VXA21/22 Orifice size 2 3 4 3mm 4.5mm 6mm Refer to table q for configuration. Valve/Body 1 3 Normally closed (N.C.)/Manifold Normally open (N.O.)
410 g 470 g 650 g 1,100 g Port size (Rc, NPT, G) 3/8 3/8, 1/2 1/2, 3/4 3/4, 1 Note 1) The system accuracy when combined with PF2W2/3.
times each Impact resistance Noise resistance 1000 Vp-p, Pulse width 1 s, Rise time 1 ns Weight Note 3) 660 g Port size (Rc, NPT, G) 1/2, 3/4 3/8, 1/2 3/8 Note 1) The system accuracy when combined with PF2W3.
T 3 q w e r t y q Symbol w Coil voltage e Electrical entry Symbol Valve type 21 N.C. 22 N.O.
59 59 60 P Port size Rc VXD2140 Q R a b c d e f M L K J H F E D C B A N 69 (76) 77 (84) 87 (97) Q N 61 69 79 Q N 61 (68) 69 (76) 79 (89) N 61 (68) 69 (76) 79 (89) Normally open Normally closed VXD2142 , 30 30 35 59 59 62 57 74 81 34 51 58 29 37 43 34 43 47 20 20 23 92 92 95 104 (116) 26 44 59 66 28 35 40 3 8 8 14 23 39 47 47 48 39 65 78 86 42 46 56 52 56 66 63 80 90 3 8 1 2 32.5 118 (136)
PA04]0 _ _ _ SSCNET/H3.7.1(2) 3 22 3. 3.8 3.8.1 CN813.3.1 (5) DC 24 V 4 CN3 CN3 2 DC24V 2 6.2k 6.2 k EM2 20 3 DOCOM DI1 2 13 MBR RA (3) 3 (2) (1) (2) (1) DI2 12 9 INP (3) 6.2 k 3 6.2k DI3 19 15 ALM RA DICOM 5 (5) DC 24 V 4 10 DICOM DC24V CN3 6 LA 16 LAR (35mA ) 7 LB (35 mA ) 17 LBR 8 LZ 18 LZR LG 11 CN3 4 MO1 CN5 D2 3 5 DC 10 V DC10V 14 MO2 USB D+ DC 10 V DC10V GND 1 LG
VXZ2230 VXZ2232 VXZ2240 VXZ2242 VXZ2350 VXZ2352 VXZ2360 VXZ2362 K P 88 97 108.5 113.5 72 80 95 100 95 95 97 97 62 62 64 64 17-3-67 8 The VX series will be revised shortly. Series VXZ22/23 Construction N.C. N.O.
SY 3 5 1 C6 1 0 3 SY q w r e t y u i o !0 !1 !2 !3 EX600 Top ported VM q Series u Coil type !
A XLAV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLAV-16-2 41 17.2 10.2 3.6 3.6 XLAV-25-2 46 21.4 10.2 3.6 3.6 XLAV-40-2 54.5 33.9 10.2 3.6 3.6 XLAV-50-2 61 38.2 10.2 3.6 3.6 XLAV-63-2 80.5 43.8 12 4 2 XLAV-80-2 90.5 59.8 12 4 2 6 A Aluminum High Vacuum Angle Valve Double Acting, Bellows Seal RoHS XLC Series How to Order q w e r t
Note 3) ZP3-(015/02/035)U ZP3-Y(015/02/035)U;(J/K)3-@ ZP3-Y(015/02/035)U;(J/K)6-@ ZP3B-Y1(J/K)3-B3 ZP3B-Y1(J/K)6-B3 ZP3-Y(10/13/16)UM;(J/K)3-@ ZP3-Y(10/13/16)B;(J/K)3-@ ZP3-Y(10/13/16)UM;(J/K)6-@ ZP3-Y(10/13/16)B;(J/K)6-@ ZP3-Y(10/13/16)UM;(J/K)10-@ ZP3-Y(10/13/16)B;(J/K)10-@ ZP3-Y(10/13/16)UM;(JB/K)15-@ ZP3-Y(10/13/16)B;(JB/K)15-@ ZP3-Y(10/13/16)UM;(JB/K)20-@ ZP3-Y(10/13/16)B;(JB/K)20-@
/Specifications K TFU 0805B-3 3 cores 4 6 8 2.5 4 5 TFU 0805B-2 2 cores TFU 0604B-3 3 cores TFU 0604B-2 2 cores TFU 0425B-3 3 cores TFU 0425B-2 2 cores Model M Burst Pressure Characteristics Curve and Operating Pressure Max. operating pressure (at 20C) Fluid Tubing I.D.
mm) A B C D E F G H J K L M N P Q Port size Model IDU3E IDU4E IDU6E 3/8 455 498 283 275 15 270 1/2 31 42 80 230 32 15 240 80 284 483 13 568 355 300 3/4 485 15 7 9 Series IDF/IDU E Option Specifications 1 Refer to pages 2 and 5 for How to Order of options.
3 !1 y q e u o w i Male thread Parts List Remarks Remarks Description Material No.
3 3 3 3 3 M10 x 1 M10 x 1 M10 x 1 Q Q Q D D (F) (F) (F) P P P Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) S S S 31 8 31 8 31 14.9 14.9 14.9 R R R 6 6 6 M5 x 0.8 M5 x 0.8 M5 x 0.8 8 Y Y Y A A A C a a a C C b B 20 30 21 31 Dimensions Model Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5
D2 J K T J K T J K T Size C2 Y = 50 4 to 39.5 Y3 3 to 11.9 C1 L2 = 50 3 to 11.9 X3 4 to 39.5 63 Y3 3 to 14.9 4 to 45 63 3 to 14.9 X3 4 to 45 D2 = L1 = C2 = C 80 Y3 3 to 16.9 4 to 53.5 80 3 to 16.9 X3 4 to 53.5 X = 100 Y4 3 to 24.9 5 to 65 100 3 to 24.9 X4 5 to 65 80 Simple Specials Series CRB1 Axial: Top (Long-shaft side) Axial: Bottom (Short-shaft side) Symbol: A45 Symbol: A46 The short
9 @0 @1 @2 @3 q w e r t y u i o !0 !2 A A-A' Piston rod section A' !1 !3 !4 Component Parts Note Description Material No.
5 #6 q t #8 !4 !7 @2 @3 @4 r y e #7 u o !1 i w !8 #4 !6 A @0 @1 !9 #2 !0 #1 A' For ball bushing #5 @5 #0 @8 !7 @6 !3 #8 !2 @1 !0 @9 For slide bearing y For long stroke For 100 @7 For 80, 100 View A-A' Parts list Parts list No. Description No.
A XLAV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLAV-16-2 41 18.5 8.5 2.7 3 XLAV-25-2 45.5 22.5 8.5 2.7 3 XLAV-40-2 54.5 35 8.5 2.7 3 XLAV-50-2 61 39.5 8.5 2.7 3 XLAV-63-2 80.5 44 12 4 2 XLAV-80-2 90.5 60 12 4 2 6 Aluminum High Vacuum Angle Valve Double Acting, Bellows Seal RoHS XLC Series How to Order q w e r t y u XLC 2 M9N 16
9i @2 q r @8#9 $0 $2 w $3 #8 @9 A C B !3 !4 #4 $1 e$8 o $7 !1@1 !6 @5 u !0 $6#6#5 $4 y#8 @6 #3 Section B Section C Section A !2 !2 #1 #0 !2 32 100 80 63 50 40 80, 100 80, 100 Parts list Parts list No. No.