Series KC Self-seal Fittings

L1 D L2 A Rc(PT)1 8 KBS1-R1 KBS2-R2 KBS3-R3 KBS4-R4 28.0 33.5 38.5 39.0 13.6 17.6 25.2 27.0 17.8 28.5 33.8 57.1 14 17 19 24 11.0 14.0 17.0 20.0 25.0 30.0 34.5 35.0 3 8 Rc(PT)1 4 Rc(PT) Rc(PT) 1 2 85 Series KB Piping Module 3 Other Piping Material Nipple: KBN Weight (g) L A D Part No.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

material Part numbers indicating changed seal material and leakage Leakage Pa m3/s or less Note 1) Compound No. 1349-80 Symbol Nil N1 Seal material FKM EPDM BARREL PERFLUORO Changed part Note 2) Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 2101-80 2, 3 2 3 Nil A B C P1 70W 1.3 x 10-11 (FKM) 1.3 x 10-9 1.3 x 10-8 Kalrez 1.3 x 10-10 (FKM) Q1 R1 R2 R3

IDX-OM-M051

/4 R3/4 20 50 165 475 9902 1030 950 Facility water outlet 1.3 Name and function of parts Terminal block for signal (Symbol: W5) (Symbol: W5) R3/4 R3/4 Refer to 6.3 Outer dimensions 6 5 IDF100F~150F-W IDX-OM-M051 Air Dryer 6.

IDX-OM-Z004

/4 R3/4 20 50 165 475 9902 1030 950 (-W5) -W5 1,3 (-W5) -W5 R3/4 R3/4 IDF100F150F-W 6 5 IDX-OM-Z004 6 6.4 IDF100/125F/150F-30-W R R GFCI PE TB1 THR MC1 CM OLR MC1 HM PRR SWL PLC TB2 Y0 1 MC1 COM0 2 Y3 3 COM3 4 MC1 Y1 X4 5 () PRR () COM1 X0 6 THR X1 PRS2 PRS3 X3 L P P N 24V EDV PE CM OLR V V MC1 THR TB1,2 SWL PRR PRS1 PRS2 PRS3 PLC HM GFCI EDV IDF100F150F-W 6 6 IDX-OM-Z004

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 117 76 24 LQ-GK VX3 36 SET POS. 53 127 63 43 VXA (MAX.50) 114 VN LVC 53 63 43 LVA LVH LVD LVQ LQ LQ-GM LQ-GL LVN 50 TI/ TIL 50 207 85 PA 342 85 PAX LQ-GL 40 28 SET POS. 40 28 LQ-GM 4-R3 SET POS. 6 6 4-R3 PB 6 6 4-R3 4-R3 191 (MAX.91) (MAX.91) 325 87 60

Prevents Micro-Bubbles

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com SET POS. 53 127 43 63 VX3 (Max. 50) 114 VXA 53 VN 43 63 LVC LVA LVH LVD LQ-GM LQ-GL LVQ LQ 50 LVN 50 207 85 TI/ TIL 342 85 LQ-GL 40 28 PA SET POS. 40 28 LQ-GM 4-R3 SET POS. 6 6 4-R3 6 6 PAX 4-R3 4-R3 (Max. 91) 325 PB (Max. 91) 191 87 60 87 60 112 112

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com SET POS. 53 127 43 63 VX3 (Max. 50) 114 VXA 53 VN 43 63 LVC LVA LVH LVD LQ-GM LQ-GL LVQ LQ 50 LVN 50 207 85 TI/ TIL 342 85 LQ-GL 40 28 PA SET POS. 40 28 LQ-GM 4-R3 SET POS. 6 6 4-R3 6 6 PAX 4-R3 4-R3 (Max. 91) 325 PB (Max. 91) 191 87 60 87 60 112 112

LVQ

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com SET POS. 53 127 43 63 (Max. 50) 114 53 43 63 LQ-GM LQ-GL 50 50 207 85 342 85 LQ-GL 40 28 SET POS. 40 28 LQ-GM 4-R3 SET POS. 6 6 4-R3 6 6 4-R3 4-R3 (Max. 91) 325 (Max. 91) 191 87 60 87 60 112 112 17-5-84 Fitting Assembly Procedure Assemble fittings following

Type: Fitting Body, Material: PFA, Connection Type: Pipe⇔Pipe, same diameters connection, Pipe-to-Pipe Equal Diameter Connection Type: Union Tees, Applicable Tube Outer Dia. (in) D (D1): 3/4, Maximum Operating Temperature(°C): 200, Packing: Clean Packaging Class M3.5 Equivalent, Nut Material: PFA, Size of Body: 5

Type: Fitting Body, Material: PFA, Connection Type: Pipe⇔Pipe, same diameters connection, Pipe-to-Pipe Equal Diameter Connection Type: Union Tees, Applicable Tube Outer Dia. (in) D (D1): 3/4, Maximum Operating Temperature(°C): 200, Packing: Clean Packaging Class M3.5 Equivalent, Nut Material: PFA, Size of Body: 5

Type: Fitting Body, Material: PFA, Connection Type: Pipe⇔Pipe, different diameters connection, Pipe-to-Pipe Unequal Diameter Connection Type: Reducing Union Tee, Applicable Tube Outer Dia. (in) D (D1): 3/4, Applicable Tube Outer Dia. (in) D2: 3/8, Applicable Tube Outer Dia. (in) D3: 3/4, Maximum Operating Temperature(°C): 200, Packing: Clean Packaging Class M3.5 Equivalent, Nut Material:

Type: Fitting Body, Material: PFA, Connection Type: Pipe⇔Pipe, different diameters connection, Pipe-to-Pipe Unequal Diameter Connection Type: Reducing Union Tee, Applicable Tube Outer Dia. (in) D (D1): 3/4, Applicable Tube Outer Dia. (in) D2: 3/4, Applicable Tube Outer Dia. (in) D3: 1/2, Maximum Operating Temperature(°C): 200, Packing: Clean Packaging Class M3.5 Equivalent, Nut Material:

Type: Fitting Body, Material: PFA, Connection Type: Pipe⇔Pipe, different diameters connection, Pipe-to-Pipe Unequal Diameter Connection Type: Reducing Union Tee, Applicable Tube Outer Dia. (in) D (D1): 3/4, Applicable Tube Outer Dia. (in) D2: 3/4, Applicable Tube Outer Dia. (in) D3: 3/8, Maximum Operating Temperature(°C): 200, Packing: Clean Packaging Class M3.5 Equivalent, Nut Material:

Type: Fitting Body, Material: PFA, Connection Type: Pipe⇔Pipe, different diameters connection, Pipe-to-Pipe Unequal Diameter Connection Type: Reducing Union Tee, Applicable Tube Outer Dia. (in) D (D1): 3/4, Applicable Tube Outer Dia. (in) D2: 1/2, Applicable Tube Outer Dia. (in) D3: 1/2, Maximum Operating Temperature(°C): 200, Packing: Clean Packaging Class M3.5 Equivalent, Nut Material:

Type: Fitting Body, Material: PFA, Connection Type: Pipe⇔Pipe, different diameters connection, Pipe-to-Pipe Unequal Diameter Connection Type: Reducing Union Tee, Applicable Tube Outer Dia. (in) D (D1): 1/2, Applicable Tube Outer Dia. (in) D2: 3/4, Applicable Tube Outer Dia. (in) D3: 1/2, Maximum Operating Temperature(°C): 200, Packing: Clean Packaging Class M3.5 Equivalent, Nut Material:

Type: Fitting Body, Material: PFA, Connection Type: Pipe⇔Pipe, different diameters connection, Pipe-to-Pipe Unequal Diameter Connection Type: Reducing Union Tee, Applicable Tube Outer Dia. (in) D (D1): 3/8, Applicable Tube Outer Dia. (in) D2: 3/4, Applicable Tube Outer Dia. (in) D3: 3/8, Maximum Operating Temperature(°C): 200, Packing: Clean Packaging Class M3.5 Equivalent, Nut Material:

Type: Fitting Body, Material: PFA, Connection Type: Pipe⇔Pipe, different diameters connection, Pipe-to-Pipe Unequal Diameter Connection Type: Reducing Union Tee, Applicable Tube Outer Dia. (in) D (D1): 3/4, Applicable Tube Outer Dia. (in) D2: 1/2, Applicable Tube Outer Dia. (in) D3: 1/4, Maximum Operating Temperature(°C): 200, Packing: Clean Packaging Class M3.5 Equivalent, Nut Material:

Type: Fitting Body, Material: PFA, Connection Type: Pipe⇔Pipe, different diameters connection, Pipe-to-Pipe Unequal Diameter Connection Type: Reducing Union Tee, Applicable Tube Outer Dia. (in) D (D1): 3/4, Applicable Tube Outer Dia. (in) D2: 3/4, Applicable Tube Outer Dia. (in) D3: 1/4, Maximum Operating Temperature(°C): 200, Packing: Clean Packaging Class M3.5 Equivalent, Nut Material:

Fitting Type: T (Tee Union), Size Combination: 5A (3/4" x 5/8"), Packaging: 1 (Packaging Equivalent to Class M5.5)

Fitting Type: T (Union Tee), Size Combination: 5A-R1 (A: 3/4" x 5/8", B: 1/2" x 3/8", C: 3/4" x 5/8"), Packaging: 2 (Packaging Equivalent to Class M3.5 w/PVDF Nut)