (1.5m)

Body Size: 16, Type: R (Standard), Motor: Step Motor (Servo DC24V), Lead Screw: K (Size 8: 4mm, Size 16: 5mm, Size 25: 8mm), Stroke: 100mm, Lock: None, Body Option: S (Dustproof Specification), Mounting: w/o Side Holder, Actuator Cable: R (Robotic Flexible Cable), Actuator Cable Length: 1 (1.5m)

Body Size: 16, Type: R (Standard), Motor: Step Motor (Servo DC24V), Lead Screw: K (Size 8: 4mm, Size 16: 5mm, Size 25: 8mm), Stroke: 50mm, Lock: None, Body Option: S (Dustproof Specification), Mounting: w/o Side Holder, Actuator Cable: R (Robotic Flexible Cable), Actuator Cable Length: 1 (1.5m)

Body Size: 16, Type: Standard, Motor: Step Motor (Servo DC24V), Lead Screw: Size 8: 4mm, Size 16: 5mm, Size 25: 8mm, Stroke: 100mm, Lock: None, Body Option: Basic, Mounting: w/o Side Holder, Actuator Cable: Robotic Flexible Cable, Actuator Cable Length: 1.5m, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Mounting: -, Communication Plug Connector or I/O Cable Length

Body Size: 16, Type: Standard, Motor: Step Motor (Servo DC24V), Lead Screw: Size 8: 4mm, Size 16: 5mm, Size 25: 8mm, Stroke: 100mm, Lock: None, Body Option: Dustproof Specification, Mounting: w/o Side Holder, Actuator Cable: Robotic Flexible Cable, Actuator Cable Length: 1.5m, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Mounting: -, Communication Plug Connector

Body Size: 16, Type: Standard, Motor: Step Motor (Servo DC24V), Lead Screw: Size 8: 4mm, Size 16: 5mm, Size 25: 8mm, Stroke: 50mm, Lock: None, Body Option: Dustproof Specification, Mounting: w/o Side Holder, Actuator Cable: Robotic Flexible Cable, Actuator Cable Length: 1.5m, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Mounting: -, Communication Plug Connector or

Table of Contents

(Values at the initial period) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 3 position pressure center (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 3-10-7 8 Series VQ7-6 DIN Terminal Type 2 position single : VQ7-6-FG-S single (Reverse pressure): VQ7-6-YZ-S 120.5 120.5 68.5 52 68.5 Mounting hole 2-6.5 50 50 42.5 42.5 25 25 13 (A port) 13 (B port) Manual override (R1, R2) 2-3/8 P R2 R1 A B 14 11 50 62 12 9 62

4/5 Port Solenoid Valve

/60 Hz 25 2500 mm 2 200 VAC 50/60 Hz 30 3000 mm 110 VAC 50/60 Hz [115 VAC 50/60 Hz] 50 5000 mm 3 M plug connector 220 VAC 50/60 Hz [230 VAC 50/60 Hz] 4 M8 connector For type W, DC voltage is only available.

2

V (50 Hz) Three-phase 200 V (50 Hz) Three-phase 200/220 V (60 Hz) IDU37E R1 1/2 37 6.1 5.7 IDU55E 55 9.8 8.4 R2 IDU75E 75 12.5 11.0 Refer to the separate catalog.

42

D side Coil voltage 1 100 VAC (50/60 Hz) 2 200 VAC (50/60 Hz) 3 110 VAC (50/60 Hz) 4 220 VAC (50/60 Hz) 5 24 VDC 6 12 VDC 461 VQ4000 Series Kit (Terminal block box kit) T 38 91 1/8" PE. port 18 18 17.2 PE 41.7 R1 R2 3 5 P 1 SMC 1/2" 1(P), 5(R1), 3(R2) port 1/4", 3/8" C6, C8, C10, C12, N7, N9, N11 4(A), 2(B) port M5 x 0.8 Ground screw 2 x G3/4 Conduit port 10.7 U side 129.5 126.5 3.5 163

1

)5 1 (P) 3(R2) 1(P) 5(R1) 3(R2) N.C.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

/60 Hz 200 VAC, 50/60 Hz 110 to 120 VAC, 50/60 Hz 220 VAC, 50/60 Hz 24 VDC 12 VDC 240 VAC, 50/60 Hz 9 Other VFS VFR 4 5 6 VQ7 7 Option Body Option Pilot type 0 1 Standard Direct manual override Nil R Internal pilot External pilot Option Option How to Order Pilot Valve Assembly SF4 F 1 22 Coil rated voltage 1 100 VAC, 50/60 Hz 2 200 VAC, 50/60 Hz 3 110 to 120 VAC, 50/60 Hz 4 220 VAC, 50

5 Port Solenoid Valve Series VQZ1000/2000/3000

Coil voltage 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC [115 VAC] (50/60 Hz) 220 VAC [230 VAC] (50/60 Hz) 24 VDC 12 VDC Note) For sub-plate part no., refer to page 967.

VFS

/60 Hz 2 200 VAC, 50/60 Hz 3 110 to 120 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 5 24 VDC 6 12 VDC 7 240 VAC, 50/60 Hz 9 Other Option 3-8-49 50 Series VFS2000 Dripproof Manifold U D With common terminal box: VV5FS2-01WTB 1Station Port size Indicator light Push type manual override 2-Rc 1 8 Pilot EXH port 150.5 (Double) 101 (Single) 158 (3 position) 6-Rc 1 4 2-Rc 1 8 1(P), 3(R2), 5(R1) port External

VQ7-6/7-8

(Values at the initial period) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 3 position pressure center (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 3-10-7 8 Series VQ7-6 DIN Terminal Type 2 position single : VQ7-6-FG-S single (Reverse pressure): VQ7-6-YZ-S 120.5 120.5 68.5 52 68.5 Mounting hole 2-6.5 50 50 42.5 42.5 25 25 13 (A port) 13 (B port) Manual override (R1, R2) 2-3/8 P R2 R1 A B 14 11 50 62 12 9 62

VQ7-6/7-8

(Values at the initial period) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 3 position pressure center (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 3-10-7 Series VQ7-6 DIN Terminal Type 2 position single : VQ7-6-FG-S single (Reverse pressure): VQ7-6-YZ-S 120.5 120.5 68.5 52 68.5 Mounting hole 2-6.5 50 50 42.5 42.5 25 25 13 (A port) 13 (B port) Manual override (R1, R2) 2-3/8 P R2 R1 A B 14 11 50 62 12 9 62

0.4

(R1)5 1 (P) 3(R2) Coil voltage CE-Compliant SQ 3-position exhaust center 1 2 Note) 3 4 Note) 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC 2(B) (A)4 4 VFS (R1)5 1 (P) 3(R2) 3-position pressure center VFR 2(B) (A)4 5 (R1)5 1 (P) 3(R2) VQ7 Note) 200 and 220 VAC: F/L kit only Note) For sub-plate single unit type, refer to page 417.

VQZ1000/2000/3000

R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note) Except VQZ1000 and metal seal type.

VQ7-6/7-8

(initial value) 1 (P) 5 (R1) 3 (R2) 3 position pressure center (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 2 Series VQ7-6 DIN Connector Type 2 position/Single : VQ7-6-FG-S Single (reverse pressure): VQ7-6-YZ-S 50 68.5 52 120.5 68.5 120.5 2-6.5 Mounting hole 50 25 25 42.5 42.5 13 (port A) 13 (port B) 3-Rc3/8 (R1, R2) Manual override R1 R2 P B A 14 50 62 11 9 12 38 50 62 13 A B R1 R2 P 2-Rc1/8 13 34 Indicator

SYJ3000/5000/7000

For 115 VAC and 230 VAC, the allowable voltage is 15% to +5% of rated voltage. 1 (P) 5 (R1) 3 (R2) 1 (P) 3 (R2) 5 (R1) 3 position pressure center 3 position pressure center (B) 2 (A) 4 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 3 (R2) 5 (R1) Made to Order Specifications (For details, refer to pages 1-5-72 to 73.) 1-5-50 51 5 Port Solenoid Valve Rubber Seal Series SYJ7000 Flow Characteristics/Weight