99

Use a commercially available belt wrench etc. for mounting and removing clamp rings. 68 High Precision Filter for Liquids FGH Series Dimensions FGD FGE FGG FGA FGC FGH100/200 FGH300 FGF FGH FGH 2 x Rc 2 x Rc M6 M6 FQ1 FN EB ES Pull-out dimension Pull-out dimension Dimensions A B Element length Port size (Rc) Model 3/8, 1/2 235 FGH100 70 x L117 211 3/4, 1 240 364 3/8, 1/2 FGH200 70 x L246

EXxx-OMZ0016

Change the operation mode of the Base or the number of inputs/outputs mapped to the wireless system (Base and Remotes). (3) Network setting error (4) Number of registered Remotes Red Flashing (3) This is a CC-Link station number 3 MS setting error (factory preset).

XL-OMV0002

3-2.

2

Metal parts material Metric size Inch size Applicable tubing material Seal method Port size Body size 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" 16 12 10 8 6 4 3.2 2 3 Gasket seal M5 x 0.8 1 3 10-32UNF 3 1/8 2 3 3 1/4 Sealant 2 R 1/4 NPT 3 Brass/ Nylon (Series T, TIA) 3/8 Steel wire 3 Stainless 1/2 4 steel Soft nylon (Series TS, TISA) 3 1/8 2 3 Polyurethane (Series T, TIUB) 1/4 Face seal 1/4 G 1 3

High Vacuum L Type Valve

) 2 5 Body (Material: A6063) Valve (Material: SUS304) 6 Valve seal 2 (Maintenance part) 3 (Valve seal 2) Nut assembly (Maintenance part) (Set of a nut and a washer) 9 Washer (Material: SUS304 or equivalent) Nut (Material: SUS304 or equivalent) (Shaft) 11 XL-OMS0001-B 5-2.Dimensions C E C E E (KF flange) Fd (K flange) Fn D H B A G A Unit: mm Model A B C D E Fn Fd G H XLA-16-2 40 108 38 20

XL-OMY0002

C D (KF) KF (K) KF G I H H V Fn Fd A C C U U M E V V A L E B K S H J M G A A A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114

XL-OMY0001

1. 2. 3. 4. 2 XL-OMY0001 / 1 1.5 *3) 3)1 1 () 3 XL-OMY0001 1 &/ 1.52 2 ( ) 5 5 P-01-11 P-06-3 4 XL-OMY0001 2.2 A6063 SUS316L SUS304 5 P11 FKM 3 3[]P8 60 , 245250Hz 30m/s 5 XL-OMY0001 /H0 H4 H5 510% O 0.1mm0.2mm 6 P13 3 3 P7P8 5 P11 7 P14 P18 6 XL-OMY0001 33 5 P11 16 25 40 50 XLA16-30-1-2 XLA25-30-1-2 XLA40-30-1-2 XLA50-30-1-2 XLA16A-30-1-2 XLA25A-30-1-2

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

Auto switch mounting bracket For the auto switch D-F7NJ*, the mounting bracket XLA25-100 is used. 5 XL-OMO0001-A 3. Specifications 3-1.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

3-3-7.

LEC-OM02704CN

PC461(A97) 3. (RYn1)ON(RXnC)RYn1 4. RY(n2)0RY(N2)13.6.2(3) 5. *1 *2 *3 1 3 1 1 2 3 1 1 1 2 3 1 2 0 2 0 3 1 1 3 0 6. PD26RXn1PC35 7.

Title not found

1 2 5x.2B \71 1.57 140) M18r1 5 1.22 (31) 0 6 3 (16) 3.86 {981 1.91 (23) Q5 .3: ?

Air Cylinder CP Series Cylinder Positioner Assembly

1 2 5x.2B \71 1.57 140) M18r1 5 1.22 (31) 0 6 3 (16) 3.86 {981 1.91 (23) Q5 .3: ?

%silltr

Double acting cylinders 5/3, Open center: As 5/2 but with oulputs exhausted in mid-oosition Double acting cylinders, with the possibility to depressurize the cvlinder 5/3 Closed centen As 512 but with rnidposition fully shut off Double acting cylinden, with stopping possibility 5 1 3 5/3 Pressurized center: Special applications, i.e.

SMC Basic Pneumatics

Double acting cylinders 5/3, Open center: As 5/2 but with oulputs exhausted in mid-oosition Double acting cylinders, with the possibility to depressurize the cvlinder 5/3 Closed centen As 512 but with rnidposition fully shut off Double acting cylinden, with stopping possibility 5 1 3 5/3 Pressurized center: Special applications, i.e.

Title not found

Lock the ever pn into the reta ner (lemporary nslal at on) 3.

CLA

3 wire systemfPNP (mm) 40 50 63 80 100 Grommet 2 wire system Foot c;.1 {()4 CAHw CAHOO CA Il '~ CAH10 I Flange CAI fN (;.

MK

3 25, 25: 2 Qty.

MK

3 No. !4 !5 !6 !7 !8 !

NCRAI seies

E* A73L D-A73L Parls M 3 X 0 . 5 X 3 M 3 X 0 . 5 X 5 M 3 X 0 . 5 X 5 M 3 X 0 . 5 X 5 tvl3x0.5x5 @ Rotary Actuator Series:NCRAl l n ck and pinion rype ||m 30(17Ie) 50121,63(2 %),80(3 %),1 0o{4) Fluid Air Air o o o o 90' 180' 100" 190" Rotatio 1 ) o r)o Basic o o Shaft Singleend Doubleend o o o Body option With ctshion a Wlthalctqruitph -oand to 200. lrom 180" model.

Rotary Actuator NCRA1 Series Single Rack and Pinion

E* A73L D-A73L Parls M 3 X 0 . 5 X 3 M 3 X 0 . 5 X 5 M 3 X 0 . 5 X 5 M 3 X 0 . 5 X 5 tvl3x0.5x5 @ Rotary Actuator Series:NcRAl/n".x and Pinion ryp Symbol \ -D \ l ? / L'.. and lo 200" fiom 1 80' model. Lubrication not required; prelubed at lactory OperatirE tempe"ature 15 PSI (1 kgflcrn'?)