Size: 25, Motor Mounting Position: D (In-line), Lead: B (Size 8: 5mm, Size 16: 6mm, Size 25: 8mm), Stroke: 100mm, Motor Option: C (w/Motor Cover), Actuator Cable Type, Length: R3 (3m), Controller: CL1 (IO-Link), Mounting: 7 (Screw Mounting)

Size: 25, Motor Mounting Position: D (In-line), Lead: B (Size 8: 5mm, Size 16: 6mm, Size 25: 8mm), Stroke: 100mm, Motor Option: C (w/Motor Cover), Actuator Cable Type, Length: R5 (5m), Controller: CL1 (IO-Link), Mounting: 7 (Screw Mounting)

Size: 25, Motor Mounting Position: D (In-line), Lead: B (Size 8: 5mm, Size 16: 6mm, Size 25: 8mm), Stroke: 100mm, Motor Option: C (w/Motor Cover), Actuator Cable Type, Length: R8 (8m), Controller: CL1 (IO-Link), Mounting: 7 (Screw Mounting)

Size: 25, Motor Mounting Position: D (In-line), Lead: B (Size 8: 5mm, Size 16: 6mm, Size 25: 8mm), Stroke: 100mm, Motor Option: C (w/Motor Cover), Actuator Cable Type, Length: RA (10m), Controller: CL1 (IO-Link), Mounting: 7 (Screw Mounting)

Size: 25, Motor Mounting Position: D (In-line), Lead: B (Size 8: 5mm, Size 16: 6mm, Size 25: 8mm), Stroke: 100mm, Motor Option: C (w/Motor Cover), Actuator Cable Type, Length: RB (15m), Controller: CL1 (IO-Link), Mounting: 7 (Screw Mounting)

Size: 25, Motor Mounting Position: D (In-line), Lead: B (Size 8: 5mm, Size 16: 6mm, Size 25: 8mm), Stroke: 100mm, Motor Option: C (w/Motor Cover), Actuator Cable Type, Length: RC (20m), Controller: CL1 (IO-Link), Mounting: 7 (Screw Mounting)

Size: 25, Motor Mounting Position: D (In-line), Lead: B (Size 8: 5mm, Size 16: 6mm, Size 25: 8mm), Stroke: 100mm, Motor Option: C (w/Motor Cover), Actuator Cable Type, Length: R1 (1.5m), Controller: CE1 (EtherCAT®), Mounting: 8 (DIN Rail)

Size: 25, Motor Mounting Position: D (In-line), Lead: B (Size 8: 5mm, Size 16: 6mm, Size 25: 8mm), Stroke: 100mm, Motor Option: C (w/Motor Cover), Actuator Cable Type, Length: R3 (3m), Controller: CE1 (EtherCAT®), Mounting: 7 (Screw Mounting)

Size: 25, Motor Mounting Position: D (In-line), Lead: B (Size 8: 5mm, Size 16: 6mm, Size 25: 8mm), Stroke: 100mm, Motor Option: C (w/Motor Cover), Actuator Cable Type, Length: R5 (5m), Controller: CE1 (EtherCAT®), Mounting: 7 (Screw Mounting)

Size: 25, Motor Mounting Position: D (In-line), Lead: B (Size 8: 5mm, Size 16: 6mm, Size 25: 8mm), Stroke: 100mm, Motor Option: C (w/Motor Cover), Actuator Cable Type, Length: R8 (8m), Controller: CE1 (EtherCAT®), Mounting: 7 (Screw Mounting)

Size: 25, Motor Mounting Position: D (In-line), Lead: B (Size 8: 5mm, Size 16: 6mm, Size 25: 8mm), Stroke: 100mm, Motor Option: C (w/Motor Cover), Actuator Cable Type, Length: RA (10m), Controller: CE1 (EtherCAT®), Mounting: 7 (Screw Mounting)

Size: 25, Motor Mounting Position: D (In-line), Lead: B (Size 8: 5mm, Size 16: 6mm, Size 25: 8mm), Stroke: 100mm, Motor Option: C (w/Motor Cover), Actuator Cable Type, Length: RC (20m), Controller: CE1 (EtherCAT®), Mounting: 7 (Screw Mounting)

Size: 25, Motor Mounting Position: D (In-line), Lead: B (Size 8: 5mm, Size 16: 6mm, Size 25: 8mm), Stroke: 100mm, Motor Option: C (w/Motor Cover), Actuator Cable Type, Length: R1 (1.5m), Controller: CP1 (PROFINET), Mounting: 8 (DIN Rail)

XL

None H0 High temp. type With heater for 80C (176F) H1 5 to 150C (41 to 302F) H2 With heater for 100C (212F) H3 With heater for 120C (248F) Option specifications/Combination table Option specifications Symbol Model XLF-16 XLF-25 XLF-40 XLF-50 XLF-63 XLF-80 A Indicator H0 Without heater High temp. type H1 With heater for 80C (176F) H2 With heater for 100C (212F) H3 With heater for 120C (248F

High Vacuum Angle Valve, XL Series

None H0 High temp. type With heater for 80C (176F) H1 5 to 150C (41 to 302F) H2 With heater for 100C (212F) H3 With heater for 120C (248F) Option specifications/Combination table Option specifications Symbol Model XLF-16 XLF-25 XLF-40 XLF-50 XLF-63 XLF-80 A Indicator H0 Without heater High temp. type H1 With heater for 80C (176F) H2 With heater for 100C (212F) H3 With heater for 120C (248F

1

New Products Guide 1 Directional Control Valves Actuators Vacuum Equipment CAT.E00-6A INDEX New Products Guide 1 Directional Control Valves 5 Port Solenoid Valve Fieldbus System (For Input/Output) 2/3 Port Mechanical Valve Series SY3000/5000/7000 Series EX600 Series VM100/200 P .6 P .264 P .322 Actuators Foot Pedal Type 5 Port Mechanical Valve XT34-60/67 Air Cylinder Air Cylinder Series CJ2

Rotary Actuator

-X7 Angle adjusting screw "B" Angle adjusting screw "A" Rotation at 90 Heat resistant In this rotary actuator, the material of the seals has been changed to the heat resistant type (to withstand up to 100C), for applications in environments that exceed the standard specification temperatures of 0 to 60C.

Fluoropolymer Tubing Variations

One-touch fittings, Insert fittings Fluoropolymer fittings: LQ series Note 3) Applicable Note 2) fittings Miniature fittings: M, MS series (Hose nipple type) 20C 0.7 0.25 0.1 Refer to the max. operating pressure curve. 1 0.4 0.2 0.7 0.25 0.1 1 0.4 0.2 1.5 0.55 0.3 1.7 0.6 0.3 2.3 0.85 0.4 100C Max. operating pressure (MPa) 200C How to measure the minimum bending radius.

High Vacuum Angle Valve

Heater (CE) Temperature specification Valve size 25 40 50 63 80 H4 (100C) XL1A25-60S-1 XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-3 H5 (120C) XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-2 XL1A25-60S-3 XL1A25-60S-2 (2 sets) Example) For the XLA-80H5-2 with a heater, 2 sets of the XL1A25-60S-2 are required. Solenoid Valve/Plate Assembly Series Description (Construction no.)

Aluminum High Vacuum Angle Valve

Heater assembly quantity 200/40 200/50 400/100 600/150 800/220 1200/350 100V H4 100C Heater assembly quantity used Heater power W (Nominal value) In-rush/Power consumption (Option symbolOperating voltage) 800/40 800/50 1600/100 2400/150 3200/220 4800/350 200V 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs. 3 pcs. 4 pcs.