VQ7-6/7-8

PA R2 R1 2-7.5 Mounting hole Indicator light 49 (64) 49 (64) 2-7.5 Mounting hole Indicator light 49 (64) 49 (64) 108.5 (121.5) 108.5 (121.5) 50 (63) 32 (42) 50 (63) 32 (42) 5 3 5 3 38 (53) 38 (53) 1 23 (30) 1 23 (30) 2-Rc3/8, 1/2, 3/4 Ports R1, R2 Rc3/8, 1/2, 3/4 Port P 2-Rc3/8, 1/2, 3/4 Ports R1, R2 Rc3/8, 1/2, 3/4 Port P Rc1/8 Port X (PE) Rc1/8 Port X (PE) 30 (42) 30 (42) 30 (42) 30 (42

VFS

For 30 type, common external pilot (on manifold side).

VQ7-6/7-8

2 (Cable 8 to 10) G1/2 (Cable 8 to 10) 153(166) 153(166) 141(154) 108.5(121.5) 141(154) 108.5(121.5) 50(63) 50(63) 5 3 38(53) 5 3 38(53) 32(42) 23(30) 32(42) 23(30) 1 1 2-3/8, 1/2, 3/4 2-3/8, 1/2, 3/4 3/8, 1/2, 3/4 R1, R2 port X(PE) port 1/8 3/8, 1/2, 3/4 R1, R2 port X(PE) port 1/8 30(42) 30(42) 30(42) 30(42) P port P port ( ): 3/4 Dimensions inside are for rubber seals. ( ): 3/4 3-10-24

Aluminum High Vacuum Angle Valve

-30-1-1 XLF80-30-1 XLF80A-30-1 XLF80-30-1H XLF80A-30-1H XLFV80-30-1 XLFV80A-30-1 XLD80-30-1 XLD80-30-1H XLDV80-30-1 XLG80-30-1-1 XLG80-30-1H-1 XLGV80-30-1 63 XLA63-30-1 XLA63A-30-1 XLA63-30-1H XLA63A-30-1H XLAV63-30-1 XLAV63A-30-1 XLC63-30-1-1 XLC63-30-1H-1 XLCV63-30-1-1 XLF63-30-1 XLF63A-30-1 XLF63-30-1H XLF63A-30-1H XLFV63-30-1 XLFV63A-30-1 XLD63-30-1 XLD63-30-1H XLDV63-30-1 XLG63-30-1

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

How to Order Connector Assembly For DC: SY100 30 4A For 100 VAC: SY100 30 1A Groove Cover For 200 VAC: SY100 30 2A Pin Cover For other voltages of AC: SY100 30 3A Groove DC polar indication Lever Pin Without lead wire: SY100 30 A Lead wire length -+ Socket (with connector and 2 of sockets only) Lead wire Connector Nil 6 10 15 20 25 30 50 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000

0.4

(R2) (R1)5 1 (P) 3(R2) VQZ r r e q w e q w SQ VFS VFR VQ7 VQC2301 VQC2401 VQC2300 VQC2400 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r VQC2501 VQC2500 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w VQC2A01 VQC2B01 2(B) 4(A) 4(A) 2(B) r 1(P) 5(R1) 3(R2) 1(P) 5(R1) 3(R2) VQC2C01 2(B) 4(A) 1(P) 5(R1) 3(R2)

0.4

) 3(R2) (R1)5 1 (P) 3(R2) VQ1501 VQ1500 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w VQ1A01 VQ1B01 4(A) 2(B) 2(B) 4(A) 5(R1) 1(P) 3(R2) 5(R1) 1(P) 3(R2) r VQ1C01 2(B) 4(A) 5(R1) 1(P) 3(R2) Component Parts Component Parts No.

Table of Contents

Proper tightening torque Nm Connection thread size 7 to 9 NPT 1/16, NPT, R1/8 12 to 14 NPT, R1/4 22 to 24 NPT, R3/8 28 to 30 NPT, R1/2 2. When a fitting is over tightened, more of the sealant material is squeezed out. Remove the squeezed out sealant material. 3. When tightening is not sufficient, it will cause sealant failure or a loose fitting. 4.

Refrigerated Air Dryers

, IDF37E-30 IDF55E-30 IDU22E-30, IDU37E-30, IDU55E-30 25 46 IDF37E-20 IDF22E-30 39 30 mA 125 10 A 60 60 IDF37E-30 IDF55E-30 148 81 50 36 IDF75E-30 133 73 IDU22E-30 151 74 200 V type IDF75E-30, IDU75E-30 15 A IDF100F 30 A IDF125F IDF150F IDF190D 50 A IDF240D IDF370D 60 60 50 46 IDU37E-30 146 122 IDU55E-30 148 55 36 IDU75E-30 166 73 70 IDF100F to 150F Dimensions [mm] A Model A B IDF100F 434

KJ

Proper tightening torque Nm Connection thread size 7 to 9 NPT 1/16, NPT, R1/8 12 to 14 NPT, R1/4 22 to 24 NPT, R3/8 28 to 30 NPT, R1/2 2. When a fitting is over tightened, more of the sealant material is squeezed out. Remove the squeezed out sealant material. 3. When tightening is not sufficient, it will cause sealant failure or a loose fitting. 4.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Port Symbol Caution VF1000 VF3000 VF5000 Supply P P (SUP) P Cylinder A, B A (CYL2) B (CYL1) A, B Connector R1 (EXH2) R2 (EXH1) R1, R2 EXH outlet EA, EB Lead wire JIS symbol Single solenoid Socket Hook 1: P (SUP) 2: B (CYL.1) 3: R2 (EXH.1) 4: A (CYL.2) 5: R1 (EXH.2) 1: P 2: B 3: R2 4: A 5: R1 Plug Connector Lead Wire Length 1: P 4: A 2: B 5: R1 3: R2 Standard length is 300 mm, but the following

Micro Mechanical Valve Series VM1000

F.O.F. 6.7 mm 16 N 18 2 x 3.5 mounting hole 30 T.T. 28.6 VZM550-01-30R/B/G/Y-X207 40 Panel mounting hole 1.5 1.5 30.5 3 86.5 40.1 M5 x 8 0.8 to 7.5 (Pilot exhaust port) (155.2) Symbol 126.6 PE R2 P R1 13.6 (B) 2 (A) 4 13.6 B A 14 12 17 19.8 35 10.8 35 10.8 3 (R2) 1 (P) 5 (R1) 0.5 MPa supply 13 3 1.6 18 21 25 28 14.7 T.T.

VQ4000

light 50 11 (12.5) 11 (12.5) 2 4 4(A) port 2(B) port 24.6 38 48 4 2 B A 24.6 A B 38 48 14 12 5 3 1 B A 30 45 14 3 5 1 12 2-5.6 Mounting hole Manual override 2-5.6 Mounting hole 45 30 Manual override 14.5 27 30.5 32 41.5 91.5 129 79 PE X PE X 32 41.5 30.5 27 R1 R2 P R2 R1 14.5 P 19.5 19.5 (21) (21) Rc 1/8 External pilot port Rc 1/8 PE port Rc 1/8 PE port 19.5 (21) 19.5 (21) 31 31 5-Rc 1/4

42

) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ 1/2 VQ 4/5 VQ 4/5 VQC 1/2 VQC 4/5 VQZ (A) 4 (B) 2 (A) 4 (B) 2 VQ4250 VQ4251 SQ VFS 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VFR VQ7 (A) 4 (B) 2 (A) 4 (B) 2 VQ4351 VQ4350 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 (A) 4 (B) 2 VQ4451 VQ4450 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 (A) 4 (B) 2 VQ4551 VQ4550 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3

Battery-less

Top3 D4 Bottom3 t Lead [mm] y Stroke4 5 [mm] Symbol LEYG16 LEYG25 LEYG32/40 A 10 12 16 B 5 6 8 C 2.5 3 4 Stroke Note Size Applicable stroke 30 to 200 16 30, 50, 100, 150, 200 30 to 300 25/32/40 30, 50, 100, 150, 200, 250, 300 u Motor option6 i Guide option7 o Actuator cable type/length Robotic cable [m] Nil None R8 88 R1 1.5 RA 108 R3 3 RB 158 R5 5 RC 208 C With motor cover W With lock/motor

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

mounting hole Indicator light P R2 R1 2-8 mounting hole Indicator light 49 (64) 49 (64) M12 connector M12 connector 126.5 (139.5) 126.5 (139.5) PE port PE port PE port PE port 50 (63) 3 5 38 (53) 50 (63) 32 (42) 3 5 1 38 (53) 23 (30) 32 (42) 1 23 (30) 1/8 14 port 3/8, 1/2, 3/4-2 port 3, 5 port 30 (42) 30 (42) 1/8 14 port 3/8, 1/2, 3/4-2 port 3, 5 port 30 (42) 30 (42) 3/8, 1/2, 3/4 1 port

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

For 20A/20B 25 5 1.5 4 x 2.6 Depth 7 or less Atmospheric vent port 30 20 30 20 Lead wire with connector M5 x 0.8 Thread depth 3.5 01 4 x 2.6 Depth 7 or less Atmospheric vent port 15.2 R1/8 7.2 N01 NPT1/8 A Piping specification Port size A 01 R1/8 Width across flats 10 N01 NPT1/8 Width across flats 12 20 ZSE20(F)/ISE20 Series Dimensions With bracket ZSE20(F) ISE20 Option 2 30 A1 25 20 Bracket

AC

G27-10-R1-X2092pcs. G46-10-012pcs. G27-10-R1-X2092pcs. G46-10-012pcs.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

center 3 position exhaust center 3 position closed center 3 position pressure center (1) 3 position exhaust center 3 position closed center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) Note 1) Except VQZ1000 and metal seal.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

center 3 position closed center 3 position exhaust center 3 position exhaust center 3 position pressure center 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note 1) Except for VQZ1000 and metal seal Component Parts No