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0 @1 -X #4 #1 20@7 #2 Data @3 #3 #7 #6 @6 !

LEC-OM07605CN

-15 3.5.1 . 3-15 3.5.2 . 3-16 3.5.3 . 3-17 3.5.4 . 3-17 3.6 . 3-18 3.6.1 (SS1) . 3-18 3.6.2 . 3-19 3.6.3 . 3-20 3.6.4 EM2 . 3-20 3.7 . 3-21 3.7.1 . 3-21 3.7.2 . 3-22 3.8 . 3-23 3.8.1 . 3-23 3.8.2 . 3-24 3.8.3 . 3-26 1- 3.9 SSCNET . 3-27 3.10 . 3-29 3.10.1 . 3-29 3.10.2 . 3-30 3.11 . 3-34 4 41 4-18 4.1 . 42 4.1.1 . 42 4.1.2 . 43 4.1.3 . 45 4.2 . 45 4.3 . 47 4.3.1

VQ7-6/7-8

U side n Silencer box Air release valve coil rating 5 Without With None 100VAC 50Hz/60Hz 200VAC 50Hz/60Hz 24VDC 12VDC Other Nil SB Nil 1 2 3 4 9 4 3 2 1 R side L side 2.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

(R2) 1 (P) 5 (R1) 3 (R2) VQ5201 (A) 4 (B) 2 (A) 4 (B) 2 VQ5200 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5301 VQ5300 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5401 VQ5400 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5501 VQ5500 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Parts list Parts list Description Material Note No. 1

Series VQ Metal Seal/Rubber Seal Body Ported

Note) Note) Example) Lead wire length 1000mm Example) Lead wire length 1000mm ..3 pcs. 3 pcs. 3 pcs 3 pcs VQ11405LOC6 AXT66114A10 VQ1140N5LOC6 AXT66114AN10 Connector ass'y No. (DC) Connector ass'y No. Double No. Socket only (3 pcs.) 300mm 600mm 1000mm 2000mm 3000mm Lead wire length Single/3 position No.

Vacuum

(mm) 02_o2 0 4 _ o 4 0 6 0 6 0 8 _ 0 8 10 _ o.10 1 3 @ 1 3 1 6 @ 1 6 20 @2O 25 _ a25 32 _ a32 40 s4O 50 o50 Pad dia. (mm) 02_o2 0 4 o 4 0 6 a 6 0 8 0 8 1 0 _ o 1 0 1 3 _ o 1 3 1 6 _ s 1 6 20 szo 25 o25 32 s32 40 s4O 50 650 Thread Dia. s2-sB o4(}o50 B4 M4 x 0.7 o B5 M5 x 0.8 o a Thread B6 M G x l a o B8 M8 x 1.25 o a 8 1 0M 1 0 x 1 . 2 5 o o .

Vacuum

(mm) 02_o2 0 4 _ o 4 0 6 0 6 0 8 _ 0 8 10 _ o.10 1 3 @ 1 3 1 6 @ 1 6 20 @2O 25 _ a25 32 _ a32 40 s4O 50 o50 Pad dia. (mm) 02_o2 0 4 o 4 0 6 a 6 0 8 0 8 1 0 _ o 1 0 1 3 _ o 1 3 1 6 _ s 1 6 20 szo 25 o25 32 s32 40 s4O 50 650 Thread Dia. s2-sB o4(}o50 B4 M4 x 0.7 o B5 M5 x 0.8 o a Thread B6 M G x l a o B8 M8 x 1.25 o a 8 1 0M 1 0 x 1 . 2 5 o o .

Rotary Actuator

3 !2 y u !8 !9 #0 #1 @1 @0@6 @5 @9 @4 @3 @7 !5 !1 i !0 q w !6 o r t e @2 @8 #3 #2 Without air cushion With auto switch With air cushion $1 $0 $2 #4 #6 #8 #9 #7 #5 Component Parts Component Parts No.

Table of Contents

3 %0 %1 %2 !0 @2 ^3 @1 #3 ^6 $6 %3 @6 $5 ^2 %5 %6 @5 $4 ^0 $3 #1 ^5 %7 @8 $2 o %8 ^7 #0 %9 ML2BS %4 ^4 !

Shock Absorbers and Rate Controls

19.0/ -3' 3t.zo.3' 38.0 t6.o'3' 73 38 38 35 26 N/A 23.0 2 1tl PfN2 | 00cxt(sl 408 r9.04'19.o7fr 3t.lo i., 38.0 r6.0'fi 73 38 38 35 26 N/A 23.0 P 2l50(flt(S) 537 r 9.07-3 ' r9.07'3' 3r.zo 3',38.0 t6.l)f 5 7 1 38 38 35 I O r,l/A 23.0 5.08 PRO| |o(n(Sl 2l I 5.oo tl 5.00 -3' 8.00 i, o.oo j., fi/A 28 N/A 22 l l l 3 5.0 t.0 0.54 PR0r 25(lt(sl 180 6.38 -35 6.38 -3' 12.70 il I?.

NCA1

2 3 1/8 3 1/2 12 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 1/8 3 1/2 14 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 3/8 3 13/16 14 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 3/8 3 13/16 14 3 1/2 2 1/2-12 3 1/2 4.25 1/2 1 1/2 3 3/8 3 13/16 BORE E EE(NPT) F G J K SB ST TS US ADD STROKE LB P SS 8 8 1/2 3/4 3/4 2 1 1/2 9/16 13/16 1 9 7/8 11 1/4 5 7/8 3 1/4 3 3/4 10 10 5/8 1 3/4 2 1/4 2 11/16 1 1/16 1 1/4 12 3/8 14 1/8

Air Cylinder NCA1 Series

1 1/2 3 1/8 3 1/2 12 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 1/8 3 1/2 14 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 3/8 3 13/16 14 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 3/8 3 13/16 14 3 1/2 2 1/2-12 3 1/2 4.25 1/2 1 1/2 3 3/8 3 13/16 BORE E EE(NPT) F G J K SB ST TS US ADD STROKE LB P SS 8 8 1/2 3/4 3/4 2 1 1/2 9/16 13/16 1 9 7/8 11 1/4 5 7/8 3 1/4 3 3/4 10 10 5/8 1 3/4 2 1/4 2 11/16 1 1/16 1 1/4 12 3/8 14

Table of Contents

8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 1.77 (1.72) VFR510 VFR511 Single 5 60 or less 2 position 3 position 1.88 (1.83) VFR520 VFR521 Double 5 60 or less 1.87 (1.82) Closed center VFR530 VFR531 3 80 or less Exhaust center 1.87 (1.82) VFR540 VFR541 3 80 or less 1.87 (1.82) VFR551 Pressure center VFR550 3 80 or less Note 1) [ ]: Denotes the normal position.

0.4

R2) (R1)5 1 (P) 3(R2) e q w e w q VQ1201 VQ1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) VQ1501 VQ1500 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w VQ1A01 VQ1B01 4(A) 2(B) 2(B) 4(A) 5(R1) 1(P) 3(R2)

2 Phase Stepper Motor/Without Motor Brake Series LXS

3 0.5 3 3 3 N.O.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

1021-VQ2400 1021-VQ2301 1021-VQ2401 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r 1021-VQ2500 1021-VQ2501 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Component Parts Component Parts No.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

1021-VQ2400 1021-VQ2301 1021-VQ2401 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r 1021-VQ2500 1021-VQ2501 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Component Parts Component Parts No.

MY1

0 @1 -X #4 #1 20@7 #2 Data @3 #3 #7 #6 @6 !

VQ7-6/7-8

30) 2-3/8, 1/2, 3/4 30(42) 30(42) X(PE) port 1/8 2-3/8, 1/2, 3/4 3/8, 1/2, 3/4 R1, R2 port X(PE) port 1/8 30(42) 30(42) 3/8, 1/2, 3/4 R1, R2 port P port P port ( ): 3/4 Dimensions inside are for rubber seals. ( ): 3/4 3-10-25 26 Series VQ7-8 Construction DIN Terminal Type Metal seal Rubber seal type VQ7-8-FG-SVQ7-8-FG-S-R !

2 Phase Stepper Motor/Without Motor Brake Series LXP

(A contact) D-F9N D-F9P D-F9G D-F9H D-F9GL D-F9HL D-F9B D-F9NL D-F9PL D-F9BL 0.5 0.5 0.5 0.5 3 3 0.5 3 3 3 3 wire/NPN 3 wire/PNP 3 wire/NPN 3 wire/PNP 3 wire/NPN 3 wire/PNP 2 wire 3 wire/NPN 3 wire/PNP 2 wire None Yes (cable length 0.3m) Nil S N.O. (A contact) N.C. (B contact) N.C. (B contact) Auto switch type N.C. (B contact) None Nil N.C.