XM, XY

-75 1.3 x 10-10 (FKM) Note 1) Values at ambient temperatures, excluding gas permeation.

Fluoropolymer Piping Equipment

LQ1E41-R4 LQ1E51-R2 LQ1E51-R3 LQ1E51-R4 LQ1E51-R5 LQ1E61-R2 LQ1E61-R3 LQ1E61-R4 LQ1E61-R5 3 8 x 6 6 x 4 4 x 2 10 x 8 8 x 6 6 x 4 4 x 3 12 x 10 10 x 8 8 x 6 6 x 4 LQ1E3A-R3 LQ1E4A-R2 LQ1E4A-R3 LQ1E4A-R4 LQ1E5A-R2 LQ1E5A-R3 LQ1E5A-R4 LQ1E6A-R2 LQ1E6A-R3 LQ1E6A-R4 LQ1E6A-R5 1/8" x 0.086" 1/4" x 5/32" 3/16" x 0.127" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 3/16" x 0.127" 1/2" x 3/8" 3/8" x 1/4

Prevents Micro-Bubbles

SET POS. 6 6 4-R3 6 6 PAX 4-R3 4-R3 (Max. 91) 325 PB (Max. 91) 191 87 60 87 60 112 112 17-5-37 35 Series LV Fitting Assembly Procedure Assemble fittings following the procedure shown below.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

CHEMRAZ VMQ FKM for Plasma ULTIC ARMOR To order something else Nil (standard), list the symbols starting with X, followed by each symbol for seal material and then changed parts at last. 3310-75 U1 UA4640 Ex.)

LVQ

SET POS. 6 6 4-R3 6 6 4-R3 4-R3 (Max. 91) 325 (Max. 91) 191 87 60 87 60 112 112 17-5-84 Fitting Assembly Procedure Assemble fittings following the procedure shown below.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

DXT170-75-1 Connection/Disconnection of socket with lead wire Connection Insert lead wire and crimped socket into square holes (indicated as A, B, COM) of connector. Press the socket in fully until the hook of the socket locks into the groove of the connector housing. Confirm the locked position by lightly pulling on the lead wire.

Industrial Filters

Main applications Cotton Stainless steel 304 20 to 100 0.5, 1, 5, 10, 20, 50, 75, 100 0.2 MPa 0.1 MPa Polypropylene Polypropylene 0 to 60 0.5, 1, 5, 10, 20, 50, 75, 100 Glass fiber Stainless steel 316 1, 5, 10, 20 0 to 400 Note) Size for all is 65 x L250. Different lengths are available as a special order up to 750 mm, only for cotton and polypropylene. Elements Part No.

High Purity Fluoropolymer

Replacement part type L shows the parts for LQ-GL and LQ-GM. 33 High Purity Fluoropolymer Fittings & Tubing Series LQ1 2 Dimensions LQ-GJ LQ-GK LQ-GJ 36 30 45 (adjustable) 117 76 24 LQ-GK 36 SET POS. 53 127 43 63 (Max. 50) 114 53 43 63 LQ-GM LQ-GL 50 50 207 85 342 85 LQ-GL 40 28 SET POS. 40 28 LQ-GM 4-R3 SET POS. 6 6 4-R3 6 6 4-R3 4-R3 (Max. 91) 325 (Max. 91) 191 87 60 87 60 112 112 34 Series

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

SET POS. 6 6 4-R3 PB 6 6 4-R3 4-R3 191 (MAX.91) (MAX.91) 325 87 60 87 60 112 112 17-5-129 34 Series LQ 1 2 Fitting Assembly Procedure Assemble fittings following the procedure shown below.

Vacuum

Suciion SCFi,/ (Namin) 0.18 (5) 0.3s (10) o.78 (22) 1.13 (32) Ak Consumplion SCF[, (N/m n) 0.46 (13) 0.81 (23) 1.63 (46) 2.65 (75) Max. Vacuum Pressure -25 in Hg (-630 mmHg) Exhaust Belease Built-in silencer. Manilold common exhausl .

Vacuum

Construction/Seals Spring pin Set screw 75 NztA Senies I Single/ Dimensions inch (mm) Note) The diagram on th lett is lor NZFA200. The bracket localion shown is on the left sid.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

0.23mm2 < >: AC 61.5 54 3 4 5 36 0 1 M plug connector (M): VQZ2 2 (R)wMwC4, C6, M5 37.5 <42.5> 300 (Lead wire length) Cover diameter 1.5 Cross section 0.23mm2 73.5 160 135.5 <137.5> 61.5 <62.5> Indicator light < >: AC 1.12-14 VQZ1000/2000/3000 Body Ported VQZ3000 2 position single 0 1 Grommet (G): VQZ312 (R)wGwC6, C8, C10, 02 300 (Lead wire length) 19 95 58 24.5Mounting holes 24.4 9 9 R3

IDX-OM-M051

/4 R3/4 20 50 165 475 9902 1030 950 Facility water outlet 1.3 Name and function of parts Terminal block for signal (Symbol: W5) (Symbol: W5) R3/4 R3/4 Refer to 6.3 Outer dimensions 6 5 IDF100F~150F-W IDX-OM-M051 Air Dryer 6.

IDX-OM-Z004

A 1056 A 720 9351 1290 160 150 150 160 t K K K K K16K JIS 80A 10K 64 (17) 17) 40 (K16K) 1823) (18~23) JIS 80A 10K 479 127 1332 1432 1,3 -W4 (-W4) -W4 Y3/4 (-W4) Y 3/4 () () R3/4 R3/4 20 50 165 475 9902 1030 950 (-W5) -W5 1,3 (-W5) -W5 R3/4 R3/4 IDF100F150F-W 6 5 IDX-OM-Z004 6 6.4 IDF100/125F/150F-30-W R R GFCI PE TB1 THR MC1 CM OLR MC1 HM PRR SWL PLC TB2 Y0 1 MC1

Main Body Peripheral Component: Peripheral Components, Input Power Supply: DC 24V, Position Detection: Incremental, I/O Module: PNP, Motor Type: Step motor (24‑V DC servo), Step data (points): 64, Actuator/cable type: LESH8RK-50, I/O cable length / communication plug(m): 5, Controller/driver mounting method: DIN rail mounting type

Table of Contents

MHS4-32D MHS4-32D 75 75 Pressure 0.6 MPa Pressure 0.6 MPa 60 60 0.5 MPa 0.5 MPa Gripping force (N) Gripping force (N) 0.4 MPa 0.4 MPa 45 45 0.3 MPa 0.3 MPa 30 30 0.2 MPa 0.2 MPa 15 15 0.1 MPa 0.1 MPa 0 0 10 10 20 20 30 30 40 40 50 50 Gripping point L (mm) Gripping point L (mm) F F Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-

XLAQ/XLDQ

P1 70W XGT Kalrez Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 3310-75 To order something else Nil (standard), list the symbols starting with X, followed by each symbol for "body surface treatment", "seal material" and then changed parts at last. CYV Chemraz Example) XLAQ-25-M9NA-XAN1A VMQ FKM for Plasma ULTIC ARMOR U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd.

OMR0032

Caution Prepare 2 separate 24 VDC power supplies for the CN1 controller power supply and CN5 input / output signal power supply. 35 - (3) Pulse input internal circuit B7 R1 B8 Pulse input signal switch R2 B9 Main circuit R3 B10 R1 R2 R3 Pulse input signal Power supply voltage Input signal method Current limiting resistor R for pulse input signal

KB

Use the root nearest the thread when tightening with a wrench. 2.1-75 Piping Module Series KB 1 Air Output Port Elbow module: KBV Weight (g) Tube O.D. Part No.

Exhaust Cleaner for Vacuum Pump AMV Series

/8 AMV15, AMV37: R1/2 AMV75, AMV160: R3/4 Replacement Parts AMV3 AMV6 AMV15 AMV75 1 AMV37 AMV160 2 No Description Material Part no.