energy saving effect

kW 24 kW Power supply Power supply Power supply -20 3-phase 200 VAC (50 Hz), 3-phase 200 to 230 VAC (60 Hz) -20 3-phase 200 VAC (50 Hz), 3-phase 200 to 230 VAC (60 Hz) -20 3-phase 200 VAC (50 Hz), 3-phase 200 to 230 VAC (60 Hz) -40 3-phase 380 to 415 VAC (50/60 Hz) -40 3-phase 380 to 415 VAC (50/60 Hz) -40 3-phase 380 to 415 VAC (50/60 Hz) Set temp. range 5 to 35C Set temp. range 5 to 35C

Thermo-chiller

/10.5 gal/min (38/40 L/min) Facility water pressure differential 44 psi (0.3 MPa) or more Facility water inlet/outlet Rc3/4 Facility water system Fluid contact material Stainless steel, Copper (Heat exchanger brazing), Bronze, Brass PTFE, NBR, EPDM Power supply 3-phase 200 VAC (50 Hz), 3-phase 200 to 230 VAC (60 Hz) Allowable voltage range 10% (No continuous voltage uctuation) Electrical

2.0

Inscribed number 3 3 x 1 3 3A 1/8" x 1/16" 4 4 x 2 4 4A 5/32" x 1/32" 6 6 x 4 6 6A 1/4" x 1/8" KO Plug connector, Without connector G (Option) Grommet, 300 mm y Lead wire length Nil 300 mm 6 600 mm 10 1000 mm The plug connector is included but does not come assembled.

Table of Contents

silencer) ZH05B 6/Rc 1 8 6/Rc 1 8 ZH07B ZH10B ZH13B ZH05D ZH07D ZH10D ZH13D ZH15D ZH18D ZH20D 12/Rc 3 8 Body ported type (Without silencer) 8/Rc 1 8 10/Rc 1 4 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 8/Rc 1 8 8/Rc 1 8 10/Rc 1 4 10/Rc 1 4 3 8 12/Rc 10/Rc 1 4 12/Rc 3 8 12/Rc 3 8 16/Rc 1 2 16/Rc 1 2 13-5-2 3 Series ZH Vacuum Ejector: Box Type (Built-in Silencer)/Body Ported Type Ejector

LEC-OM07605CN

2.5 15PN () (1) (2) (3) (4) (5) (6) 2 8 2. 2.6 10 EMl(1> 10 STOON/OFF100 13(23) 12.2 (1) (40)10 (2) EM1( 1)10 OFF STO ON/OFF 100 (3) 1 3 2 3 40 2 9 3. 3 .2 3.1 .3 3.2 .6 3.2.1 .6 3.2.2 .8 3.3 .9 3.3.1 .9 3.3.2 .10 3.3.3 CNP1CNP2 CNP3 .11 3.4 .13 3.5 () .15 3.5.1 .15 3.5.2 .16 3.5.3 .17 3.5.4 .17 3.6 .18 3.6.1 (SS1) .18 3.6.2 .19 3.6.3 .20 3.6.4 EM2 .20 3.7

One-touch Fittings

[mm] *1 D1 Weight [g] With a rib X (X) Y Nylon Urethane M L1 Rib Oval type Round type 4 1/8 KQ2W04-01GS1 10 8.2 7.7 10 10 14.8 29.9 30.9 13.3 4 4 3 11 V 1/4 KQ2W04-02GS1 14 8.2 7.7 10 10 14.8 33.3 32.7 13.3 4 4 3 27.5 V 4, 6 8 to 12 4, 6 D1 6 1/8 KQ2W06-01GS1 10 10.4 9.7 12 10 15.5 31 33.1 13.3 10.9 8.6 4.5 11.4 1/4 KQ2W06-02GS1 14 10.4 9.7 12 10 15.5 34.4 34.9 13.3 10.9 8.6 4.5 28 3/8

PF2A/PF2W

Rise time 1 ns Weight Note 3) 660 g Port size (Rc, NPT, G) 1/2, 3/4 3/8, 1/2 3/8 Note 1) The system accuracy when combined with PF2W3.

Digital Flow Switches

time 1ns Weight Note 3) 410g 470g 650g 1,100g Port size (Rc, NPT, G) 3/8 3/8, 1/2 1/2, 3/4 3/4, 1 Note 1) The system accuracy when combined with PF2W3.

HRX-OM-W060

Transportation using forklift and hanging . 3-2 3.1.2 Transportation using casters . 3-3 3.2 Installation . 3-4 3.2.1 Environment . 3-4 3.2.2 Location . 3-6 3.2.3 Installation and maintenance space . 3-7 3.3 Installation . 3-8 3.3.1 Installation . 3-8 3.3.2 Electrical wiring .3-10 3.3.3 Preparation and wiring of power supply cable .3-12 3.3.4 Contact input/output communicatin wiring .3-17

Series PF2W Digital Flow Switch For Water

410 g 470 g 650 g 1,100 g Port size (Rc, NPT, G) 3/8 3/8, 1/2 1/2, 3/4 3/4, 1 Note 1) The system accuracy when combined with PF2W2/3.

33

Fluid contact material Stainless steel, Copper (Heat exchanger brazing), Bronze, Brass, Ceramic, Carbon, PP , PE, POM, EPDM, PVC Power supply Single-phase 100 VAC 50/60 Hz Allowable voltage range 10% Fuse A 15 Power cable size Note 10) 3 cores x 14 AWG (2.0 mm2), 3 m Electrical system Applicable earth leakage breaker capacity Note 7) A 15 Rated operating current (50/60 Hz) Note 3) A 7.1/

VXP21/22/23

) Oil (Standard) (D, E) High temperature oil (3) (S) (D) 99 100 183 AC DC AC DC 60 40 80 60 60 40 40 60 Maximum Minimum 1 10 5 (2) 10 (1) Note 1) Dew point: 10C or less Note 2) 50 cSt or less Note 3) D, E etc. in parentheses are option symbols.

PFA/PFW

218psi) 0 to 50C (32 to 122F) with no condensation 12 to 24VDC (ripple 10% or less) 20mA or less 470g (16.6oz) (not including lead wires) Equivalent to IP65 3/8, 1/2 0.5 to 4l/min (0.02 to 0.14SCFM) 5 to 40l/min (0.18 to 1.41SCFM) 410g (14.5oz) (not including lead wires) 650g (22.9oz) (not including lead wires) Weight Enclosure Piping port size 3/8 1/2, 3/4 11 Series PFW Digital Flow Switch

VXD21/22/23

DC AC, DC 60 40 1 80 60 10(1) 40 60 60 40 Maximum Minimum 10 5(2) Note 1) Dew point: 10C or less Note 2) 50 cSt or less Note 3) D, E, N, P etc. in parentheses are option symbols.

VXZ

80 60 10 60 40 1 AC DC AC/DC Maximum 10 (1) 5 (2) Minimum Note 1) Dew point is below 10C Note 2) Below 50 cSt Note 3) D, E, N, P, etc. in parentheses represents option symbol.

VXA21/22

IN MaterialO Model Body Seal Brass, Stainless steel NBR, FPM, EPR Orifice size (mm) Model Port size Rc(PT) VXA212 , 1 8 1 4 , 1 8 1 4 , 1 4 3 8 , 1 4 3 8 , 1 4 3 8 , 1 4 , 3 8 1 2 0 2 3 4.5 VXA213 0 2 VXA223 0 2 4.5 6 8 VXA224 0 2 VXA225 0 2 10 VXA226 0 2 4.1-57 VXA21/22 Normally Closed (N.C.)/Normally Open (N.O.)

VXR21/22/23

Port size 04 06 10 12 14 20 LVH 1 2 3 4 Refer to page 17-3-16 for ordering coil only. 1 1 1 2 LVD 1 4 1 2 Thread type Nil T F N LVQ Rc NPTF G NPT Refer to the table (1) given below for availability.

VXA31/32

A 40 44 B 20 22 C 9 10 D 22 24 E 59 66 F 33 34 G 24 25 H 30 40 J 36 46 K 6 9 M 45.5 50.5 N 69 76 VVXA31 VVXA32 17-3-108

0.4

(packaged together) 50 80 650 F 40 550 G 10 300 H 4 200 J Filter (IN port) Nil Without filter F With filter Note) 100 Note) Flow reduction rate 50 L/min: 5% or less 100 L/min: 5 to 10% 150 L/min: 10 to 15% 80 600 K 40 500 L 10 250 M 4 150 150 Specifications Flow rate (L/min) [at 0.25 MPa] 50 100 150 Power consumption (W) 80 40 10 4 80 40 10 4 80 40 10 4 Type of actuation 2-position 2 port

VXA21/22

4.5 6 8 250 1.0 3 8 (10A) 340 0.4 10 10 1 2 (15A) 420 Note) Refer to Glossary on page 17-3-15 for details of max. operating pressure differential and max. system pressure.