5 Port Air Operated Valve Series SYA3000/5000/7000 1

SYJ7000-21-1A 1 pc. 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 position exhaust center 3 position closed center (A) 4 (A) 4 (B) 2 (B) 2 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) The asterisk denotes the symbol for assembly.

SYJA3000

R1 R2 P 11.5 12 18 22 22 27.2 (R1, R2 port) 2-Rc(PT)1/4 63 5-Rc(PT)1/8 (Piping port) 3.1-21

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

Side-ported 1/2 FHG 3 4 24 VDC Side-ported 3/4 12 VDC 1 (P) 5 (R1) 3 (R2) Side-ported 1 Voltage other than above (50 VDC or less) 9 (A) 4 (B) 2 Bottom-ported 1/4 Bottom-ported 3/8 FJG Bottom-ported 1/2 1 (P) 5 (R1) 3 (R2) Option Bottom-ported 3/4 Nil Z (A) 4 (B) 2 None Light/Surge voltage suppressor FIG Sealing type 5 (R1) 1 (P) 3 (R2) Nil R Metal seal (B) (A) Rubber seal 2 4 FPG 3 5

4/5 Port Air Operated Valve Series SYJA3000

SYJ7000-21-1A 1 pc. 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 position exhaust center 3 position closed center (A) 4 (A) 4 (B) 2 (B) 2 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) The asterisk denotes the symbol for assembly.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

1 (P) (A) 4 (B) 2 3 position exhaust center (A) 4 (B) 2 5 (R1) 3 (R2) 1 (P) 3 position pressure center (A) 4 (B) 2 i 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) (This figure shows a closed center type.)

Fitting Type: T (Tee Union), Size Combination: 3A (3/8" x 1/4")

Fitting Type: Tee Union, Size Combination: 3/8" x 1/4", Packaging: -

4/5 Port Air Operated Valve SYJA3000 Series

) (R1)5 1 (P) 3(R2) 5 3 position pressure center 3 position closed center 3 position exhaust center 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) How to Order Manifold Base 3 position pressure center 2(B) (A)4 Same manifolds as SYJ5000 series are prepared.

Aluminum High Vacuum Angle Valve

Q1 R1 R2 R3 S1 T1 Kalrez 4079 SS592 SS630 SSE38 1232-70 3310-75 Chemraz Example) XLH-16-XAN1A VMQ FKM for Plasma ULTIC ARMOR U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd.

4/5 Port Air Operated Valve Series SYJA3000 1

port) (R1, R2 port) 5-2-28

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Port Symbol Caution VF1000 VF3000 VF5000 Supply P P (SUP) P Cylinder A, B A (CYL2) B (CYL1) A, B Connector R1 (EXH2) R2 (EXH1) R1, R2 EXH outlet EA, EB Lead wire JIS symbol Single solenoid Socket Hook 1: P (SUP) 2: B (CYL.1) 3: R2 (EXH.1) 4: A (CYL.2) 5: R1 (EXH.2) 1: P 2: B 3: R2 4: A 5: R1 Plug Connector Lead Wire Length 1: P 4: A 2: B 5: R1 3: R2 Standard length is 300 mm, but the following

7.4

S07B5 4(A) 2(B) 5(R1) 3(R2) 1(P) 5 (R1) 4 (A) 1 (P) 2 (B) 3 (R2) y t N.O. + N.O. Component Parts S07C5 2(B) No.

Fieldbus System

) 1 (P) 3 (R2) 5 (R1) 1 (P) N.C.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

1021-VQ2400 1021-VQ2301 1021-VQ2401 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r 1021-VQ2500 1021-VQ2501 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Component Parts Component Parts No.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

1021-VQ2400 1021-VQ2301 1021-VQ2401 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r 1021-VQ2500 1021-VQ2501 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Component Parts Component Parts No.

VQ4000

push style 4 1 (P) 5 (R1) 3 (R2) 5 (R1) 3 (R2) 1 (P) VP4 2 2 position double 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 5 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ 3 position double check (A) 4 (B) 2 6Note) VQ4 Light and surge voltage suppressor 1 (P) 5 (R1) 3 (R2) E With W/o light/With surge suppressor VQZ Note) Refer to p.1.11-36 for double check style.

Micro Mechanical Valve Series VM1000

VHS 16.5 1.5 1.5 Max. 6 18.5 3 (Pilot exhaust port) M5 x 0.8 PE R2 P R1 (121.5) Symbol (105) 86.5 (B) 2 (A) 4 13.6 B A 14.7 13.6 12 14 3 (R2) 1 (P) 5 (R1) 35 10.8 17 19.8 35 10.8 0.5 MPa supply 1.6 18 28 25 21 3 13 T.T. O.T. P.T.

VQC

Model A side B side JIS Symbol 4 (A) 2 (B) VQC1A01 VQC2A01 N.C. valve N.C. valve 5 (R1) 3 (R2) 1 (P) 4 (A) 2 (B) VQC1B01 VQC2B01 N.O. valve N.O. valve Exhaust center : VQC1A01 VQC2A01 Pressure center: VQC1B01 VQC2B01 5 (R1) 3 (R2) 1 (P) 4 (A) 2 (B) VQC1C01 VQC2C01 N.C. valve N.O. valve 5 (R1) 3 (R2) 1 (P) R1 A P B R2 2-2-7 8 Base Mounted: Variations F Kit P Kit T Kit L Kit M Kit S Kit Sonic

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

Note 3) Value for quick response type Symbol 2 position single 3 position closed center 3 position exhaust center 3 position pressure center 2 position double (Double solenoid) 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) Manifold Specifications Piping specifications Note 4) 1 station weight (g)

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

Plug A Plug A B B Single Number of R1 P R1 P R2 R2 solenoids Plug A Plug A B B Double R1 P R1 P R2 R2 How to Use Plug Connector Insertion/Removal of Connector InsertionPush the connector straight on to the pins of the solenoid, making sure the lip of the lever securely "locks" into the groove of the solenoid cover.