Symbol: Body Ported, 3 Port, Universal, Tubing Type, Function: Standard, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Bracket, Lead Wire Length: 600mm, CE Compliant: -

Symbol: Body Ported, 3 Port, Universal, Tubing Type, Function: Standard, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Bracket + Manual Override, Lead Wire Length: 600mm, CE Compliant: -

Symbol: Body Ported, 3 Port, Universal, Tubing Type, Function: Standard, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: 600mm, CE Compliant: CE Compliant

Table of Contents

AXT502-9A Blanking plate (Filter, Regulator) Blanking plate (Pressure switch) 4 Number of manifold blocks required for mounting (stations) 2 stations 2 stations 2 stations 2 stations 2 stations 2 stations 2 stations 1 station 2 VQ7-6-FHG-D 4 2 Use of Control Unit VQ7-6-FG-D 4 2 1.

VDW

VXA 8 15 5 VN M5,1/8 1 (IN) port M5,1/8 2 (N.C.) port 8.5 (6.3) LVC 6 12.8 LVA 1/8, 1/4 1/8, 1/4 2-M3 x 0.5 thread depth 5 1 (IN) port Dimensions inside ( ) are for port size 1/8. 2 (N.C.) port LVH LVD LVQ 2-M4 x 0.7 Thread depth 6 LQ LVN Bracket assembly part no.

42

2) x G1/2 Conduit port SYJ M5 x 0.8 Ground screw 10.7 SZ U side 1/4" 4(A), 2(B) port 129.5 106 47 94.7 9 9 71.7 VF VP4 27 36.1 X 12 X 12 n VQ 1/2 B A 8 VQ 4/5 VQ 4/5 2 4 B A 7 VQC 1/2 2 B 2 B 2 B 2 B 2 B 2 B 4 6 A A A A A A B B B B B B VQC 4/5 1/4" Note) 5 SMC SMC SMC SMC SMC VQZ L2 L1 4 SQ 3 VFS VFR 2 P = 25 44 VQ7 1 2 50.5 Stations 38 D side 27 11.7 80.8 47.7 43.2 1/8" External pilot port

SQ1000/2000

COM COM 1A 2A 3A 4A 5A 6A 7A 8A 9A 10A COM 25 26 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B COM COM 1 2 3 4 5 6 7 8 9 10 11 12 13 23 24 14 15 16 17 18 19 20 21 22 23 24 25 21 22 19 20 19 20 19 20 17 18 17 18 17 18 15 16 15 16 15 16 13 14 13 14 13 14 11 12 11 12 11 12 9 10 9 10 9 10 7 8 7 8 7 8 5 6 5 6 5 6 3 4 3 4 3 4 COM 1 2 1 2 1 2 COM COM T kit Terminal block (SQ2000 only) J kit Flat ribbon cable connector

Vacuum System Peripherals:

Connection 3.2, 4 6, 8, 10, 12, 16 KQ2 Nylon, Soft nylon, Polyurethane M5, M6, R 1/8 to 1/2 From 100 kPa One-touch fittings One-touch fittings/Manifold Series KM Applicable tubing: Nylon, Soft nylon, Polyurethane Tubing O.D.: 4, 6, 8, 10, 12 Port A piping port Port B port size No. of port A Piping specifications Port A Port B Model Model 4 6 8 8 10 12 Rc Rc 6 8 10 6, R 6, R 6, R 8, R 8, R

VDW Series

Types 10, 20 VDW 0 15A 1 2 66 (62.5) 6 12.8 Series 8.5 (6.3) 1 2 10 20 Type 30 1/8, 1/4 1 (IN) port VCW20 12 01A 1/8, 1/4 2 (OUT) port Dimensions inside ( ) are for port size 1/8. 2-M4 x 0.7 Thread depth 6 6 Compact Direct Operated 2 Port Solenoid Valve for Water and Air Series VDW10/20/30 How to Order Manifolds How to Order Manifold Assemblies (Example) VV2DW 2 05 01 Enter the valve and

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

Types 10, 20 VDW 0 15A 1 2 66 (62.5) 6 12.8 Series 8.5 (6.3) 1 2 10 20 Type 30 1/8, 1/4 1 (IN) port VCW20 12 01A 1/8, 1/4 2 (OUT) port Dimensions inside ( ) are for port size 1/8. 2-M4 x 0.7 Thread depth 6 6 Compact Direct Operated 2 Port Solenoid Valve for Water and Air Series VDW10/20/30 How to Order Manifolds How to Order Manifold Assemblies (Example) VV2DW 2 05 01 Enter the valve and

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

2 3 4.5 2 1 8 (6A) 1 8 (6A) 320 4.5 2 300 3 3 1.0 7.9 0.33 500 320 500 660 500 660 1 4 (8A) 4.5 15 0.61 470 620 470 620 560 700 560 700 470 470 620 470 620 560 700 560 700 560 700 4.5 0.61 15 1 4 (8A) 1.0 6 1.1 26 6 1.1 26 8 1.6 38 3 0.33 7.9 0.5 500 10 4.5 0.61 15 1.9 46 3 8 (10) 660 500 660 3 7.9 0.33 6 1.1 26 4.5 0.61 15 1.0 Note) Weight of grommet type.

V100

(g) Applicable valve model Applicable stations Series Base model Port size Port location 1(P), 3(R) 2(A) C3 (For 3.2) C4 (For 4) C6 (For 6) M5 (M5 thread) 2 stations: 83 Addition per/station: 19 2 to 20 stations VV3QZ12VQZ115 Rc 1/8 VQZ100 Top V100 2 stations: 68 Addition per/station: 20 C4 (For 4) C6 (For 6) M5 (M5 thread) 2 to 20 stations VV3QZ22VQZ200 Rc 1/8 Top VQZ22 SY SYJ C6 (For 6

Compact 5-Port Solenoid Valve

5 4 3 2 1 8 7 6 5 4 3 2 1 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 Station 1 Station 1 Station 1 Station 2 Station 2 Station 2 Station 3 Station 3 Station 3 Station 4 Station 4 Station 4 COM. (+) 9 () () Station 5 Station 5 COM. (+) 10 (+) (+) (+) (+) (+) (+) (+) (+) Positive common Negative common Station 6 Station 6 Station 7 Station 7 Station 8 Station 8 * When using a valve with no polarity

2/3 Port Valve

VX233 0 2 MaterialO 1 4 3 8 , 6 VX234 0 2 1 4 3 8 , 8 VX2350 Body Seal Brass, Stainless steel NBR, FPM, EPR, PTFE 10 VX2360 3 8 1 2 , 1 4 , 4.1-1 VX21/22/23 Energized Open (N.C.)

VNB

A: Non-locking extended type 4 Valve size 1 to 4 6A 8A 10A 1 8 1 4 3 8 5 6 24 VDC 12 VDC 1 7 B: Locking slotted type 7 240 VAC 50/60 Hz 9 Other 11 15 11 10A 3 8 Option 2 15A 1 2 15 14 3 20 16 Nil: Non-locking push type 20A 3 4 Valve size 5 to 7 25 4 25A 1 22 11 4 32A 5 32 Electrical entry/ With light/surge voltage suppressor 1 B 22 32 28 40 6 28 40 1 4 32F Flange 11 2 40A GS Grommet

Non-contact Gripper

5 3 0.4 (MPa) 5 2.5 4 0.4 (MPa) 0.4 (MPa) Lifting force (N) Lifting force (N) Lifting force (N) 4 2 3 0.3 (MPa) 0.3 (MPa) 3 1.5 0.3 (MPa) 2 0.2 (MPa) 0.2 (MPa) 2 1 0.2 (MPa) 0.1 (MPa) 0.1 (MPa) 1 1 0.5 0.1 (MPa) 0 0 0 0 1 2 3 4 5 6 7 8 9 10 Distance from the workpiece (mm) 0 1 2 3 4 5 6 7 8 9 10 Distance from the workpiece (mm) 0 1 2 3 4 5 6 7 8 9 10 Distance from the workpiece (mm) Size:

Process Valve

(mm) Symbol 1 2 3 Note 2) Port size Rc 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz 1 2 3 Note 1) 4 Symbol Nil: Non-locking push type N.C. 1 MPa N.C. 0.5 MPa N.O. 1 MPa C.O. 1 MPa Note) 4 Note 2) A: Non-locking push type A (projecting) 1 6A 8A 10A 1 8 1 4 3 8 5 6 Note 2) 7 Valve size 1 to 4 7 Note 2) 11 15 11 10A 3 8 B: Slotted locking

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Applicable solenoid valves: Series 10-SY3 0, 10-SY5 0, 10-SY7 0, 10-SY9 0 2 4 6 2 4 6 2 4 6 2 4 20 40 45 60 3 5 7 9 X90 10 SY Model no. Entry is the same as standard products. Specifications and performance are the same as standard products.

VQ4000

Rc 1/4: Rc 1/4 thread C8: One-touch fitting for 8 Rc 3/8: Rc 3/8 thread Note) C10: One-touch fitting for 10 2(4)-G 1/2 C12: One-touch fitting for 12 (Conduit port) U side 3.5 163 130 44 62 95 When U side mounting (S) 6 6 73 When D side mounting (SD) 15 35.5 X 12 X 12 n B A 8 2 4 MODEL SQ (SI No.EX124-SDN1) B A TM 4632 MOD/NET PWR 1 7 SETTINGS 2 4 Manual override B A 6 4 2 B A A B 5 SMC

70pvvna

B: Locking slotted type 4 1 6A 8A 10A 10A 15A 20A 25A 32A 40A 50A 1 8 1 4 3 8 3 8 1 2 3 4 220 VAC 50/60 Hz 10 5 6 24 VDC 12 VDC 240 VAC 50/60 Hz 7 15 2 9 Other Nil: Non-locking push type 20 3 Option Valve size 5 to 7 25 4 1 1 1 2 32 5 1 4 1 2 40 50 6 7 Note) Air operated only Electrical entry/ With light/surge voltage suppressor E GS G Grommet with surge voltage suppressor Grommet Grommet