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A Controller type Motor type Power supply voltage Symbol Type AC servo motor (S2) Capacity Encoder LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSA2-S4 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 LECSB2-S8 AC servo motor (S2) 100 to 120 VAC 50/60 Hz S1 S3 S4 S5 S7 S8 100 W B Pulse input type (For absolute encoder) AC servo motor (S3) Pulse input type (For incremental encoder) Incremental AC servo

High Vacuum Angle Valve

Model XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 Rated voltage for heater 90 to 240 VAC Heater assembly quantity 1 1 1 1 H4 100C 100 V 200/40 200/50 400/100 600/150 Heater assembly quantity used Heater power W (Nominal value) Inrush/Power consumption (Option symbol, Operating voltage) 200 V 800/40 800/50 1600/100 2400/150 Heater assembly quantity 1 1 1 1 2 H5 120C 100 V 200/40 400/70 400/

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Applicable strokes: 150, 250, 350, 450, 550, 650, 750, 850, 950, 1050 Example) LG1H2121SC-150-F2-X2 Allowable Moment (Nm) Allowable dynamic moment Allowable static moment LG1H21 Model Mounting orientation Load movement direction Pitching Rolling Yawing 142 79 150 a = 1000 Horizontal/Lateral Horizontal/Lateral Lateral Horizontal a 4000 a = 2000 L1 (mm) Pitching Mep m : Transfer load (kg) a

Stability of suction position,

Flat type with groove (UM) Bellows type with groove (BM) 32 40 50 63 80 100 125 32 40 50 63 80 100 125 ZP3EA-S1 V V V V V V ZP3EA-S2 V V V V V V V V w Holder Form/Diameter Part no.

ITV

(Error number 5) Blue S1 White Vs Black S2 Set Pressure Range Vs: Power supply 24 VDC 12 to 15 VDC The regulating pressure range, by unit of standard measured pressure, is shown in the table below. One of the preset pressures P1 through P4 is selected by the ON/OFF combination of S1 and S2.

Proposals for Energy Saving

/KNL (mm) Model Nozzle size D Outside diameter L1 1.5 2 2 2.5 2.5 3 1.5 2 2 2.5 2.5 3 6 6 8 8 10 10 6 6 8 8 10 10 300 300 300 300 300 300 600 600 600 600 600 600 KNL3-06-150 KNL3-06-200 KNL3-08-200 KNL3-08-250 KNL3-10-250 KNL3-10-300 KNL6-06-150 KNL6-06-200 KNL6-08-200 KNL6-08-250 KNL6-10-250 KNL6-10-300 O.D.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Relative: 150 Numerical data defining operation The operation starts by changing the Movement MOD and Position in step data No.1 temporarily by defining numerical data from the PLC. 160 Operation t [Define numerical data in the Movement MOD and Position in Step No.1.] Movement MOD: 2 (Relative) and Position: 150 are defined from the PLC.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

203 30 47 90 150 11-2-7 7 Series CRB2 Rotary Actuator: Replaceable Shaft A shaft can be replaced with a different shaft type except for standard shaft type (W).

CRB2/CRBU2/CRB1

203 150 90 47 30 3 Series CRB2 A shaft can be replaced with a different shaft type except for standard shaft type (W).

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203 150 90 47 30 11-2-7 7 Series CRB2 Rotary Actuator: Replaceable Shaft A shaft can be replaced with a different shaft type except for standard shaft type (W).

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

203 150 90 47 30 11-2-7 7 Series CRB2 Rotary Actuator: Replaceable Shaft A shaft can be replaced with a different shaft type except for standard shaft type (W).

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

CDRBU2W10, 15-S CDRBU2W20, 30-S CRB2 CRBU2 CRB1 2 x S2 2 x S1 2 x S1 MSU 2 x S2 CRJ Rotary actuator CRA1 CRQ2 2 x S1 2 x S1 2 x S1 2 x S1 Rotary actuator MSQ (34.5: Connector type) MSZ A port B port CRQ2X MSQX 2 x R A port B port 2 x R MRQ 1 Auto switch Auto switch 2 5 20.5 (26.5: Connector type) 1.

Air-hydro Unit

W QL S QB NL P 50 100 200 300 400 600 700 800 500 CC63-S1-G CC100-S1-G CC100-L1-G CC160-L1-G CC63-S1-G CC100-1-G CC160-L1-G 11 9.5 30 0 3 86 62.5 28 228.5 278.5 378.5 503.5 603.5 728.5 13 7 2 5 120 32 82.5 33 286 386 511 611 736 836 7 2 13 120 32 33 5 92 399 524 624 1049 949 749 849 Hexagon socket head cap screw is used for mounting hole. 7 0 185 46 2.5 20 120 29 D-X Technical Data

Digital Gap Checker

mm 0.3 mm 0.03 mm 0.30 0.03 0.15 0.20 0.02 0.10 0.01 mm 0.10 0.01 0.05 0.05 mm 0.02 mm 0 0 0 Supply pressure [kPa] 75 100 125 150 175 200 225 Supply pressure [kPa] 75 100 125 150 175 200 225 Supply pressure [kPa] 75 100 125 150 175 200 225 Piping length: 5 m Piping length: 5 m Piping length: 5 m Reference pressure 0.06 Reference pressure 0.30 Reference pressure 0.60 The distance of switch

Electric Actuator with Integrated Guide

OFF SUP 1MC 5Ry SGDE servomotor Motor 1MC 1 R U V SGDE servo pack 2 1MC M T 3 W 1CN 4 150 PULS PULS SIGN SIGN CLR CLR 1 2 3 4 5 6 Be sure to ground.

CATALOG

15 75, 100, 125, 150 20 125, 150, 175, 200 25 125, 150, 175, 200 32 125, 150, 175, 200 Courtesy of Steven Engineering, Inc. !

CC

stroke W S QL QB P NL 800 700 600 500 400 300 200 100 50 -X CC63-S1-G CC100-S1-G CC100-L1-G CC160-L1-G CC63-S1-G CC100-1-G CC160-L1-G 9.5 11 0 30 86 3 28 62.5 728.5 603.5 503.5 378.5 278.5 228.5 7 13 2 32 120 5 33 82.5 611 511 386 286 836 736 207 13 2 32 120 5 33 92 624 524 399 949 849 749 1049 Hexagon socket head cap screw is used for mounting hole. 7 20 2.5 46 185 0 29 120 Data 10-17

15

Model LEY25 (Top/Parallel) LEY25D (In-line) LEY32 (Top/Parallel) LEY32D (In-line) Stroke [mm] Note 1) 30, 50, 100, 150, 200, 250 300, 350, 400 30, 50, 100, 150, 200, 250 300, 350, 400, 450, 500 30, 50, 100, 150, 200, 250 300, 350, 400, 450, 500 LEF Note 2) Horizontal 18 50 50 30 60 60 30 60 60 Vertical 8 16 30 9 19 37 12 24 46 Work load [kg] LEJ Force [N] Note 3) (Set value: Rated torque

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Weight Product Weight: Top Mounting Type [kg] Series LEYG25M LEYG32M Stroke [mm] 30 50 100 150 200 250 300 30 50 100 150 200 250 300 Weight [kg] 1.7 1.9 2.2 2.6 3.0 3.3 3.6 3.1 3.4 4.0 4.7 5.3 5.7 6.2 Series LEYG25L LEYG32L Stroke [mm] 30 50 100 150 200 250 300 30 50 100 150 200 250 300 Weight [kg] 1.7 1.9 2.2 2.6 2.9 3.2 3.4 3.1 3.4 3.8 4.5 5.0 5.5 5.9 Product Weight: In-line Motor Type

3 Port Solenoid Valve/

Pilot Nil Internal pilot R External pilot Voltage Safety limit switch/Wiring 5 24 VDC Nil G1/2 (Made by OMRON) M M12 connector (Made by OMRON) Electrical entry S1 M12 connector (Made by Rockwell Automation) D DIN terminal Y DIN (EN175301-803) terminal Refer to page 18 for details about type Y. With check valve (Only external pilot) Check valve Applicable tube O.D.