XM, XY

Valve side exhaust 493 XMH, XYH Series Dimensions XMH/Angle type C D L2 (KF flange) Fn Fc C (Fc) L1 (CF flange) H J B G A A (mm) Model A 100.5 114 162.5 179.5 B 38 48 66 79 C 1 1 2 2 D 30 40 55 75 Fn 34 70 Fc 17 26 41 52 G 35 40.5 57 70 H 18 21.5 30 35 J P.C.D L1 6 x 4.4 6 x 6.6 L2 XMH-16 XMH-25 XMH-40 XMH-50 40 50 65 70 P.C.D 27 P.C.D 58.7 XYH/In-line type D C G C H B J E A Fn (KF

Magnetically Coupled Rodless Cylinder

from cylinder shaft center Lo (cm) 3 Model Selection Method Series CY3B/CY3R Precautions on Design q CY3R15 CY3R32 400 300 200 Allowable driving force Fn (N) Allowable driving force Fn (N) Allowable driving force Fn (N) 50 100 40 30 20 20 30 40 50 Useable range 10 10 Useable range 5 5 1 0 1 2 3 4 5 6 1 0 1 2 3 4

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

from cylinder shaft center Lo (cm) 3 Model Selection Method Series CY3B/CY3R Precautions on Design q CY3R15 CY3R32 400 300 200 Allowable driving force Fn (N) Allowable driving force Fn (N) Allowable driving force Fn (N) 50 100 40 30 20 20 30 40 50 Useable range 10 10 Useable range 5 5 1 0 1 2 3 4 5 6 1 0 1 2 3 4

Aluminum High Vacuum Angle Valve

No. 1 2 2-1 3 4 5 6 7 8 8-1 8-2 9 10 O-ring Part No.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Body (Material: SCS13) Refer to the page 22 for the maintenance parts. 2 Series XMA, XYA Stainless steel High Vacuum Angle/In-line Valve Dimensions XMA/Angle type C D L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) H B G A A (mm) Model A 103 113 158 170 196 235 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn 95 110 Fd 34 70 114 Fc 17 26 41 52 70 83 G 40 39 63 68

High Vacuum Angle Valve

Heater: Indicator: 12 XLF/XLFV Series Dimensions XLF: Air operated (b) C E E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) [mm] Model A B C D E*1 Fn Fd G H XLF-16-2 40 108 38 20 30 17 44 XLF-25-2 50 121 48 27 12 40 26 44 XLF-40-2 65 171 66 39 11 55 41 67 XLF-50-2 70 185 79 46 11 75 52 72 XLF-63-2 88 212 100 55 11 87 95 70 76 XLF-80-2 90 257 117 65 11

XL

Valve side exhaust 18 High Vacuum Angle Valve Series XLG, XLGV Dimensions Dimensions (mm) 1in=25.4mm (b) XLG/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) G H J B Heater (optional) A A (mm) (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 B 110 120 171 183 209 250 A 40 50 65 70 88 90 A B C D Fn Fd G H 40 Note 1) E J E Note 1)

High Vacuum Angle Valve, XL Series

Valve side exhaust 18 High Vacuum Angle Valve Series XLG, XLGV Dimensions Dimensions (mm) 1in=25.4mm (b) XLG/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) G H J B Heater (optional) A A (mm) (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 B 110 120 171 183 209 250 A 40 50 65 70 88 90 A B C D Fn Fd G H 40 Note 1) E J E Note 1)

Industrial Filters

2) 2 Note 2) 2 Note 2) Number of elements 1 1 1 1 FGE 65 x L500 (L250 x 2) 65 x L500 (L250 x 2) 65 x L500 (L250 x 2) 65 x L500 (L250 x 2) Element size 65 x L250 65 x L250 65 x L250 65 x L250 Cover SCS14 Aluminum FGG Case Stainless steel 316 SPCE Main materials Gasket/O-ring Fluororesin NBR FGA Seal Nylon/Fluororesin Nylon Fluororesin FGC Weight (kg) 1.3 2.2 2.3 3.8 2.3 3.8 1.3 2.2 1.7 3.4

Sine Rodless Cylinder Series REA

range Usable range Usable range 10 10 10 5 5 5 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 1 0 1 2 3 4 5 6 8 9 10 11 13 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 7 12 Distance from cylinder shaft center: L0 (cm) Distance from cylinder shaft center: L0 (cm) Distance from cylinder shaft center: L0 (cm) 50 63 1000 1000 Recommended driving force: Fn(N) Recommended driving force: Fn(N) 500 400 500

Bag Filter

FGF FGF FGH Choose the vessel type and number of units. 2 elements FGF1-20 2 units FGF1-20 1 unit FGF1-20 2 units FGF1-20 3 units w Vessel type and number of units FQ1 or Choose a vessel that satisfies the number of elements obtained in step q.

Sine Rodless Cylinder Series REBR Direct Mount Type

2 !1 w #3 !6 @4 @5 @2 @1 r #0 #4 #2 o !5 @8 @3 REBHT32 @6 Parts list Parts list No. Description Material Note No.

99

m 4 m 6 m 13 m Filtration efficiency 99% FQ1 HEPO 2 FGH100 to 300 FN The membrane element cannot be selected for FGH100.

EXxx-OMZ0016

Orange Flashing (1 Hz) Fn (pairing button) in use (1) Check the registration status of the Remote and perform pairing correctly. (1) Base not registered (2) The US1 (for control / input) power supply is OFF OFF (2) Supply 24 VDC +/-10% for US1 (for control / input) power source. -69No.EX-OMZ0016-C Problem No.

XL-OMV0002

3-2.

2

(See Fig. 2.)

High Vacuum L Type Valve

) 2 5 Body (Material: A6063) Valve (Material: SUS304) 6 Valve seal 2 (Maintenance part) 3 (Valve seal 2) Nut assembly (Maintenance part) (Set of a nut and a washer) 9 Washer (Material: SUS304 or equivalent) Nut (Material: SUS304 or equivalent) (Shaft) 11 XL-OMS0001-B 5-2.Dimensions C E C E E (KF flange) Fd (K flange) Fn D H B A G A Unit: mm Model A B C D E Fn Fd G H XLA-16-2 40 108 38 20

XL-OMY0001

100V PTC 0 5 10 15 20 25 30 ( 30 10 XL-OMY0001 5 5-1 1 , SUS304 8 4 SUS304 10 , SUS316L 7 5 A6063 2 1 6 SUS304 3 2 9 2 SUS304 SUS304 11 XL-OMY0001 5-2 C E E E KF K Fd Fn C D H B A G A mm A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55

XL-OMY0002

R Chemraz VALQUA.CO.JP R ULTIC ARMOR 25 40 50 63 80 100 160 H4100 XLA25-60S-1 XLA25-60S-1 XLA25-60S-2 XLA25-60S-3 XLA25-60S-2 XLA25-60S-2 (2 ) (3 H5120 XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 XLA25-60S-3 XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 2 3 4 XLD-80H5 2 XLA25-60S-2 8 XL-OMY0002 4. 4-1 XLD-25 XLD-40 XLD-50 XLD-63 XLD-80 XLD-100 XLD-160 25 40 50 63 80 100 160 [] 5605150 -6 Pa abs 110

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

) 4 (A6063) C C C C D D D D Body (material: A6063) K C C C C E E E E E E E E KF flange F F F Fn n n n (KF) () Heater (option) Auto switch H H H H J J J J G G G G B B B B A A A A A A A A Model A B C D E Fn G H J K XLC-25 50 120 48 1 12 40 26 39 27.5 8 XLC-40 65 171 66 2 11 55 41 63 36 9 8 XL-OMO0001-A 5 Guaranteed period and range The warranty period is 2 million cycles (under SMC endurance