SMC high purity HYPER FITTING series LQ* responds to the latest demands in process control. From parts cleaning to assembly and packaging, all processes are controlled for cleanliness, and the use of new PFA virtually eliminates particle generation and TOC (total organic carbon) allowing confident use for the most demanding applications. If chemistries or flow requirements are changed during

SMC high purity HYPER FITTING series LQ* responds to the latest demands in process control. From parts cleaning to assembly and packaging, all processes are controlled for cleanliness, and the use of new PFA virtually eliminates particle generation and TOC (total organic carbon) allowing confident use for the most demanding applications. If chemistries or flow requirements are changed during

SMC high purity HYPER FITTING series LQ* responds to the latest demands in process control. From parts cleaning to assembly and packaging, all processes are controlled for cleanliness, and the use of new PFA virtually eliminates particle generation and TOC (total organic carbon) allowing confident use for the most demanding applications. If chemistries or flow requirements are changed during

CATALOG

1 1 1/2 7 5/8 1.57 1 3/8 2.72 7 3/8 325 (3.25) 1 1/4 1 1/8 1 15/16 1 1/2 3/4-16 1/2 11/64 1/2 3/4 1.18 3 13/16 2 3/4 1/2 7/8 5/8 6 7/8 3/8-24 4 1/2 2.34 4 1/4 4.7 0 1 1 1/2 7 5/8 1.57 2.72 1 3/8 7 3/8 400 (4) 3/4-16 1 1/8 2 1/4 1 1/4 1 1/2 1/2 15/64 1/2 3/4 1.18 4 1/2 3 1/2 1/2 7/8 5/8 6 7/8 D I M E N S I O N S F R O N T F L A N G E T Y P E NC A1F + = Stroke addition EA F FB TF W Y P BORE

1

SY53 0 1-1--W-V02 (Top ported) Plug F (Max. 3) For "F" marking (Thread type) 26.8 14.5 4A X 2B PE F B A A 4 B 2 3EB 1P 5EA 1/8 (For threaded type) [4(A), 2(B) port] (16.2) (For threaded type) 25.9 One-touch fitting [4(A), 2(B) port] (For threaded type) Applicable tube O.D.: 4, 5/32" 6, 1/4" 8, 5/16" (For 01 threaded type) (76.7) (62.3) INDEX Note 2) These figures show the SY5230-

2

F F E E B C Cross spacer E D A F: Without pipe thread Model Note) E (Port size) A B C D Applicable model Y14-M5-A M5 x 0.8 23 16 14 25 AC10l-A Y24-l01-A 1/8 40 40 22 40 AC20l-A Y24-l02-A 1/4 Y34-l01-A 1/8 49 43 28 48 AC25l-A, AC30l-A Y34-l02-A 1/4 Y44-l02-A 1/4 60 48 36 54 AC40l-A Y44-l03-A 3/8 Y54-l03-A 3/8 72 62 40 62 AC40l-06-A Y54-l04-A 1/2 Caution on Mounting 1.

A

1 1 1/2 7 5/8 1.57 2.72 1 3/8 7 3/8 400 (4) 3/4-16 1 1/8 2 1/4 1 1/4 1 1/2 1/2 15/64 1/2 3/4 1.18 4 1/2 3 1/2 1/2 7/8 5/8 6 7/8 D I M E N S I O N S F R O N T F L A N G E T Y P E NC A1F + = Stroke addition EA F FB TF W Y P BORE (INCH) KK A AA B BA C D DD E EE G J R WF LF ZB MM UF 0.3 2 3/4 1.71 2.36 150 (1.5) 7/16-20 3/4 2.02 1 1/8 1 1/8 3/8 1/4-28 2 1.26 1.1 1.43 1 3 5/8 4 3/4 5/8 3 3/8

Electric Actuators

Mount Specification X60 Stroke 2 H 1 F P K 2 LJ1H10 Vertical Mount Specification Refer to Table below.

Table of Contents

44 52 1 2 5 34 Section F detail (Scale: 2/1) 120 90 4-M6 x 1 Section C 30 D Refer to page 300 for mounting.

ZP

E F Flat Flat with ribs H: M5 x 0.8 H: M6 x 1 Y H: M6 x 1 H: M8 x 1 Y Model A B C F G C F G Flat Flat with ribs D E Model A ZPT10 U C ZPT13 U C ZPT16 U C U C U C 10 12 1.7 ZPT40 40 43 6.5 15 4.5 40.5 18.5 24.5 50.5 3.3 17 38 43 3 12 3.8 25 3 41.5 25 13 15 20 1.8 ZPT50 50 53 7.5 19.5 25.5 51.5 12.5 16 18 17.5 38.5 43.5 3.5 1.2 Deep Deep H: M6 x 1 H: M8 x 1 Y B C F G C F G D E Model A H: M5

High Purity Fluoropolymer

E W Y H M L 11.5 18.5 LQ1H1A-F LQ1H2A-F LQ1H2B-F LQ1H2C-F LQ1H2D-F LQ1H2E-F LQ1H2F-F LQ1H3A-F LQ1H3B-F LQ1H3C-F LQ1H3D-F LQ1H4A-F LQ1H4B-F LQ1H4C-F LQ1H4D-F LQ1H5A-F LQ1H5B-F LQ1H5C-F LQ1H5D-F LQ1H6A-F LQ1H6B-F LQ1H6C-F LQ1H6D-F 1/8" 1/4" 3/16" 1/8" 1/4" 3/16" 1/8" 3/8" 1/4" 3/8" 1/4" 1/2" 3/8" 1/2" 3/8" 3/4" 1/2" 3/4" 1/2" 1" 3/4" 1" 3/4" 10 10 1/8" 26.5 18.5 1/8" 35 16.5 14 15 14 21.5

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

H L M E W Y LQ 11.5 18.5 LQ1H1A-F LQ1H2A-F LQ1H2B-F LQ1H2C-F LQ1H2D-F LQ1H2E-F LQ1H2F-F LQ1H3A-F LQ1H3B-F LQ1H3C-F LQ1H3D-F LQ1H4A-F LQ1H4B-F LQ1H4C-F LQ1H4D-F LQ1H5A-F LQ1H5B-F LQ1H5C-F LQ1H5D-F LQ1H6A-F LQ1H6B-F LQ1H6C-F LQ1H6D-F 1/8" 1/4" 3/16" 1/8" 1/4" 3/16" 1/8" 3/8" 1/4" 3/8" 1/4" 1/2" 3/8" 1/2" 3/8" 3/4" 1/2" 3/4" 1/2" 1" 3/4" 1" 3/4" 10 1/8" 10 26.5 LVN 18.5 1/8" 35 TI/ TIL 16.5

ZP

M6 x 1 A8 M8 x 1 G J J 04 4 06 6 08 8 Model A B C D 2 E F G H J K L M Vacuum inlet direction q Pad dia.

Table of Contents

E F Flat Flat with ribs H: M5 x 0.8 H: M6 x 1 Y H: M6 x 1 H: M8 x 1 Y Model A B C F G C F G Flat Flat with ribs D E Model A ZPT10 U C ZPT13 U C ZPT16 U C U C U C 10 12 1.7 ZPT40 6.5 15 4.5 40.5 40 43 18.5 24.5 50.5 3.3 17 38 43 3 12 3.8 25 3 41.5 25 13 15 20 1.8 ZPT50 7.5 50 53 19.5 25.5 51.5 16 18 12.5 17.5 38.5 43.5 3.5 1.2 Deep Deep H: M6 x 1 H: M8 x 1 Y B C F G C F G D E Model A H: M5

V

Exhaust) 1 Plug in unit T Y P E O F M A N I F O L D N U M B E R O F S TAT I O N S 01 1 Station 16 16 Stations N o t e 1 ) When more than one option is desired Combined symbols in alphabetical order.

Table of Contents

Plug-in type, conduit terminal Thread type Port size (P, A, B, EA, EB port) Porting specifications (P, A, EA, EB port) Nil F Rc G N NPT T NPTF Nil 02 Without sub-plate 1 4 3 8 Nil B Side ported 03 Bottom ported For bottom ported: Rc 1/4 Option 1 02 F Plug-in VFR3 5 0 0 D Non plug-in VFR3 02 1 1 Common electrical entry 1 1 G Non plug-in VFR3 02 1 1 4 0 Individual electrical entry Courtesy

Table of Contents

Mounting style B L F 12 mm equivalent S 1 pc.

Table of Contents

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

ZP

58.1 84 74 4.5 2.3 Deep Deep Model A B C D E F Y G H G H I: M6 x 1 I: M8 x 1 Model A B C D E F Y G H G H I: M6 x 1 I: M8 x 1 ZPR40D 40 43 29 42.5 53.3 71.1 97 25 15 87 17 ZPR25D 25 28 20 35 48.5 63.6 89.5 25 15 79.5 10 Applicable Tubing Applicable Tubing Applicable tubing O.D.

ZP

1 H: M8 x 1 U4 (Soft tube 4/2.5) Model A B C D E Y F G F G 14.5 5 1.8 H: M5 x 0.8 H: M6 x 1 Model A B C D E Y F G F G 40 43 29 39 57 83 25 15 73 17 ZPY40D U6 (Soft tube 6/4) 16.5 7 2.5 10 12 15 25 41 62 20 25 67 6 ZPY10D 16 18 16 26 42 63 68 7 ZPY16D 13-11-46 Series ZPY Vacuum Pad: Lateral Vacuum Entry with Barb Fitting without Buffer Connection Barb Fitting Bellows Pad Form Lateral Male