Vacuum

Workpiece: Generic term for the object which is to be adsorbedVacuum Pressure Equivalents Chart Unit Conversion Table -14.7 760 29.9 -101.3 -13.5 700 27.6 -93.3 1 1 _ 6 600 23.6 -80.0 -9.7 500 19.7 -66.7 400 15.8 -53.3 -5.8 300 1 1 . 8 -40.0 -3.9 200 7.9 -26.7 100 3.9 .

Table of Contents

of 500 mm/s, use graph (2).

Shock Absorbers and Rate Controls

500 I5,000 2.000.000 6.5 DA50r8 l .

V100

(Locking type is for VZ300/500 only.) Coil DC V100 Non-locking push type must be pressed in the direction of the arrow.

HRX-OM-M090

Fig 9.4-4 Cooling capacity(HRS018--20) 9.4.5 HRS024--20-(BJMT) 3500 3500 Ambient Ambient 3000 3000 temperature temperature or or Cooling capacity[W] Cooling capacity[W] 2500 2500 facility water facility water temperature temperature 2000 2000 25 32 40 25 32 40 1500 1500 1000 1000 500 500 0 0 0 10 20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature[] Circulating fluid temperature[]

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

100 to 500 200 to 600 Work load [kg]*1 Horizontal 12 25 30 20 45 50 25 55 65 Vertical 0.5 7.5 15 4 10 20 2 2 23 In-line Stroke range Up to 500 20 to 1100 12 to 750 6 to 400 24 to 1200 16 to 800 8 to 400 30 to 1200 20 to 850 10 to 300 Speed*1 [mm/s] 501 to 600 30 to 1200 20 to 850 10 to 300 Actuator specifications Parallel Stroke range Up to 500 20 to 900 12 to 600 6 to 300 24 to 800 16 to

Speed Controller with Indicator

AS301FS, AS311FS AS401FS, AS411FS Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 10, 11, 12 10, 11, 12 12, 13, 16 12, 13, 16 1500 1000 10, 11 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 08, 09 06, 07 1000 500 500 0 0 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Note) The numbers above the flow rate characteristic curves in the charts show the applicable tubing

SMC Basic Pneumatics

The cost of producing a volume flow of .| r3"hin is then ffififW = 40 cents / hr. In our example: 0.336 m3ry'min 1mg/min . 40 cents / hr = 13.4 cents per hour.

%silltr

The cost of producing a volume flow of .| r3"hin is then ffififW = 40 cents / hr. In our example: 0.336 m3ry'min 1mg/min . 40 cents / hr = 13.4 cents per hour.

Low torque Metal seal type Rotary joint

R3 3 (29) 32 ( 35) 29 5 37 (45) 5 MQR8-F MQR12-F 4-6 counter bore 5 4-3.2 through P.C.D.48 4-8 counter bore 5.5 4-4.5 through32 drill through 4-4.5 through 2-4.2 through 3 *at 2 points 27 drill through 45 25 R4 R4 45 3.5 (43) 41 5 (55) 7 45 ( 50) 46.5 4 Series MQR Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

AS-FP AS3201FG, AS3211FG AS3301FG, AS3311FG AS4201FG, AS4211FG AS4301FG, AS4311FG AS-FM Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 12, 13, 16 10, 11, 12 AS-D 1500 1000 10, 11 Flow rate L/min (ANR) Flow rate L/min (ANR) 08, 09 AS-T 06, 07 1000 ASP 500 ASN 500 AQ 0 0 5 0 10 5 0 10 ASV Number of needle rotations Number of needle rotations AK Note) The numbers above the flow rate characteristic

reduces flow setting time

AS-FG AS301FS, AS311FS AS401FS, AS411FS AS-FP Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa AS-FM 10, 11, 12 10, 11, 12 12, 13, 16 12, 13, 16 1500 1000 10, 11 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 08, 09 AS-D 06, 07 1000 AS-T 500 ASP 500 ASN 0 0 5 0 10 5 0 10 AQ Number of needle rotations Number of needle rotations ASV Note) The numbers above the flow rate characteristic curves

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

AS-FG AS-FG AS301FSG, AS311FSG AS401FSG, AS411FSG AS-FP Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa AS-FM 10, 11, 12 10, 11, 12 12, 13, 16 12, 13, 16 1500 1000 10, 11 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 08, 09 AS-D 06, 07 1000 AS-T 500 ASP 500 ASN 0 0 5 0 10 5 0 10 AQ Number of needle rotations Number of needle rotations ASV Note) The numbers above the flow rate characteristic

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

100 0 0 5 10 0 0 5 10 Number of needle rotations Number of needle rotations AS4201FSl, AS4211FSl AS3201FSl, AS3211FSl 12, 13, 16 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 10, 11, 12 1500 1000 08, 09 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 10, 11 06, 07 1000 500 500 0 0 5 10 0 0 5 10 Number of needle rotations Number of needle rotations Note) The numbers above the flow rate

Speed Controller with Uni One-touch Fitting AS Series Push-lock type

03, 04 100 200 01, 23 100 0 0 5 10 0 0 5 10 Number of needle rotations Number of needle rotations AS4201F, AS4211F AS4301F, AS4311F AS3201F, AS3211F AS3301F, AS3311F 10, 11, 12 12, 13, 16 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 1500 1000 08, 09 10, 11 Flow rate L/min (ANR) Flow rate L/min (ANR) 06, 07 1000 500 500 0 0 5 10 0 0 5 10 Number of needle rotations Number of needle rotations

3 Way,3 Port Solenoid Valve NVZ Series

N213 aOSilrtr 3 way.3 port sotenoid vatve NVZseies Rubber Seal Model 100/300/500 Low Power Consumption 1.8 WDC Compact Size, Large Flow Capacity Cv 0.05 0.5 High Speed Response Time -15 mSec (NVZ 100) Built-in One-Touch Fitting Manifolds Avaihbb Individual or Manifold Mounting Variat ions of C L Kl tmrn"..

NVZseies

N213 aOSilrtr 3 way.3 port sotenoid vatve NVZseies Rubber Seal Model 100/300/500 Low Power Consumption 1.8 WDC Compact Size, Large Flow Capacity Cv 0.05 0.5 High Speed Response Time -15 mSec (NVZ 100) Built-in One-Touch Fitting Manifolds Avaihbb Individual or Manifold Mounting Variat ions of C L Kl tmrn"..

INFORMATION Step Motor Controller 5 types of communication protocols New New

For single axis Actuator cable type/length Nil Without cable S1 Standard cable 1.5 m S3 Standard cable 3 m S5 Standard cable 5 m R1 Robotic cable 1.5 m R3 Robotic cable 3 m R5 Robotic cable 5 m R8 Robotic cable 8 m*1 Option Caution Nil Without option S With straight type DeviceNet communication plug for JXCD1 T With T-branch type DeviceNet communication plug for JXCD1 [CE-compliant products

Size: 40, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: B (Size 16: 5mm, Size 25: 6mm, Size 32/40: 8mm), Stroke: 150mm, Motor Option: None, Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: R (Robotic Flexible Cable), Actuator Cable Length: 3 (3m)

Size: 40, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: B (Size 16: 5mm, Size 25: 6mm, Size 32/40: 8mm), Stroke: 300mm, Motor Option: W (with Lock/Motor Cover), Rod End Thread: Female, Mounting: L (Foot), Actuator Cable: R (Robotic Flexible Cable), Actuator Cable Length: 3 (3m)