Thermo-chiller

(English 1 pc./Japanese 1 pc.), Operation Manual (for installation/operation) 2 pcs. (English 1 pc./Japanese 1 pc.), Y-strainer 20A 1 pc., Barrel nipple 20A 1 pc., Drain pan for the pump 1 pc.

energy saving effect

When deionized water is used, the electric conductivity should be 1 mS/cm or higher (Electric resistivity: 1 Mcm or lower). 30 min 20 min 14 min 10 min 6 min 4 min Facility Water Supply 2 min 1 min Warning Operating time 30 s 20 s Max. 1. The water-cooled refrigeration type thermo-chiller radiates heat to the facility water.

2.0

Inscribed number 3 3 x 1 3 3A 1/8" x 1/16" 4 4 x 2 4 4A 5/32" x 1/32" 6 6 x 4 6 6A 1/4" x 1/8" KO Plug connector, Without connector G (Option) Grommet, 300 mm y Lead wire length Nil 300 mm 6 600 mm 10 1000 mm The plug connector is included but does not come assembled.

Table of Contents

6/Rc 1 8 6/Rc 1 8 ZH07B ZH10B ZH13B ZH05D ZH07D ZH10D ZH13D ZH15D ZH18D ZH20D 12/Rc 3 8 Body ported type (Without silencer) 8/Rc 1 8 10/Rc 1 4 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 8/Rc 1 8 8/Rc 1 8 10/Rc 1 4 10/Rc 1 4 3 8 12/Rc 10/Rc 1 4 12/Rc 3 8 12/Rc 3 8 16/Rc 1 2 16/Rc 1 2 13-5-2 3 Series ZH Vacuum Ejector: Box Type (Built-in Silencer)/Body Ported Type Ejector JIS Symbol Body

LEC-OM07605CN

PA08]: _ _ _ 3) 3 ( ) 4 5 6 7 8 38 7.1.17.1.2 9 10 (c) 1)[Pr. PB09 ] [Hz]= (1+)x2 2)[Pr. PB10 ] [ms] 20003000 /(1+) 6 15 6 3)[Pr. PB08 ] 4 1 8 1 (1+) 4)[Pr. PB07 ] () 4 1 8 1 (1+) 6 16 6 6.5 2 X-Y22 (1) 2 1 2 21 (a) PB06 GD2 PB08 PG2 PB09 VG2 PB10 VIC (b) PA09 RSP PB07 PG1 (2) 2 2 2122 ([Pr.

One-touch Fittings

[mm] 2 x Applicable tubing 1 D D Weight [g] X (X) Y Nylon Urethane Oval type Round type 4 1/8 KQ2D04-01GS1 10 8.2 7.7 10 15.8 23.3 24.3 13.3 5.7 6 3.2 6 6 3.6 9.2 1/4 KQ2D04-02GS1 14 8.2 7.7 10 15.8 27.7 27.1 13.3 5.7 6 3.2 6 6 3.6 19 O 4, 6 8 to 12 N L1 M 6 1/8 KQ2D06-01GS1 12 10.4 9.7 12 16.8 24.3 26.4 13.3 6.7 6 3.2 13.9 11 5.4 10.2 1/4 KQ2D06-02GS1 14 10.4 9.7 12 16.8 28.7 29.2 13.3 6.7

HRX-OM-W060

to 3 .5-57 Setting of contact output signal 4 to 6 .5-57 5.4.11 Temperature waveform screen.5-62 Chapter 6 Alarm Notification and Troubleshooting . 6-1 6.1 Alarm Notification . 6-1 6.2 Operation of this product when an alarm occurs . 6-1 6.3 Troubleshooting . 6-2 6.3.1 Alarm contents, causes, and troubleshooting . 6-2 6.4 Other Errors . 6-5 Chapter 7 Control, Inspection and Cleaning . 7-1

Digital Flow Switches

1 2 3 4 7 3 Load +0.5 0 Brown 19.4 6 2 + 36 Blue 5 1 12 to 24VDC 5 6 7 8 Series PF2W5 PF2W31-A The applicable panel thickness is 1 to 3.2mm.

PF2A/PF2W

ZSM PF2 Terminal block number 5 6 7 8 IF 4 3 2 1 The applicable panel thickness is 1 to 3.2 mm.

Series PF2W Digital Flow Switch For Water

40.3 Load OUT2 40 4.3 8 4 Sensor input Load Black OUT1 Main circuit Main circuit 7 3 Sensor Sensor Brown DC(+) DC(+) 2 6 + SMC FLOW SWITCH Blue DC() DC() 1 5 12 to 24 VDC 35.8 A 40 UNIT RESET -1 PNP (2 outputs) SET Load OUT2 8 4 3 x 7.2 (= 21.6) 8 x M3 Sensor input Load Black OUT1 7 3 6.4 Brown DC(+) DC(+) 2 6 + Blue DC() DC() 1 5 1 2 3 4 12 to 24 VDC 19.4 Terminal block numbers 5 6 7

PFA/PFW

DC (+) 1 Flow direction OUT 2 2 DC () 3 OUT 1 4 6 Digital Flow Switch for Air Series PFA Dimensions (mm)/ Separate Type For Air 1in=25.4mm Scale: 70% PFA30m-A Display unit Panel mount 3 x 7.2 ( = 21.6) 41.8 40.3 8-M3 40 6.4 4.3 1 2 3 4 SMC FLOW SWITCH 35.8 19.4 40 UNIT RESET SET 5 6 7 8 Panel cutout dimensions 36 + 0.5 0 + 0.5 0 36 The applicable panel thickness is 1 to 3.2mm PFA30m-B Display

VXA21/22

IN MaterialO Model Body Seal Brass, Stainless steel NBR, FPM, EPR Orifice size (mm) Model Port size Rc(PT) VXA212 , 1 8 1 4 , 1 8 1 4 , 1 4 3 8 , 1 4 3 8 , 1 4 3 8 , 1 4 , 3 8 1 2 0 2 3 4.5 VXA213 0 2 VXA223 0 2 4.5 6 8 VXA224 0 2 VXA225 0 2 10 VXA226 0 2 4.1-57 VXA21/22 Normally Closed (N.C.)/Normally Open (N.O.)

VXD21/22/23

LQ Hexagon width across flats Bracket 2-Rc , , 4 1 8 3 2 1 LVN TI/ TIL Conduit terminal: T PA PAX PB Bracket 2-Rc , , 4 1 8 3 2 1 : Port size Rc 1/2 17-3-39 8 The VX series will be revised shortly.

VXP21/22/23

Thread 1 1 VXP2272-12 1 4 1 2 AC 1 VXP2382-14 2 VXP2392-20 VXP2272-32 VXP2382-40 VXP2392-50 32A 40A 50A Flange DC Note) Surge voltage suppressor is attached in the middle of lead wire.

VXZ

T Conduit terminal Refer to the table (1) given below for availability. Rated voltage 3 2 1 110 VAC 50/60 Hz 200 VAC 50/60 Hz 100 VAC 50/60 Hz Model Port size (Rc 1/4) (Rc 3/8) (Rc 1/2) (Rc 3/4) (Rc 1) 02 03 04 06 10 2232 2232 2242 2352 2362 4 5 6 7 8 9 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz 48 VAC 50/60 Hz Other (Please contact SMC for inquiry.)

33

Model Description Material Qty Note q Body PP 1 w EJ202S-005X11 Element PP/PE 1 EJ202S-075X11 e Particle filter bracket SGCC 1 r Nipple Stainless steel 1 Conversion from R to NPT t Extension piece Stainless steel 1 Conversion from NPT to Rc y Tapping screw 4 u Handle 1 When -H is selected i Sealant tape PTFE 1 206 HRSE Series Cooling Capacity Calculation Required Cooling Capacity

VXR21/22/23

S L, Z S L, Z 1 1 1 1 4 1 2 PB AC 2 Ordering example (Example) Series VXR22, Rc 1 1/4, 200 VAC, Conduit terminal (Part no.)

VXA31/32

Insulation oil A H Polyacetal Note 1) Note 1) Non-leak (10 6 Pam 3/s) Brake oil Water (up to 60C) B P A H Stainless steel Note 1) If using for other fluids, please contact SMC.

VXA21/22

PAX PB Model %# & 0 & VXA3114 VXA3124 VXA3134 VXA3224 VXA3234 VXA3244 , 1 , / , 1 , / , 1 , / , / . 1 , / . 1 , / . 1 ,!* )!).)!)./ Material 17-3-101 6 The VX series will be revised shortly. Series VXA31/32 Common (C.O.)

Clean Exhaust Filter

Warning 1.