rep-modular-e

2 #4 e !8 #8 #6 #5 #2 w !0 e i !3 @8 !9 @0 @1 @2 @3 @4 @5 t u !4 !5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Modular Pressure Control Equipment F.R.L. Replacement Procedure

2 #4 e !8 #8 #6 #5 #2 w !0 e i !3 @8 !9 @0 @1 @2 @3 @4 @5 t u !4 !5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

2

Q Q L2 L2 2 x N 2 x O Q Q Applicable tubing b Applicable tubing a Different Diameter Cross: KQ2TY Applicable tubing b Applicable tubing O.D.

Table of Contents

5 q u o Material Note Component Parts !4 r No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !

Stability of suction position,

2 !2 i i o o u u y y w w t t r r q q e e With buffer (Vacuum inlet: Vertical) With buffer (Vacuum inlet: Lateral) Component Parts No.

VFR

1, Metal joint q, w End plate (D) !2, Connection bracket q, w, Gasket e, r, O-ring y, u End plate (D) !2, Connection bracket q, w, Gasket e, t, O-ring y, u Non plug-in type Plug-in type VVF4000-3A-2 !

VFS

2, Metal joint q, w, Gasket B r, Guard !3, Steel ball End plate (D) !2, Metal joint q, w, Gasket B r, Guard !

VQ5000

exhaust with silencer box: U side exhaust IP65 enclosure Model 5 VQ5000 O A Without SI unit With general type SI unit (Series EX300) (2) (2) Manifold Mitsubishi Electric Corp.: MELSECNET/MINI-S3 Data Link System (2) B 1 Plug-in unit (2) Mitsubishi Electric Corp.: MELSECNET/MINI-S3 Data Link System (2 power supply systems) BB (3) Stations (2) C D F1 J1 J2 K Q R1 R2 U V G H OMRON Corp.: SYSBUS

With Factory Installed

When using seal tape, leave one thread exposed when wrapping fitting or pipe. 0.25 f-t-+-t---t-+--j--+--:--t--+-I Set point -~V '" Q. ::; O Mount vertically. c.> 0.2 :; :2 l' Q. Qi '5 0 ~ 5l :r 0. 31<.-t-~-+---="I--;;::'--t-t_1 Q. 0.15 f-t.,---+t--t-+---1--+-t--t-l 8Tightening torque of mounting screw (M3) for gauge is 3-Skgf . cm.

VQ4000

A A 215 15 P = 25 44 L1 L2 B 2 A 4 5 B 2 A 4 5 L1 L2 B 2 A 4 26.5 38 50.5 P = 25 4 26.5 38 50.5 P = 25 B 2 A 4 4 B B Indicator light B B B 2 A 4 3 B 2 A 4 3 P = 25 B 2 A 4 2 B 2 A 4 2 B 2 A 4 1 B 2 A 4 1 44 Stations X Indicator light Manual override Stations U side D side U side D side 12 16.5 43.5 12 16.5 43.5 D side entry (LD) AMC610-10 Exhaust cleaner 29 215 AMC610-10 Exhaust cleaner

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

power supply systems) EX124U-SDN1 EX124D-SDN1 Q OMRON: CompoBus/S (16 points, 2 power supply systems) EX124U-SCS1 EX124D-SCS1 R1 OMRON: CompoBus/S (8 points, 2 power supply systems) EX124U-SCS2 EX124D-SCS2 R2 JEMANET (2 power supply systems) EX124U-SJN1 EX124D-SJN1 U Mitsubishi Electric: CC-Link (2 power supply systems) EX124U-SMJ1 EX124D-SMJ1 V 47

Filter Regulator IW Series

Min. 207 Panel 54 72.5 10 69.5 2 R1/8 74 40 7 30 OUT OUT IN 2 x M6 depth 10 2 x Rc1/4 Pressure gauge port Rc1/8 78 70 A 160

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

0.4

VQ1000/2000 Series VQ1000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w VQ1100 VQ1101 2(B) (A)4 2(B) (A)4 r r (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQ1201 VQ1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P

Table of Contents

AC 110 12 2 12 3 q e w e t y 220 10 1 10 1.5 440 6 1 3 1 550 5 0.8 2 0.5 r b contact w a contact r q DC 24 3 2.5 3 2.5 C C 48 1.5 1.2 1.5 1.25 When rising pressure q w = ON e r = OFF When rising pressure q e r y = ON q w r t = OFF 110 0.5 0.25 0.5 0.2 220 0.25 0.1 0.25 0.1 Insulation resistance: 100 M or more at 500 VDC by megameter Voltage resistance: 2000 VAC/1 min. 16-9-5 2 Series

Proposals for Energy Saving

Flow coefficient Port size Rc Proof pressure MPa Max. system pressure MPa Max. operating pressure differential MPa Weight g Orifice mm Cv Effective area mm Model N.C. 1/8 (6A) 2 0 VXA213 2 0 VXA212 2 0 VXA213 2 0 VXA223 2 0 VXA224 2 0 VXA225 2 0 VXA226 2 0 VXA223 2 0 VXA224 2 0 VXA225 2 0 VXA226 2 0 VXA226 2 0 6 1.0 0.5 1.0 1.0 0.33 0.61 0.33 3 4.5 3 VXA212 11 6 170 0.5 1.0 0.6 0.2 0.1 1.0

KJ

5 No. q w e r t y u i o !0 !11 !2 !33 !4 !5 !

Series VQ Base Mounted Metal Seal/Rubber Seal

P (2) AXT100-2-F (2) AXT100-2-TB1 (4) AXT100-2-TB2 (4) SY SYJ q SX VK VZ VF U S U S U S w e r t U S VFR Note 1) S kit is composed of a flat cable housing ass'y (AXT100-2-PU20) of q SI unit and q P kit (20 pin).

KR

(mm) Model L Q Weight (g) 2-applicable tubing M2 D KGL04-00 18 4 6 8 10 16 17 18.5 21 10.4 4.5 4.2 4.2 6 KGL06-00 20 12.8 5.3 11.4 9.0 6 KGL08-00 23 15.2 6 21.6 14.9 10 KGL10-00 26.5 18.2 6.8 35.2 25.0 17 KGL12-00 28.5 20.9 7.5 50.2 39.7 21 12 22 KGL16-00 34 26.5 10 100 (84) 29 16 25 K Note 1) D: Max. diameter Note 2) ( ): Values for nylon.