VQ5000

D side Stations 1 2 3 4 5 6 7 8 9 10 11 12 Description/Model (A) 4 (B) 2 2 position single 1 (P)3 (R2) 5 (R1) (A) 4 (B) 2 2 position double 1 (P)3 (R2) 5 (R1) (A) 4 (B) 2 3 position closed center Valves Options Port size (ports A, B) Enter in case of mixed sizes (CM). 1 (P)3 (R2) 5 (R1) (A) 4 (B) 2 3 position exhaust center 1 (P)3 (R2) 5 (R1) (A) 4 (B) 2 3 position pressure center 1 (P)3

2

3 !4 o !0 !1 !2 e !3 !4 !5 !2 q !5 q t t r u u i i r y y w !6 w Meter-in type Meter-out type Meter-out type Meter-in type Seal method: Face seal For G thread e o !3 !1 !0 !4 !2 !5 q t u i r y !7 Flow Control Equipment AS AS-FS w Meter-in type Meter-out type Component Parts No.

Vacuum System Peripherals:

m Lead wire length 0.6 m Lead wire length 3 m Connector type Nil Grommet type 10 Max. vacuum pressure C CL CN Connector type S 84 kPa 53 kPa L (7 stations maximum) r e w q Silencer Nil None With silencer Number of ejector/valve stations t r e w q 1 Alignment (for special specifications) Vacuum switch Nil None With vacuum switch E COM 1 2 3 4 6 7 8 5 COM 8 7 6 5 4 3 2 1 U side D side Connector

Stability of suction position,

Arrival time to stable Pv 95% after adsorption [sec] QL : Leakage volume during workpiece adsorption [L/min (ANR)] Note 1) Q = + QL T1 T2 = 3 x T1 Max. suction flow rate Qmax = (2 to 3) x Q [L/min (ANR)] Ejector Select the ejector with the greater maximum suction flow rate from the Qmax indicated above.

0.4

w e q w VQ1100 VQ1101 2(B) (A)4 2(B) (A)4 r r (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQ1201 VQ1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) VQ1501 VQ1500 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2

ZX

Ordering example) Lead wire length 5A 10 ZS ZCU Lead wire length (For DC) Nil 6 10 15 20 25 30 0.3 m (Standard) 4A 20 VJ10 6 AMJ 0.6 m 1 m 1.5 m 2 m 2.5 m 3 m Note) If ordering a vacuum switch with 3 m lead wire, specify both the vacuum unit switch and the 3 m lead wire connector part numbers. Nil 30 50 0.6 m 3 m 5 m (For 100 VAC) 1A 36 VJ10 6 Misc. ZX1051-K15LOZ-EC 1 pc.

VQ5000

(Stations 3 and 4) VQ5300-5 1 set Valve part no. (Station 5) 1 2 3 4 5 6 2 position single 2 position double 3 position closed center 3 position exhaust center 3 position pressure center 3 position double check Manual override Prefix the asterisk to the part nos. of the solenoid valve, etc.

VQ4000

, 3/8 1(P), 4(A), 2(B), 5(R1), 3(R2) port 31 31 5-Rc 1/4, 3/8 1(P), 4(A), 2(B), 5(R1), 3(R2) port : 3 position ( ): Rc 3/8 2-5-7 8 For details about certified products conforming to international standards, visit us at www.smcworld.com.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

(R2) 1 (P) 5 (R1) 3 (R2) VQ5201 (A) 4 (B) 2 (A) 4 (B) 2 VQ5200 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5301 VQ5300 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5401 VQ5400 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5501 VQ5500 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Parts list Parts list Description Material Note No. 1

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators 1 (P) (R1)5 3(R2) 3(R2) 1 (P) (R1)5 e w q t r q y t rw (A) 4 (B) 2 (A) 4 (B) 2 i 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) i u 3 position closed center/exhaust center/pressure center 3 position closed center 2(B) (A)4 q t rw 3(R2) 1 (P) (R1)5 (B) 2 (A) 4 3 position exhaust center 2(B) (A)4 Air Preparation Equipment Pressure Control Equipment

CATALOG

8 5/8 3/8 1/8 3/8 7/16 1.1 2 3/16 1 1/4 3/8 9/16 3/8 5 5/8 7/16-20 3/4 5/16-24 2 1/2 1.71 3 5/8 2.6 0.3 1 1/8 6 3/16 1.26 1 2.4 6 200 (2) 1 1 7/16 1 1/8 5/8 3/8 1/8 3/8 9/16 1.06 2 11/16 1 3/4 3/8 9/16 3/8 5 5/8 7/16-20 3/4 5/16-24 3 1.75 3 3/4 3.1 0 1 1/8 6 5/16 1.3 1 2.48 6 1/8 250 (2.5) 1 1 5/8 1 1/8 5/8 3/8 1/8 3/8 9/16 1.06 3 1/8 2 1/4 3/8 9/16 3/8 5 3/4 3/8-24 3 3/4 2.34 4 1/4 3.9 0

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

SY3000-55-2B(-Q) SY5000-55-2B(-Q) SY7000-55-3B(-Q) Applicable series 10-SY3000 Port size 5/16" One-touch fitting 3/8" One-touch fitting 3/8" One-touch fitting Assembly part no. SY3000-54-3C(-Q) SY5000-54-2C(-Q) SY7000-54-3C(-Q) Applicable series 10-SY5000 10-SY3000 10-SY7000 10-SY5000 10-SY7000 [When supplying the manifold with 2 different supply pressures.]

CV/MVGQ

Description No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

CV/MVGQ

Description Material Note q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

Vacuum

Determine the maximum suction llow needed: Q , " , = ( 2 3 ) x Q r 1 1.1 S : Etfective cross-sectional area (mm'z) Selection Proceas: . Set acceptable values for adsorption response time I and Ti. Select a valve with an etfective cross-sectional orifice such that S x 11 .1 > Q,*. . Adjust times T1 and T' as necessary or refer to a different test valve to achieve a desired result.

Vacuum

Determine the maximum suction llow needed: Q , " , = ( 2 3 ) x Q r 1 1.1 S : Etfective cross-sectional area (mm'z) Selection Proceas: . Set acceptable values for adsorption response time I and Ti. Select a valve with an etfective cross-sectional orifice such that S x 11 .1 > Q,*. . Adjust times T1 and T' as necessary or refer to a different test valve to achieve a desired result.

Series VQ Base Mounted Metal Seal/Rubber Seal

() 7B 3 rows 9 to 12 stations (+) () 8A Sequence 3.

Model Selection 1

/N.O./ Double acting Air operated valve 17-5-63 LVQ2/3/4/5/6-S Single unit Direct operated, Space saving type N.C./N.O./ Double acting Single unit LVQ2/3/4/5/6SS 17-5-73 2 port N.C./N.O./ Double acting LVA1/2/3/4/5 Single unit Direct operated Threaded type 17-5-17 N.C./N.O./ Double acting LLA2/3/4/5A Manifold LVH2/3/40 N.C.