One-touch Fittings

57.4 45.4 9 18.4 L M L D L L M Q Q D 2 x N 2 x O Q Q Different Diameter Cross: KQ2TX Applicable tubing b Applicable tubing O.D.

Rotary Table/Rack & Pinion Style Series MSQ

n k ra c oc ra o t cl cl en nt er er e tm m nt nt e is 0 u us t 0 u C w us o o k lo c o C dj C l 19 C 19 dj se c Cl A k A A wi w oc e e dj A ck is ng ng k dj o u wi e Cl st us se ro ra ra m ta ro t m ta ti d e ti n o on e n n e n nt nt en tio tio d ra ra 5 n n g ta e ta 9 g e 5 9 ro ro m m u u im im ax M ax M Note) The drawing shows the rotation range of the positioning pin hole.

Digital Flow Switches

1 q t i PF2D540 o !0 u !0 !2ywr e !

2/3 Port Valve for Various

Series VXP21/22/23 Dimensions (Orifice Size: 15 mm, 20 mm, 25 mm) Normally Closed:VXP2140/2150/2260 Normally Open:VXP2142/2152/2262 Grommet: G Conduit: C Port size Mounting hole Conduit terminal: T P Port size Rc VXP2140 Normally open Normally closed Model Grommet Electrical entry Conduit Conduit terminal Bracket H F E D C B f M L K J A b 39 45.5 49.5 e 57 62 67 Q 39 39 41.5 Q 23 23 25.5

33

s]) : Tap water* IDH Example of current measurement units (Reference) : (= r x qv 60) [kg/s] : 1 [kg/dm3] : 10 [dm3/min] : 4.2 x 103 [J/(kgK)] : 293 [K] (20 [C]) : 295 [K] (22 [C]) : 2.0 [K] (= T2 T1) : 60 [s/min] : Unknown [cal/h] [W] : Tap water* Heat generation amount by users equipment Q Circulating fluid Circulating fluid weight flow rate qm Circulating fluid weight volume ratio g

VXP21/22/23

Note 4) VXP2130: Option C, K, Q, S only. 17-3-44 3 Series VXP21/22/23 Pilot Operated 2 Port Solenoid Valve For Air, Gas, Steam and Oil The VX series will be revised shortly. How to Order (Normally Closed) VXP21 0 VXP22 VXP23 Bracket Nil B None With bracket VC Model Thread connection sizes are available from 02 to 10.

VXA21/22

Refer to table q for configuration.

Series PF2W Digital Flow Switch For Water

DC+ 1 Brown q N.C. 2 Not used w DC 3 Blue e IN: 1 to 5 V 4 White r Power supply/Output connector (8P) Power supply/Output connector (accessory) i u y t r e w q Pin No. Pin no. Terminal 7 Green CH4_OUT1 8 Yellow N.C.

PF2A/PF2W

These vortexes are stable under certain conditions, and their frequency is proportional to the flow velocity, resulting the following formula. f = k x v f: Frequency of vortex v: Flow velocity k: Proportional constant (determined by the vortex generator's dimensions and shape). Therefore, the flow rate can be measured by detecting this frequency.

2/3 Port Valve for Various

Tightness of Valve (Leak rate) 0" " " $'" ( 2 A NBR, FKM, EPDM )* +, " $ % 1 % 1 $ " /3 $'" ( , " , " # Pilot Pressure 4 " 4 " VXA21 VXA22 4 $ " < . q B 6 "5 !" $6" " 6 " " " w 0C4,D 4 e B 6 !"

2.0

LPV22 (N.O.) y y r r t i t u u o e e w w q q Component Parts No.

VXD21/22/23

59 59 60 P Port size Rc VXD2140 Q R a b c d e f M L K J H F E D C B A N 69 (76) 77 (84) 87 (97) Q N 61 69 79 Q N 61 (68) 69 (76) 79 (89) N 61 (68) 69 (76) 79 (89) Normally open Normally closed VXD2142 , 30 30 35 59 59 62 57 74 81 34 51 58 29 37 43 34 43 47 20 20 23 92 92 95 104 (116) 26 44 59 66 28 35 40 3 8 8 14 23 39 47 47 48 39 65 78 86 42 46 56 52 56 66 63 80 90 3 8 1 2 32.5 118 (136)

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

CN3 Forced stop 2 6.2 k 20 EM2 DICOM 5 24 V DC DICOM 10 CN8 Approx. (Note 2) CN8 (Note 1) STO1 3.0 k 4 STO1 Approx. 6 TOFB1 (Note 2) 3.0 k STO2 5 STO2 8 TOFCOM STOCOM 3 7 TOFB2 24 V DC Door Open (Note 3) Note 1. By using TOFB, whether the servo is in the STO state can be confirmed. For connection examples, refer to section 13.3.2 to 13.3.4. 2.

LEC-OM07605CN

(2) ()40 10(555) (10.1) P A = (10.1) K T 2] A: [m P: [W] T: [] K: [56] (10.1),P 10.1A 10.1 40() () () 10.2 10 4 10. 10.3 101 1000 EM1(1) EM1(1) LECSS2-T 400W [Pr. PF06][Pr.

DOC1001322

Pump automatic running and stopping is repeated to prevent freezing by maintaining circulating fluid temperature at 3C to 5C. Pump automatically starts operating if the circulating fluid temperature drops below 3C. Circulating fluid is heated by the pump power generated by pump operation.

1

0 w o u q!1 !4 JA MXH MXQ CDJ2RA10/16-SZ-B MGP CY CX CJ2RA-TZ CK1 !3 r e !2 yit!0 w o u q !5 !1 !4 C(L)K C(L)KU CKQ CDJ2RA10/16-TZ-B CKZ2N WRF Component Parts No.

VXZ

VXZ2230 VXZ2232 VXZ2240 VXZ2242 VXZ2350 VXZ2352 VXZ2360 VXZ2362 H Y F X E W D U V C S T B K R A J N Q N 79.5 87.5 101.5 106.5 L 108 117 130 135 1 4 3 8 , 28 35 43 45 26 30 38 43 14 17 22 22 7.5 8.5 9 9 24 33 42 47 1.6 2.3 2.6 2.6 22 28 36 42 5.5 6.5 6.5 6.5 40 52 65 70 6 7 7 7 11 14 18 21 93 102 115.5 120.5 25 25 28 28 89 97 112 117 67 75 87 92 50 63 80 90 23 23 25.5 25.5 35 35 40 40 25.5

High Vacuum Angle Valve

N P R Port P (Pressure port) In case of double solenoid valve Port R (Exhaust port) Q K L M B EB EA P A In case of single solenoid valve Port R (Exhaust port) (mm) P K L M N Q R Model XLCV-50 XLCV-63 XLCV-80 12.5 9.5 9.5 1 1 23.5 52.6 17.4 9.5 9.5 1 1 18.6 62.3 23.5 9.5 9.5 1 1 12.4 70.8 Other dimensions are the same as the XLC.

ZP

H F K H F Width across flats 7 Width across flats 7 Hexagon width across flats 12 M8 x 1.25 Hexagon width across flats 12 M8 x 1.25 Hexagon width across flats 12 Hexagon width across flats 3 3 Y 2.5 2 A B A B Stroke 20 to 50 mm Stroke 20 to 50 mm Dimensions: 10 mm Stroke Dimensions: 10 mm Stroke (mm) (mm) Model A B C D F H I J K P Q: 6 Q: 8 Model A B C D F H I J K P Q: 6 Q: 8 Y K P K P ZPT20F10

Table of Contents

5 No. q w e r t y u i o !0 !11 !2 !33 !4 !5 !