High Vacuum Angle Valve, XL Series

Valve side exhaust 18 High Vacuum Angle Valve Series XLG, XLGV Dimensions Dimensions (mm) 1in=25.4mm (b) XLG/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) G H J B Heater (optional) A A (mm) (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 B 110 120 171 183 209 250 A 40 50 65 70 88 90 A B C D Fn Fd G H 40 Note 1) E J E Note 1)

Industrial Filters

660 965 80 120 25 (1B) 40 (1 1/2B) 50 (2B) 20 (3/4B) 20 (3/4B) 500 4 500 20 80 24 330 216.3 230 490 905 1220 80 120 25 (1B) 40 (1 1/2B) 50 (2B) 20 (3/4B) 20 (3/4B) 500 4 750 20 90 32 330 216.3 230 490 1160 1485 80 120 25 (1B) 40 (1 1/2B) 50 (2B) 20 (3/4B) 20 (3/4B) 500 4 1000 20 105 41 330 216.3 230 490 1415 1750 80 120 25 (1B) 40 (1 1/2B) 50 (2B) 25 (1B) 20 (3/4B) 570 7 500 20 115 37 400

Sine Rodless Cylinder Series REA

range Usable range Usable range 10 10 10 5 5 5 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 1 0 1 2 3 4 5 6 8 9 10 11 13 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 7 12 Distance from cylinder shaft center: L0 (cm) Distance from cylinder shaft center: L0 (cm) Distance from cylinder shaft center: L0 (cm) 50 63 1000 1000 Recommended driving force: Fn(N) Recommended driving force: Fn(N) 500 400 500

Bag Filter

FGF3-40 1 unit FN EB ES Step 3 Selecting the filter model Selecting the filter model Checking each item Select vessel and seal materials based on compatibility with the fluid.

Sine Rodless Cylinder Series REBR Direct Mount Type

3 y i #1 !5 #2 !9 !7 !1 !2 !0 #0 r t u @9 !6 e #5 #4 w #3 @5 @7 @4 @6 REBH15 @8 @3 Parts list Parts list No. Description Material Note No.

99

Use a commercially available belt wrench etc. for mounting and removing clamp rings. 68 High Precision Filter for Liquids FGH Series Dimensions FGD FGE FGG FGA FGC FGH100/200 FGH300 FGF FGH FGH 2 x Rc 2 x Rc M6 M6 FQ1 FN EB ES Pull-out dimension Pull-out dimension Dimensions A B Element length Port size (Rc) Model 3/8, 1/2 235 FGH100 70 x L117 211 3/4, 1 240 364 3/8, 1/2 FGH200 70 x L246

EXxx-OMZ0016

Change the operation mode of the Base or the number of inputs/outputs mapped to the wireless system (Base and Remotes). (3) Network setting error (4) Number of registered Remotes Red Flashing (3) This is a CC-Link station number 3 MS setting error (factory preset).

XL-OMV0002

3-2.

2

Metal parts material Metric size Inch size Applicable tubing material Seal method Port size Body size 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" 16 12 10 8 6 4 3.2 2 3 Gasket seal M5 x 0.8 1 3 10-32UNF 3 1/8 2 3 3 1/4 Sealant 2 R 1/4 NPT 3 Brass/ Nylon (Series T, TIA) 3/8 Steel wire 3 Stainless 1/2 4 steel Soft nylon (Series TS, TISA) 3 1/8 2 3 Polyurethane (Series T, TIUB) 1/4 Face seal 1/4 G 1 3

High Vacuum L Type Valve

) 2 5 Body (Material: A6063) Valve (Material: SUS304) 6 Valve seal 2 (Maintenance part) 3 (Valve seal 2) Nut assembly (Maintenance part) (Set of a nut and a washer) 9 Washer (Material: SUS304 or equivalent) Nut (Material: SUS304 or equivalent) (Shaft) 11 XL-OMS0001-B 5-2.Dimensions C E C E E (KF flange) Fd (K flange) Fn D H B A G A Unit: mm Model A B C D E Fn Fd G H XLA-16-2 40 108 38 20

XL-OMY0002

C D (KF) KF (K) KF G I H H V Fn Fd A C C U U M E V V A L E B K S H J M G A A A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114

XL-OMY0001

1. 2. 3. 4. 2 XL-OMY0001 / 1 1.5 *3) 3)1 1 () 3 XL-OMY0001 1 &/ 1.52 2 ( ) 5 5 P-01-11 P-06-3 4 XL-OMY0001 2.2 A6063 SUS316L SUS304 5 P11 FKM 3 3[]P8 60 , 245250Hz 30m/s 5 XL-OMY0001 /H0 H4 H5 510% O 0.1mm0.2mm 6 P13 3 3 P7P8 5 P11 7 P14 P18 6 XL-OMY0001 33 5 P11 16 25 40 50 XLA16-30-1-2 XLA25-30-1-2 XLA40-30-1-2 XLA50-30-1-2 XLA16A-30-1-2 XLA25A-30-1-2

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

Auto switch mounting bracket For the auto switch D-F7NJ*, the mounting bracket XLA25-100 is used. 5 XL-OMO0001-A 3. Specifications 3-1.

Fitting Type: H (Straight), Size Combination: 6C (Tubing: 1" x 7/8"; Thread: 1"), Piping Type: M (Male), Thread: N (NPT), Packaging: 3 (Packaging Equivalent to Class M5.5 w/PVDF Nut)

Fitting Type: Straight, Size Combination: Tubing: 1" x 7/8"; Thread: 1", Piping Type: Male, Thread: NPT, Packaging: Packaging Equivalent to Class M5.5 w/PVDF Nut

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

3-3-7.

LEC-OM02704CN

PC461(A97) 3. (RYn1)ON(RXnC)RYn1 4. RY(n2)0RY(N2)13.6.2(3) 5. *1 *2 *3 1 3 1 1 2 3 1 1 1 2 3 1 2 0 2 0 3 1 1 3 0 6. PD26RXn1PC35 7.

Title not found

1 2 5x.2B \71 1.57 140) M18r1 5 1.22 (31) 0 6 3 (16) 3.86 {981 1.91 (23) Q5 .3: ?

Air Cylinder CP Series Cylinder Positioner Assembly

1 2 5x.2B \71 1.57 140) M18r1 5 1.22 (31) 0 6 3 (16) 3.86 {981 1.91 (23) Q5 .3: ?

%silltr

Double acting cylinders 5/3, Open center: As 5/2 but with oulputs exhausted in mid-oosition Double acting cylinders, with the possibility to depressurize the cvlinder 5/3 Closed centen As 512 but with rnidposition fully shut off Double acting cylinden, with stopping possibility 5 1 3 5/3 Pressurized center: Special applications, i.e.