AZ1000

Material Code Body Poppet 316L SS Diaphragm 316L SS Nozzle Seat material S Material PCTFE (Standard) PTFE 3) Code 316L SS 316L SS Hastelloy C-22 Hastelloy C-22 No code TF SHP 3) PTFE recommended for applications such as within a process tool.

Table of Contents

NE CX RR2 SS H PP2 QQ PP1 QQ Back port NH NC (Refer to P. 8-12-3.)

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

LEC LEC S LEC SS-T LEC Y LEC Y Motorless Component Parts No. Description Material Note No.

15

LEC SS-T 12. When mounting the actuator using the body mounting reference plane, use a pin. Set the height of the pin to be 5 mm or more because of round chamfering.

Table of Contents

Order the seal kit, based on each bore size. 8-29-20 21 Dual Rod Cylinder: With End Lock For Retracting Side Series CXS Dimensions: 6, 10, 15 CXS6-R ZZ SS MX MTS 3 3 MY Manual lever insertion CY (mm) 1.7 ZZ SS Model CXS6-10R CXS6-20R CXS6-30R CXS6-40R CXS6-50R MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local

JIS Standard Hydraulic Cylinder

NB B SS + Q + l S + Stroke FX M H ZZ + Stroke ZZ + Q + l + Stroke FZ (mm) With rod boot Stroke range (mm) Bore size (mm) l e J B BB C F GA GB M NA NB P R S FD FT FX FY FZ SS f Q B-rod C-rod B-rod C-rod 32 27 15 M10 x 1.25 25 to 1400 58 16 21 15 11 37 31 3/8 39 130 11 11 88 40 109 30 62 38 52 40 23 15 M10 x 1.25 25 to 1400 65 12 21 15 11 36 30 3/8 42 130 11 11 95 46 118 30 69 45 52 52 1

Series AK1000

Code Connections NPT 1/4 inch 1/4 inch compression 3/8 inch compression Material 4 4T 6T Code Body Brass Poppet Diaphragm Seat material B S SH Code Material PCTFE (Standard) Vespel 3) PEEK 316 SS 316 SS No code VS PK 316 SS Hastelloy C-22 Hastelloy C-22 Ports 3) Not available with SH material.

SL5200

Hastelloy C-22 Diaphragm S SH 316L SS secondary remelt 316L SS 4) Not available with SH material.

Hydraulic

NB B SS+ Q + l + Stroke S + Stroke FX M H ZZ + Stroke ZZ + Q + l + Stroke FZ (mm) With rod boot Stroke range (mm) Bore size (mm) l e J B BB C F GA GB M NA NB P R S FD FT FX FY FZ SS f Q B-rod C-rod B-rod C-rod M10 x 1.25 32 58 62 38 16 21 15 11 37 31 3/8 39 130 11 11 88 40 109 30 21.5 15 52 25 to 1400 M10 x 1.25 40 65 69 45 12 21 15 11 36 30 3/8 42 130 11 11 95 46 118 30 12 15 52 52 25

MY1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com PD (Hexagon socket head plug) YH QQ PP QQ RR SS RR SS H NH NE NC PP TT TT GA GA UU UU Cushion needle M5 x 0.8 (Port) 2-M5 x 0.8 G G 2-M5 x 0.8 (Hexagon socket head plug) (Hexagon socket head plug) GB M5 x 0.8 (Hexagon socket head plug) N A Z + Stroke

MY1

PP 7.5 11.5 V V 10 12.5 QQ 9 11 XX 22 24 TT 9 10.5 RR 11 14.5 UU 10.5 12 SS 3 5 Model MY1H16G MY1H20G "P" indicates cylinder supply ports.

CXS

CXS -R 10 15 ZZ SS Z (Z) Manual lever insertion 1.7 Dual-Double-Rod Type CXSW K KK Hexagon (O) (Z) (mm) O K Width across flats 12 Model CXS10-R 6.5 8.5 Width across flats 13 CXS15-R (mm) Symbol ZZ Z SS KK 50 Stroke 10 20 50 40 30 10 20 30 40 50 10 50 40 30 20 10 20 30 40 Model 19.5 80 90 100 115 125 30 97 107 117 132 142 24.5 40 50 CXS10-R 20.5 90 100 110 120 130 35 109 119 129 139 149 45

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

B SS + Q + l + Stroke S + Stroke FX H M ZZ + Stroke ZZ + Q + l + Stroke FZ (mm) With rod boot Bore size (mm) Stroke range (mm) l J B BB C F GA GB M NA NB P R S FD FT FX FY FZ SS e f Q 32 M10 x 1.25 58 62 38 16 21 15 11 37 31 3/8 39 130 11 11 88 40 109 30 52 21.5 15 25 to 1400 1/3.5 stroke 40 M10 x 1.25 65 69 45 12 21 15 11 36 30 3/8 42 130 11 11 95 46 118 30 52 12 15 25 to 1400 50 M10 x

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

Order the seal kit, based on each bore size. 8-29-20 21 Dual Rod Cylinder: With End Lock For Retracting Side Series CXS Dimensions: 6, 10, 15 CXS6-R ZZ SS MX MTS 3 3 MY Manual lever insertion CY (mm) 1.7 ZZ SS Model CXS6-10R CXS6-20R CXS6-30R CXS6-40R CXS6-50R MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local

Series AP3500

(P.124) Wetted Parts Material S H Wetted Parts Body Surface finish Spring Diaphragm Poppet Seat Hastelloy C-22 Electropolish Inconel 600 316L SS secondary remelt Electropolish + Passivation 316L SS Elgiloy Hastelloy C-22 PCTFE 316L SS PCTFE (Option: Vespel) 106 Diaphragm Valve for Ultra High Purity Air operated type (For high pressure and high flow) Series AP3130 & 3113 AZ AK KT BP Diaphragm

KT10

Changes from the standard type are: KT10F KT10H KT10R KT10J KT10L KT10N KT10P Option Other Parameters HF Source pressure Cv 6000 psig (41.4 MPa) 0.12 Wetted Parts Material S B 316 SS 316 SS Brass Bronze 300 SS series Vespel (Option: PEEK) PCTFE Viton (Option: Polyurethane, Buna-N, Ethylene propylene) PTFE C 300 SS series 316 SS Wetted Parts Body Inlet filter Piston and trim Seat, main valve

Environment

LEC LEC S LEC SS-T * Specifications and dimensions for the 25A-series are the same as standard products.

Compact

LEC SS-T The stroke adjustment unit is built into the product.

ISO Standard Hydraulic Cylinder

CHSD40-PS CHSD50-PS CHSD63-PS CHSD80-PS CHSD100-PS Seal kit consists of items @1 to @5 and @9, and can be ordered by using the seal kit number for each bore size. 335 CHSD Series Dimensions Basic: CHSDB Z + Stroke PJ + Stroke Y GB GA J MM 2 x RcP V V D E MA K F G NA Cushion valve M B C A SS NB Air release S + Stroke H ZZ + Stroke Stroke range Bore size (mm) MM A B MA V C D PJ F G NB SS GA

BP1000

Materials [316 SS] An austenitic stainless steel with a higher nickel content to improve its corrosion resistance. [316L SS] A low-carbon form of 316 SS which has better intergranular corrosion resistance than 316 SS. 143 Technical Data/Glossary of Terms [Compression fitting] A self aligning tube fitting that uses a ferrule to compress on the tubing effecting a seal when the nut is tightened