Symbol: 2 Port, N.C., Function: Standard, Voltage: 24VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Reverse Mounting Prevention Pin: Reverse Mounting Prevention Pin, Lead Wire Length: 300mm, CE Compliant: -

Symbol: 2 Port, N.C., Function: Standard, Voltage: 24VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Reverse Mounting Prevention Pin: Reverse Mounting Prevention Pin, Lead Wire Length: 600mm, CE Compliant: -

Symbol: 2 Port, N.C., Function: Standard, Voltage: 24VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Reverse Mounting Prevention Pin: Reverse Mounting Prevention Pin, Lead Wire Length: 150mm, CE Compliant: CE Compliant

Symbol: 07R6 (2 Port, N.C.), Function: Standard, Voltage: 5 (24VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Reverse Mounting Prevention Pin: P (Reverse Mounting Prevention Pin), Lead Wire Length: 3 (300mm)

Symbol: 07R6 (2 Port, N.C.), Function: Standard, Voltage: 5 (24VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Reverse Mounting Prevention Pin: P (Reverse Mounting Prevention Pin), Lead Wire Length: 6 (600mm)

Symbol: 07R6 (2 Port, N.C.), Function: Standard, Voltage: 5 (24VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Reverse Mounting Prevention Pin: P (Reverse Mounting Prevention Pin), Lead Wire Length: 150mm, CE Compliant: Q (CE Compliant)

Symbol: 2 Port, N.C., Function: Standard, Voltage: 24VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Reverse Mounting Prevention Pin: Reverse Mounting Prevention Pin, Lead Wire Length: 300mm, CE Compliant: CE Compliant

Symbol: 2 Port, N.C., Function: Standard, Voltage: 24VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Reverse Mounting Prevention Pin: Reverse Mounting Prevention Pin, Lead Wire Length: 600mm, CE Compliant: CE Compliant

Symbol: 07R6 (2 Port, N.C.), Function: Standard, Voltage: 5 (24VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Reverse Mounting Prevention Pin: P (Reverse Mounting Prevention Pin), Lead Wire Length: 3 (300mm), CE Compliant: Q (CE Compliant)

Symbol: 07R6 (2 Port, N.C.), Function: Standard, Voltage: 5 (24VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Reverse Mounting Prevention Pin: P (Reverse Mounting Prevention Pin), Lead Wire Length: 6 (600mm), CE Compliant: Q (CE Compliant)

Chemical valve, CHEMICAL VALVE, 2 PORT, B07, 0.007 lb

Chemical valve, CHEMICAL VALVE, 2 PORT, B07, 0.007 lb

Chemical valve, CHEMICAL VALVE, 2 PORT, B07, 0.007 lb

Chemical valve, CHEMICAL VALVE, 2 PORT, B07, 0.007 lb

Chemical valve, CHEMICAL VALVE, 2 PORT, B07, 0.007 lb

Chemical valve, CHEMICAL VALVE, 2 PORT, B07, 0.007 lb

2

and 5C, prevent water droplets from entering the inlet port.

TABLE OF CONTENTS

COIL NO. 6 7.8 8.5 12 14 5.4 7 7.7 11 13 3 3.8 4.4 6 7 5C-103-A24 5C-104-A24 5C-105-A24 5C-106-A24 5C-107-A24 5C-3-K24 5C-4-K24 5C-5-K24 5C-6-K24 5C-7-K24 18.5 24 32 39 45 17 22 29 35 41 9 12 16 20 23 5C-108-A24 5C-109-A24 5C-110A24 5C-111-A24 5C-112-A24 5C-8-K24 5C-9-K24 5C-10-K24 5C-11-K24 5C-12-K24 48 54 94 120 153 43 48 85 110 138 24 28 47 60 76 5C-113-A24 5C-114-A24 5C-115-A24 5C-116

Thermo-chiller/Rack Mount Type

5C 100 100 Ambient temperature Ambient temperature Ambient temperature Ambient temperature 0 0 10 15 25 20 30 40 35 10 15 25 20 30 40 35 Circulating fluid temperature [C] Circulating fluid temperature [C] HRR010-W-20 [50 Hz] [60 Hz] 400 400 35C Heating capacity [W] Heating capacity [W] 35C 300 300 25C 25C 200 200 5C 5C 100 100 Facility water temperature Facility water temperature Facility

Table of Contents

Temperature conditions Water (Standard) Air (Standard) Oil (Standard) Vacuum (3) (V, M) Maximum Minimum 40 1 60 5(1) 40 5 40 40 5 5(2) Pilot port Note 1) Dew point: 5C or less Note 2) 500 cSt or less Note 3) V, M in parentheses are option symbols.