Aluminum High Vacuum Angle Valve

Heater assembly quantity 200/40 200/50 400/100 600/150 800/220 1200/350 100V H4 100C Heater assembly quantity used Heater power W (Nominal value) In-rush/Power consumption (Option symbolOperating voltage) 800/40 800/50 1600/100 2400/150 3200/220 4800/350 200V 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs. 3 pcs. 4 pcs.

Air Slide Table

End plate Symbol 12 -X2128 Heat-resistant Specification (10 to 100C) Seal material and grease have been changed so that the product can be used at temperatures between 10 up to 100C. Specifications Ambient temperature 10C to 100C (No freezing) Seal material Fluororubber MXQ X2128 Standard model no.

LEY-OM007

. -45- 6 /250km /500 1. 2. 3. 2 LEY16*A 2,000km LEY25*A 2,500km LEY32A 4,000km LEY16*B 1,000km LEY25*B 1,200km LEY32B 2,000km LEY16*C 500km LEY25*C 600km LEY32C 1,000km a. b. c. d. e. f. -46- 7.5. 1. 2. (1mm ) 3. 4. N Nm LEY16 LE-D-2-1 10 0.36 LEY25 LE-D-2-2 19 0.63 LEY32 LE-D-2-3 30 1.5 5. LEY32 Nm LEY16 0.63 LEY25 1.5 LEY32 5.2 6. -47- 8.

JXCx-OMU0004

300 12 300 7 300 2 36 400 18 400 9 400 3 48 500 24 500 12 500 4 60 600 30 600 15 600 5 72 700 36 700 18 700 6 84 800 42 800 21 800 7 100 900 50 900 25 900 8 150 1000 75 1000 38 1000 9 200 1200 100 1200 50 1200 10 250 1400 125 1400 63 1400 11 300 1600 150 1600 75 1600 12 350 1800 175 1800 88 1800 13 400 2000 200 2000 100 2000 14 450 2500 225 2500 113 2500 15 500 3000 250 3000 125 3000 LEY32A

Main Body Peripheral Component: Peripheral Components, Input Power Supply: DC 24V, Position Detection: Incremental, I/O Module: PNP, Motor Type: Step motor (24‑V DC servo), Step data (points): 64, Actuator/cable type: LEY32A-200, I/O cable length / communication plug(m): 1.5, Controller/driver mounting method: DIN rail mounting type

Main Body Peripheral Component: Peripheral Components, Input Power Supply: DC 24V, Position Detection: Incremental, I/O Module: PNP, Motor Type: Step motor (24‑V DC servo), Step data (points): 64, Actuator/cable type: LEY32A-100, I/O cable length / communication plug(m): 3, Controller/driver mounting method: DIN rail mounting type

Main Body Peripheral Component: Peripheral Components, Input Power Supply: DC 24V, Position Detection: Incremental, I/O Module: PNP, Motor Type: Step motor (24‑V DC servo), Step data (points): 64, Actuator/cable type: LEY32A-200, I/O cable length / communication plug(m): Without I/O cable, Controller/driver mounting method: Screw mounting type

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

C RA1 X6 S Heat resistant type Stainless steel for main part In this rotary actuator, the material of the seals has been changed to the heat resistant type (to withstand up to 100C), for applications in environments that exceed the standard specification temperatures of 0 to 60C.

Table of Contents

(Example) Inlet air temperature: 100C, Ambient temperature: 20C, Amount of air: 2000 l/min (ANR), Air pressure: 0.7 MPa, Model: HAA22-14 Outlet Air Temperature at Above Conditions Use outlet air temperature of 38.5C from outlet air temperature table.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

C RA1 X6 S Heat resistant type Stainless steel for main part In this rotary actuator, the material of the seals has been changed to the heat resistant type (to withstand up to 100C), for applications in environments that exceed the standard specification temperatures of 0 to 60C.

1

When using with the operating temperature from 60 up to 100C, and the piston speed of more than 200 mm/s, please consult with SMC separately. 2. When using with the operating temperature from 50 up to 100C, and the piston speed of less than 200 mm/s, XB6 specifications can be used. 3.

Made to Order

When using with the operating temperature from 60 up to 100C, and the piston speed of more than 200 mm/s, please consult with SMC separately. 2. When using with the operating temperature from 50 up to 100C, and the piston speed of less than 200 mm/s, XB6 specifications can be used. 3.

10

-X85 Fine-particle Proof Specification Page 19 0 -X86m With Heavy Duty Scraper + Stable Lubrication Function (Lube-retainer) (Seal Material: NBR, Fluororubber) Page 21 15 Made to Order MHL2 Series Symbol Heat Resistant (10 to 100C) -X4 1 Seal material and grease have been changed, so that it could be used even at higher temperature up to 100 from 10C.

Title not found

Range Back Pressure SMC 4 0.35 -750mmHg~72.5psi 0~100C 45psi (60psi) 55.5 77 33.5 Height Width Operator Dia. 1/4 LVQ20 Brand X 6.35 0.9 -737mmHg~71psi 2~65C 0~40psi 103.6 124.2 50.8 Manufacturer Orifice Size Cv Factor Operating Press. Range Operating Temp. Range Back Pressure SMC 8 1.3 -750mmHg~72.5psi 0~100C 0~45psi (60psi) 76.5 95 45.5 Height Width Operator Dia.

Cylinder with Lock

6283 7069 7854 IN 7147 1429 2144 2859 3574 4288 5003 5718 6432 7147 * Theoretical output [N] = Pressure [MPa] x Piston area [mm2] Weight Single Rod (32 to 100) [kg] Bore size [mm] 32 40 50 63 80 100 Basic weight (at 0 stroke) Basic Lock unit 0.42 0.83 1.15 1.79 2.81 5.44 Cylinder (at 0 stroke) 0.55 0.84 1.41 1.79 3.25 4.61 Total 0.97 1.67 2.56 3.58 6.06 10.1 Calculation example) CP96NL32-100C

Air Cooled Aftercooler Series HAA 1

(Example) Inlet air temperature: 100C, Ambient temperature: 20C, Amount of air: 2000 l/min (ANR), Air pressure: 0.7 MPa, Model: HAA22-14 Outlet Air Temperature at Above Conditions Use outlet air temperature of 38.5C from outlet air temperature table.

Booster Relay Series IL100

How to Order IL 100 02 Suffix Booster relay Nil Standard Thread type T High temperature (5 to 100C) Nil Rc N NPT* L Low temperature (30 to 60C) F G* * Semi-standard S Copper-free ST Copper-free/ High temperature (5 to 100C) Port size 02 1/4 03 3/8 SL Copper-free/ Low temperature (30 to 60C) Accessories Nil None B With bracket Standard Specifications Flow-rate Characteristics Supply pressure

HRX-OM-W060

Indication Item Output Setting, selection and display CH1 circulating fluid temperature 0C to 100C: 0 to 10 V CH2 circulating fluid Analog temperature 0C to 100C: 0 to 10 V (1) Analog output signal 1 Output 1 CH2 electrical conductivity 0.1 to 50.0 S/cm: 0.02 to 10.0 V CH1 circulating fluid temperature 0C to 100C: 0 to 10 V Analog CH2 circulating fluid temperature 0C to 100C: 0 to 10 V (2

HRX-OM-W069

Indication Item Output Setting, selection and display CH1 circulating fluid discharge temperature 0C to 100C: 0 to 10.0 V CH2 circulating fluid Analog discharge temperature 0C to 100C: 0 to 10.0 V (1) Analog output signal 1 Output 1 CH2 circulating fluid electrical conductivity 0.1 to 50.0 S/cm: 0.02 to 10.0 V CH1 circulating fluid discharge temperature 0C to 100C: 0 to 10.0 V Analog CH2

2/3 Port Valve

H A H D N G, J S Q E P V M Y A H K K A H A H B J V M V M Y D, E N, P B J Fluid(Application) Standard A B C D E F NBR FPM Argon Argon(long life) Ethyl Alcohol Ethylene glycol Ozone(low concentration) Caustic soda B PTFE EPR Brass, Copper FPM EPR FPM NBR FPM EPR PTFE FPM FPM FPM EPR PTFE(FPM) PTFE(FPM) NBR FPM FPM FPM H Air(dry) Gas oil Silicon oil Fuel oil(Up to 60C) Fuel oil(Up to 100C