3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

plug connector (M): VQZ2 5 (R)lMl 0 1 01 02 57 Indicator light Cover diameter 1.5 Cross section 0.23mm2 (Lead wire) 73.5 135.5<137.5> 300 61.5<62.5> 160 58.5<63.5> < >: AC 1.12-42 VQZ1000/2000/3000 Base Mounted VQZ3000 2 position single 0 1 02 03 Grommet(G): VQZ315 (R)lGl 300 95 58 28 (Lead wire length) 10.5 10.5 24.5Mounting holes (Rc(PT)3/8) (Rc(PT)3/8) 9 9 (Rc(PT)1/4) (Rc(PT)1/4) 5 R5

Body Size: 8, Type: D (In-line Motor Type), Motor: Step Motor (Servo DC24V), Lead Screw: K (Size 8: 4mm, Size 16: 5mm, Size 25: 8mm), Stroke: 50mm, Lock: B (Lock), Body Option: S (Dustproof Specification), Mounting: H (w/Side Holder)

Body Size: 8, Type: D (In-line Motor Type), Motor: Step Motor (Servo DC24V), Lead Screw: J (Size 8: 8mm, Size 16: 10mm, Size 25: 16mm), Stroke: 50mm, Lock: B (Lock), Body Option: S (Dustproof Specification), Mounting: H (w/Side Holder)

Body Size: 8, Type: In-line Motor Type, Motor: Step Motor (Servo DC24V), Lead Screw: Size 8: 4mm, Size 16: 5mm, Size 25: 8mm, Stroke: 50mm, Lock: Lock, Body Option: Dustproof Specification, Mounting: w/Side Holder, Actuator Cable: -, Actuator Cable Length: -, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Mounting: -, Communication Plug Connector or I/O Cable Length

Body Size: 8, Type: In-line Motor Type, Motor: Step Motor (Servo DC24V), Lead Screw: Size 8: 8mm, Size 16: 10mm, Size 25: 16mm, Stroke: 50mm, Lock: Lock, Body Option: Dustproof Specification, Mounting: w/Side Holder, Actuator Cable: -, Actuator Cable Length: -, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Mounting: -, Communication Plug Connector or I/O Cable Length

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

10

U side 7 6 5 4 3 2 D side Stations 1 Cable 6 to 12 G1/2 G1/2 (44) R3 R4 T E D R1, R6 R5 R2 F F n x 1/8,1/4 OUT port (For common SUP type) IN port (For individual SUP type) (mm) n (stations) Size Dimensions 2 3 4 5 6 7 8 9 10 86 100 90 108 103 121 L1 L2 L1 L2 L1 L2 122 136 126 144 144 162 158 172 162 180 185 203 194 208 198 216 226 244 230 244 234 252 267 285 266 280 270

For post-stoppage positioning and locking

green when turned ON Connector size M12 x 1 0 0.5 0.4 0.3 0.2 0.1 1 Supply pressure [MPa] 2 4 3 Connector pin arrangement Type Connector pins and arrangement 1 2 3 4 E2E-X7D1-M1J-T10.3M OUT ( ) OUT () 1 Pallet Lock Cylinder W-R1/W-R3 Series Dimensions W-R1-S2Position of fulcrum 2 x 18.5 Proximity switch mounting bracket 68 Proximity switch (Option) 117 15 15 26 26 2 x Rc3/8 36.5 6.5 R5

The LES series electric slide table actuator uses a compactly-integrated, recirculating linear guide for high rigidity and high precision. When the LES is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein.. Two types of built-in motors * are available. The series can be top or bottom mounted. In

Size: 25, Motor Mounting Position: D (In-line Motor Type), Motor Type: Step Motor, (Servo/24 VDC), Lead: J (LES8: 8mm; LES16: 10mm; LES25: 16mm), Stroke: 50mm, Motor Option: B (w/Lock), Body Option: S (Dustproof Specification), Mounting: H (w/Side Holder, 4 pcs.), Actuator Cable Type: R (Robotic Cable, Flexible Cable), Actuator Cable Length: 3 (3m), Controller Type - LEC, JXC: 1N [LECP1,

Body Size: 16, Type: D (In-line Motor Type), Motor: Step Motor (Servo DC24V), Lead Screw: J (Size 8: 8mm, Size 16: 10mm, Size 25: 16mm), Stroke: 50mm, Lock: B (Lock), Body Option: S (Dustproof Specification), Mounting: H (w/Side Holder), Actuator Cable: S (Standard Cable), Actuator Cable Length: 3 (3m), Controller Type - LEC, JXC: 1P (PNP Controller, LECP1, Programless Type), I/O Cable Length

Body Size: 8, Type: D (In-line Motor Type), Motor: Step Motor (Servo DC24V), Lead Screw: J (Size 8: 8mm, Size 16: 10mm, Size 25: 16mm), Stroke: 50mm, Lock: B (Lock), Body Option: S (Dustproof Specification), Mounting: H (w/Side Holder), Actuator Cable: S (Standard Cable), Actuator Cable Length: 3 (3m), Controller Type - LEC, JXC: 1P (PNP Controller, LECP1, Programless Type), I/O Cable Length

Body Size: 25, Type: D (In-line Motor Type), Motor: Step Motor (Servo DC24V), Lead Screw: J (Size 8: 8mm, Size 16: 10mm, Size 25: 16mm), Stroke: 50mm, Lock: B (Lock), Body Option: S (Dustproof Specification), Mounting: H (w/Side Holder), Actuator Cable: R (Robotic Flexible Cable), Actuator Cable Length: 5 (5m), Controller Type - LEC, JXC: C51 (JXC51, Parallel NPN, Step Data Input Type), I

Body Size: 16, Type: D (In-line Motor Type), Motor: Step Motor (Servo DC24V), Lead Screw: J (Size 8: 8mm, Size 16: 10mm, Size 25: 16mm), Stroke: 50mm, Lock: B (Lock), Body Option: S (Dustproof Specification), Mounting: H (w/Side Holder), Actuator Cable: R (Robotic Flexible Cable), Actuator Cable Length: A (10m), Controller Type - LEC, JXC: C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type), I/

Size: 25, Motor Mounting Position: In-line Motor Type, Motor Type: Step Motor, (Servo/24 VDC), Lead: LES8: 8mm; LES16: 10mm; LES25: 16mm, Stroke: 50mm, Motor Option: w/Lock, Body Option: Dustproof Specification, Mounting: w/Side Holder, 4 pcs., Actuator Cable Type: Robotic Cable, Flexible Cable, Actuator Cable Length: 3m, Controller Type - LEC, JXC: 1N [LECP1, (Programless Type), NPN], I/

Body Size: 16, Type: In-line Motor Type, Motor: Step Motor (Servo DC24V), Lead Screw: Size 8: 8mm, Size 16: 10mm, Size 25: 16mm, Stroke: 50mm, Lock: Lock, Body Option: Dustproof Specification, Mounting: w/Side Holder, Actuator Cable: Standard Cable, Actuator Cable Length: 3m, Controller Type - LEC, JXC: PNP Controller, LECP1, Programless Type, I/O Cable Length for LEC: 1.5m, Controller Mounting

Body Size: 8, Type: In-line Motor Type, Motor: Step Motor (Servo DC24V), Lead Screw: Size 8: 8mm, Size 16: 10mm, Size 25: 16mm, Stroke: 50mm, Lock: Lock, Body Option: Dustproof Specification, Mounting: w/Side Holder, Actuator Cable: Standard Cable, Actuator Cable Length: 3m, Controller Type - LEC, JXC: PNP Controller, LECP1, Programless Type, I/O Cable Length for LEC: 1.5m, Controller Mounting

Body Size: 25, Type: In-line Motor Type, Motor: Step Motor (Servo DC24V), Lead Screw: Size 8: 8mm, Size 16: 10mm, Size 25: 16mm, Stroke: 50mm, Lock: Lock, Body Option: Dustproof Specification, Mounting: w/Side Holder, Actuator Cable: Robotic Flexible Cable, Actuator Cable Length: 5m, Controller Type - LEC, JXC: JXC51, Parallel NPN, Step Data Input Type, I/O Cable Length for LEC: Without Cable

Body Size: 16, Type: In-line Motor Type, Motor: Step Motor (Servo DC24V), Lead Screw: Size 8: 8mm, Size 16: 10mm, Size 25: 16mm, Stroke: 50mm, Lock: Lock, Body Option: Dustproof Specification, Mounting: w/Side Holder, Actuator Cable: Robotic Flexible Cable, Actuator Cable Length: 10m, Controller Type - LEC, JXC: JXC91, EtherNet/IPâ„¢ Direct Input Type, I/O Cable Length for LEC: Without Cable

Electric Actuator / Slider type 《 High performance Battery-less absolute encoder type 》

Nil With R3 3 RB 15 N Without (Roller specification) R5 5 RC 20 Applicable Stroke Table Stroke Size 50 100 150 200 250 300 350 400 450 500 600 700 800 900 1000 1100 1200 25 32 40 Controller Nil Without controller CH With controller C 5 H 7 T (Communication protocal Interface Communication plug connector I/O cable*2 /Input/Output) Symbol Type Applicable interface 5 Parallel inputNPN) Nil Without