Symbol: Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type, Function: Power-saving Circuit, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Bracket, Lead Wire Length: 300mm, CE Compliant: CE Compliant

Table of Contents

Types 10, 20 Types 10, 20 VVDW 0 2 C 1 01 2 VVDW 2 0 4A Series Series 1 2 10 20 1 2 10 20 Thread type VC Rc G NPT Nil F N Material VDW C S C37 SUS Type 30 VQ VVCW20-4A OUT port size Stations Symbol M5 01 Port size M5 1/8 (6A) For 2 stations For 3 stations 1 2 VX2 VX Type 10 is M5 only.

1

x 0.8 12 10 12 10 1 (P) 3 (R) 1 (P) XT34 Poppet VM200 2 port 3 port (A) 2 (A) 2 Side ported 1/4 Page 337 12 12 10 10 1 (P) 3 (R) 1 (P) VM400 3 port (OUT) 2 3 10 12 1 (N.C.)

SY

SS5Y71, #1 L type plug connector . SS5Y71, #1 + #10 M type plug connector .

Air Slide Table

MXQA-A2087 47 4.4 17 6 10 36 11.2 16.2 M12 x 1 M6 x 12 MXQ25(A) MXQA-CS25 MXQA-CT25 MXQA-A2587 54 5.5 19 6 11 44 13.5 19.3 M14 x 1.5 M8 x 16 MXQ8B MXQB-CS8 MXQB-CT8 MXQB-A887 35 2 10 4 6.5 24 7.1 10.4 M8 x 1 M4 x 8 6.8 MXQ12B MXQB-CS12 MXQB-CT12 MXQB-A1287 40 2.8 12 5 8 29.4 9.2 12.6 M10 x 1 M5 x 10 8.8 MXQ16B MXQB-CS16 MXQB-CT16 MXQB-A1687 47 3.6 17 6 10 36 11.2 16.2 M12 x 1 M6 x

2/3 Port Valve

C.O. 4 220V AC 50/60Hz 1 6A 8A 10A 10A 15A 20A 25A 32A 40A 50A 1 8 1 4 3 8 3 8 1 2 3 4 10 5 24V DC 6 12V DC 7 240V AC 50/60Hz 15 2 9 Other 20 3 Option 25 4 1 1 1 2 Valve size 5 to 7 32 5 1 4 1 2 40 6 50 7 Note) Only air operated type.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Port size M5 x 0.8 10-SY3000 SY3000-38-20A 10-SY5000 SY5000-38-1 A 10-SY7000 SY7000-38-1 A EXH port (Both sides) E5 5 10-SY3000 SY3000-39-20A 10-SY5000 SY5000-39-1 A 10-SY7000 SY7000-39-1 A 1 8 1 4 10-SY9000 SY9000-39-1 A 1 4 1 8 1 4 10-SY9000 SY9000-38-1 A 1 4 P1 1 SUP port Note) In case of types 20P and 23P, for protection of the wiring unit section from drainage, piping at the EA

VDW

Types 10, 20 Types 10, 20 VVDW 0 2 C 1 01 2 VVDW 2 0 4A Series Series 1 2 10 20 1 2 10 20 Thread type VC Rc G NPT Nil F N Material VDW C S C37 SUS Type 30 VQ VVCW20-4A OUT port size Stations Symbol M5 01 Port size M5 1/8 (6A) For 2 stations For 3 stations 1 2 VX2 VX Type 10 is M5 only.

Table of Contents

Description Pilot valve assembly AXT627-42-1(M5 x 50) AXT627-10-1 VFR51 AXT627-10-1 VFR52 AXT627-42-1(M5 x 50) AXT627-10-1 VFR53/54/55 NBR Hexagon socket head screw Gasket i AXT627-42-1(M5 x 50) Refer to How to Order Pilot Valve Assembly on page 3-5-78. Steel o !

VDW Series

Types 10, 20 Types 10, 20 VVDW 0 2 C 1 01 2 VVDW 2 0 4A Series Series 1 2 10 20 Thread type 1 2 10 20 Rc G NPT Nil F N Material Brass Stainless steel C S Type 30 OUT port size Stations VVCW20-4A Symbol M5 01 Port size M5 1/8 (6A) For 2 stations For 3 stations 1 2 Type 10 is M5 only.

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

Types 10, 20 Types 10, 20 VVDW 0 2 C 1 01 2 VVDW 2 0 4A Series Series 1 2 10 20 Thread type 1 2 10 20 Rc G NPT Nil F N Material Brass Stainless steel C S Type 30 OUT port size Stations VVCW20-4A Symbol M5 01 Port size M5 1/8 (6A) For 2 stations For 3 stations 1 2 Type 10 is M5 only.

42

(Including r and t) Manifold Block Assembly SQ Replacement Parts VFS VVQ5000 1 No. Part no. Description Material Q'ty VFR VVQ5000-80A-1 Gasket HNBR 10 Type VVQ5000-80A-2 Gasket HNBR 10 Option VQ7 A For 1 station Note) Spare parts consist of sets containing 10 pcs. each.

VCL

(mm) 2 4 3 5 7 10 1/8 (6A) V V V V 2 1/4 (8A) V V V V 1/4 (8A) V V V V 3 3/8 (10A) V V V V V 1/2 (15A) V 1/4 ( 8A) V V V V Available types of electrical entry are either G, C and T.

SQ1000/2000

COM COM 1A 2A 3A 4A 5A 6A 7A 8A 9A 10A COM 25 26 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B COM COM 1 2 3 4 5 6 7 8 9 10 11 12 13 23 24 14 15 16 17 18 19 20 21 22 23 24 25 21 22 19 20 19 20 19 20 17 18 17 18 17 18 15 16 15 16 15 16 13 14 13 14 13 14 11 12 11 12 11 12 9 10 9 10 9 10 7 8 7 8 7 8 5 6 5 6 5 6 3 4 3 4 3 4 COM 1 2 1 2 1 2 COM COM T kit Terminal block (SQ2000 only) J kit Flat ribbon cable connector

5 Port Solenoid Valve

10 (M4 x 34) 2 VP4 Valve + Restrictor spacer (VVQ5000-20A-1 5 ) q AXT632-25-5 (M4 x 82) 4 VQ 1/2 q w w AXT632-25-10 (M4 x 34) 2 Not necessary when mounting the sub-plate.

Vacuum System Peripherals:

8, R 10, R 10, R 10, R 6 8 10 4 6 KM11 6, 10 One-touch fitting One-touch fitting 1 4 3 8 KM12 6, 10 One-touch fitting Rc KM13 3 One-touch fitting One-touch fitting KM11 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 4 One-touch fitting R male thread KM12 KM14 3 One-touch fitting KM15 KM15 3 One-touch fitting One-touch fitting rod KM16 KM14 KM16 One-touch fitting 3 One-touch fitting KM13 Miniature fittings

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

8 (6A) 1 8 (6A) 320 4.5 2 300 3 3 1.0 7.9 0.33 500 320 500 660 500 660 1 4 (8A) 4.5 15 0.61 470 620 470 620 560 700 560 700 470 470 620 470 620 560 700 560 700 560 700 4.5 0.61 15 1 4 (8A) 1.0 6 1.1 26 6 1.1 26 8 1.6 38 3 0.33 7.9 0.5 500 10 4.5 0.61 15 1.9 46 3 8 (10) 660 500 660 3 7.9 0.33 6 1.1 26 4.5 0.61 15 1.0 Note) Weight of grommet type.

V100

Example: SS3YJ5-20-03 .1 set (Manifold base) SYJ512-5LZ-M5.2 sets (Valve) SYJ500-10-1A.1 set (Blanking plate assembly) SS3YJ5-41R-03-C6 . 1 set (Manifold base) SYJ514R-5G.2 sets (Valve) SYJ500-10-3A .1 set (Blanking plate assembly) The asterisk denotes the symbol for assembly.

Compact 5-Port Solenoid Valve

COM. 13 14 13 14 11 12 11 12 9 10 9 10 9 10 7 8 7 8 7 8 5 6 5 6 5 6 3 4 3 4 3 4 1 2 1 2 1 2 (P, PC: 26 pins) (PG, PGC: 20 pins) (PH, PHC: 10 pins) A mixture of single and double wiring can be specified on the manifold specification sheet. The maximum number of stations is determined according to the number of solenoids.

2/3 Port Valve

215 25 1 12 1,550 25 1 VXZ2362-10 0.7 0.7 0.6 0.7 0.6 0.6 Note 1) Values for the grommet style.