Vacuum

(mm) 02_o2 0 4 _ o 4 0 6 0 6 0 8 _ 0 8 10 _ o.10 1 3 @ 1 3 1 6 @ 1 6 20 @2O 25 _ a25 32 _ a32 40 s4O 50 o50 Pad dia. (mm) 02_o2 0 4 o 4 0 6 a 6 0 8 0 8 1 0 _ o 1 0 1 3 _ o 1 3 1 6 _ s 1 6 20 szo 25 o25 32 s32 40 s4O 50 650 Thread Dia. s2-sB o4(}o50 B4 M4 x 0.7 o B5 M5 x 0.8 o a Thread B6 M G x l a o B8 M8 x 1.25 o a 8 1 0M 1 0 x 1 . 2 5 o o .

Vacuum

(mm) 02_o2 0 4 _ o 4 0 6 0 6 0 8 _ 0 8 10 _ o.10 1 3 @ 1 3 1 6 @ 1 6 20 @2O 25 _ a25 32 _ a32 40 s4O 50 o50 Pad dia. (mm) 02_o2 0 4 o 4 0 6 a 6 0 8 0 8 1 0 _ o 1 0 1 3 _ o 1 3 1 6 _ s 1 6 20 szo 25 o25 32 s32 40 s4O 50 650 Thread Dia. s2-sB o4(}o50 B4 M4 x 0.7 o B5 M5 x 0.8 o a Thread B6 M G x l a o B8 M8 x 1.25 o a 8 1 0M 1 0 x 1 . 2 5 o o .

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Series Nil CD1 Note 1) 5 VQ5000 Cylinder port size CD2 Note 1) 3/8 NPTF 1/2 NPTF Bottom ported 1/2 NPTF Rc3/8 Rc1/2 Bottom ported Rc1/2 Mixed sizes Note) 03T 04T BT 03 04 B CM Manifold type CU1 Note 1) 1 Plug-in unit CU2 Note 1) SB SD Note 1) Stations SU Note 1) 1 1 station D U D U Note 1) Combination of [C ] and [S ] is not possible.

Series VQ Metal Seal/Rubber Seal Body Ported

SX VK L C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZ C6 (6) kit VF VFR N1 (1/8) N3 (5/32) N7 (1/4) N7 (1/4) VP7 Built-in silencer P.1.10-16 P.1.10-18 VP4 C C3 (3.2) C4 (4) M5 (M5 thread) C6 (6) kit VQ N1 (1/8) N3 (5/32) N7 (1/4) VQ4 VQZ Built-in silencer P.1.10-48 P.1.10-52 VQD C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZS kit C6 (6) VFS N1 (1/8) N3 (5/32) N7 (1/4) VS N7 (1/4)

VQ7-6/7-8

U side n Silencer box Air release valve coil rating 5 Without With None 100VAC 50Hz/60Hz 200VAC 50Hz/60Hz 24VDC 12VDC Other Nil SB Nil 1 2 3 4 9 4 3 2 1 R side L side 2.

Rotary Actuator

S 1 pc.

Table of Contents

9 @0 @8 #4 $2 $3 $9 %2 ^0 ^7 Qty. 1 1 1 1 2 2 2 2 2 4 2 1 1 2 2 4 2 2 6 4 8 2 6 2 1 2 4 4 3 4 4 1 1 4 1 4 2 1 1 1 2 2 1 1 1 2 1 1 1 8 4 2 1 6 No. q w e r t y u i o !0 !1 !2 !3 !

Shock Absorbers and Rate Controls

. 0 = 2 0 . . , . . o l:.1:/ 0 a 0 2 0 4 0 . 6 0 8 1 . 0 1 2 1 . 4 1 6 1 . 4 2 . 0 1 . 0 1 . 5 2 0 2 5 3 . 0 0 0 5 TOTAL ENERGY (i IbS/C) (Tho!

Fitting Type: T (Union Tee), Size Combination: 4A (1/2" x 3/8"), Piping Type: SR (Space Saving, Run), Packaging: 1 (Packaging Equivalent to Class M5.5)

Fitting Type: Union Tee, Size Combination: 1/2" x 3/8", Piping Type: Space Saving, Run, Packaging: Packaging Equivalent to Class M5.5

Fitting Type: T (Union Tee), Size Combination: 4A-R1 (A: 1/2" x 3/8", B: 3/8" x 1/4", C: 1/2" x 3/8"), Packaging: 1 (Packaging Equivalent to Class M5.5)

NCA1

1 1/2-12 2 1/4 2.625 3/8 1 1/4 2 11/16 3 3/16 5 3/4 3 1/8 3 5/8 BORE E EE(NPT) F G J K 1 1/2 2 3/8 3/8 2 1 1/4 2 2 1/2 3/8 3/8 2 1 5/16 2 1/2 3 3/8 3/8 2 1 1/8 5/16 3 1/4 3 3/4 1/2 5/8 2 1/4 1 1/4 3/8 4 4 1/2 1/2 5/8 2 1/4 1 1/4 3/8 5 5 1/2 1/2 5/8 2 1/4 1 1/2 7/16 6 6 1/2 3/4 3/4 2 3/4 1 5/8 7/16 BORE SB ST SU SW TS 1 1/2 7/16 1/2 15/16 3/8 2 3/4 2 7/16 1/2 15/16 3/8 3 1/4 2 1/2 7/16 1/2

Air Cylinder NCA1 Series

2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 2 11/16 3 3/16 5 3/4 3 1/8 3 5/8 BORE E EE(NPT) F G J K 1 1/2 2 3/8 3/8 2 1 1/4 2 2 1/2 3/8 3/8 2 1 5/16 2 1/2 3 3/8 3/8 2 1 1/8 5/16 3 1/4 3 3/4 1/2 5/8 2 1/4 1 1/4 3/8 4 4 1/2 1/2 5/8 2 1/4 1 1/4 3/8 5 5 1/2 1/2 5/8 2 1/4 1 1/2 7/16 6 6 1/2 3/4 3/4 2 3/4 1 5/8 7/16 BORE SB ST SU SW TS 1 1/2 7/16 1/2 15/16 3/8 2 3/4 2 7/16 1/2 15/16 3/8 3 1/4 2 1/2 7/16

Table of Contents

(Left side) Rc 1/4 (Bottom side) Rc 1/2 (Bottom side) Mixed 1(P), 3(R2), 5(R1) port connection 03R 04R 03L 04L 03Y 04Y Nil SB None With NPTF T G F VZS Note) The mounting position of the silencer box corresponds to 3 (R2) and 5 (R1) port connections.

0.4

L11 = L4 + 50 L10 = L3 + 50 SV 82 Note) L9 = 16n + 131 SYJ SZ SERIAL UNIT x 1 x 10 VF STATION NO. VP4 MODEL SB RD SD VQ 1/2 VQ 1/2 VQ 4/5 EX124: 4 x G1/2 Electrical entry Use a drip proof plug assembly (AXT100-B04A) on the unused conduit port (G1/2).

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

P Note 1) U S U S U S U S w AXT100-1-J 20 Note 1) AXT100-1-FU15 AXT100-1-FS e Note 1) Top entry connector for PU, JU while side entry connector for PS, JS.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

P Note 1) U S U S U S U S w AXT100-1-J 20 Note 1) AXT100-1-FU15 AXT100-1-FS e Note 1) Top entry connector for PU, JU while side entry connector for PS, JS.

MY1

1 !2 !

2 Phase Stepper Motor/Without Motor Brake Series LXS

(A contact) 1 1 1 1 1 1 N.O. (A contact) N.C. (B contact) Standard stroke mm kg C kg 50 2.1 75 2.3 100 2.5 125 2.7 150 2.9 N.C. (B contact) N.O. (A contact) N.C. (B contact) Body weight Operating temperature range Work load Speed 5 to 40 (with no condensation) 3 (3) horizontal/1 (1) vertical Note 1) Refer to page 318 for detailed specifications of proximity switches.

VQ7-6/7-8

(Left side) Rc 1/4 (Bottom side) Rc 1/2 (Bottom side) Mixed 1(P), 3(R2), 5(R1) port connection 03R 04R 03L 04L 03Y 04Y Nil SB None With NPTF T G F VZS Note) The mounting position of the silencer box corresponds to 3 (R2) and 5 (R1) port connections.