Type: Fitting Body, Material: PFA, Connection Type: Pipe⇔Pipe, different diameters connection, Pipe-to-Pipe Unequal Diameter Connection Type: Reducing Union Tee, Applicable Tube Outer Dia. (in) D (D1): 1/2, Applicable Tube Outer Dia. (in) D2: 3/4, Applicable Tube Outer Dia. (in) D3: 1/2, Maximum Operating Temperature(°C): 200, Packing: Clean Packaging Class M3.5 Equivalent, Nut Material:

Type: Fitting Body, Material: PFA, Connection Type: Pipe⇔Pipe, different diameters connection, Pipe-to-Pipe Unequal Diameter Connection Type: Reducing Union Tee, Applicable Tube Outer Dia. (in) D (D1): 3/4, Applicable Tube Outer Dia. (in) D2: -, Applicable Tube Outer Dia. (in) D3: 3/4, Maximum Operating Temperature(°C): 200, Packing: Clean Packaging Class M3.5 Equivalent, Nut Material: PFA

Type: E (Union Elbow), Size Combinations: 2A (1/4" x 5/32")

Fitting Type: E (Union Elbow), Size Combination-A Side: 2A (Applicable Tubing Size 1/4" x 5/32"), Different Diameter-B Side: Same Diameter (B Side), Packaging: 1 (Standard Packaging Equivalent to Class M5.5)

Type: Union Elbow, Size Combinations: 1/4" x 5/32", Fitting Type: -

Fitting Type: Union Elbow, Size Combination-A Side: Applicable Tubing Size 1/4" x 5/32", Different Diameter-B Side: Same Diameter (B Side), Packaging: Standard Packaging Equivalent to Class M5.5

Size Combinations: 2A-T-R8 (A: 1/4"; B: 3/8" x 1/4")

Size Combinations: A: 1/4"; B: 3/8" x 1/4"

Series AP500

Body Poppet 316L SS Diaphragm 316L SS Nozzle Code S SHP SH 316L SS secondary remelt 316L SS Seat material Hastelloy C-22 Hastelloy C-22 Code Material PCTFE (Standard) PTFE 3) Hastelloy C-22 Hastelloy C-22 No code TF H 3) PTFE recommended for applications such as within a process tool.

AZ1000

Material Code Body Poppet 316L SS Diaphragm 316L SS Nozzle Seat material S Material PCTFE (Standard) PTFE 3) Code 316L SS 316L SS Hastelloy C-22 Hastelloy C-22 No code TF SHP 3) PTFE recommended for applications such as within a process tool.

Table of Contents

NE CX RR2 SS H PP2 QQ PP1 QQ Back port NH NC (Refer to P. 8-12-3.)

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

LEC LEC S LEC SS-T LEC Y LEC Y Motorless Component Parts No. Description Material Note No.

15

LEC SS-T 12. When mounting the actuator using the body mounting reference plane, use a pin. Set the height of the pin to be 5 mm or more because of round chamfering.

Table of Contents

Order the seal kit, based on each bore size. 8-29-20 21 Dual Rod Cylinder: With End Lock For Retracting Side Series CXS Dimensions: 6, 10, 15 CXS6-R ZZ SS MX MTS 3 3 MY Manual lever insertion CY (mm) 1.7 ZZ SS Model CXS6-10R CXS6-20R CXS6-30R CXS6-40R CXS6-50R MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local

JIS Standard Hydraulic Cylinder

NB B SS + Q + l S + Stroke FX M H ZZ + Stroke ZZ + Q + l + Stroke FZ (mm) With rod boot Stroke range (mm) Bore size (mm) l e J B BB C F GA GB M NA NB P R S FD FT FX FY FZ SS f Q B-rod C-rod B-rod C-rod 32 27 15 M10 x 1.25 25 to 1400 58 16 21 15 11 37 31 3/8 39 130 11 11 88 40 109 30 62 38 52 40 23 15 M10 x 1.25 25 to 1400 65 12 21 15 11 36 30 3/8 42 130 11 11 95 46 118 30 69 45 52 52 1

Series AK1000

Code Connections NPT 1/4 inch 1/4 inch compression 3/8 inch compression Material 4 4T 6T Code Body Brass Poppet Diaphragm Seat material B S SH Code Material PCTFE (Standard) Vespel 3) PEEK 316 SS 316 SS No code VS PK 316 SS Hastelloy C-22 Hastelloy C-22 Ports 3) Not available with SH material.

SL5200

Hastelloy C-22 Diaphragm S SH 316L SS secondary remelt 316L SS 4) Not available with SH material.

Hydraulic

NB B SS+ Q + l + Stroke S + Stroke FX M H ZZ + Stroke ZZ + Q + l + Stroke FZ (mm) With rod boot Stroke range (mm) Bore size (mm) l e J B BB C F GA GB M NA NB P R S FD FT FX FY FZ SS f Q B-rod C-rod B-rod C-rod M10 x 1.25 32 58 62 38 16 21 15 11 37 31 3/8 39 130 11 11 88 40 109 30 21.5 15 52 25 to 1400 M10 x 1.25 40 65 69 45 12 21 15 11 36 30 3/8 42 130 11 11 95 46 118 30 12 15 52 52 25

MY1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com PD (Hexagon socket head plug) YH QQ PP QQ RR SS RR SS H NH NE NC PP TT TT GA GA UU UU Cushion needle M5 x 0.8 (Port) 2-M5 x 0.8 G G 2-M5 x 0.8 (Hexagon socket head plug) (Hexagon socket head plug) GB M5 x 0.8 (Hexagon socket head plug) N A Z + Stroke

MY1

PP 7.5 11.5 V V 10 12.5 QQ 9 11 XX 22 24 TT 9 10.5 RR 11 14.5 UU 10.5 12 SS 3 5 Model MY1H16G MY1H20G "P" indicates cylinder supply ports.