Service life (based on SMC test conditions) is 10 million cycles or more.Orifice diameter of LVM11: 1.5mm, Orifice diameter of LVM10: 1.4mm , Available with power-saving circuit , 2 port N.C. or N.O. types; 3 port Universal type , Diaphragm choice of EPDM, FKM or Kalrez« , Wetted part material: PEEK or PFA (body/plate), CHEMICAL VALVE, CHEMICAL VALVE, 2 PORT, B07, 0.034 lb

Service life (based on SMC test conditions) is 10 million cycles or more.Orifice diameter of LVM11: 1.5mm, Orifice diameter of LVM10: 1.4mm , Available with power-saving circuit , 2 port N.C. or N.O. types; 3 port Universal type , Diaphragm choice of EPDM, FKM or Kalrez« , Wetted part material: PEEK or PFA (body/plate), CHEMICAL VALVE, CHEMICAL VALVE, 2 PORT, B07, 0.034 lb

Service life (based on SMC test conditions) is 10 million cycles or more.Orifice diameter of LVM11: 1.5mm, Orifice diameter of LVM10: 1.4mm , Available with power-saving circuit , 2 port N.C. or N.O. types; 3 port Universal type , Diaphragm choice of EPDM, FKM or Kalrez« , Wetted part material: PEEK or PFA (body/plate), CHEMICAL VALVE, CHEMICAL VALVE, 2 PORT, B07, 0.034 lb

Service life (based on SMC test conditions) is 10 million cycles or more.Orifice diameter of LVM11: 1.5mm, Orifice diameter of LVM10: 1.4mm , Available with power-saving circuit , 2 port N.C. or N.O. types; 3 port Universal type , Diaphragm choice of EPDM, FKM or Kalrez« , Wetted part material: PEEK or PFA (body/plate), CHEMICAL VALVE, CHEMICAL VALVE, 2 PORT, B07, 0.034 lb

Service life (based on SMC test conditions) is 10 million cycles or more.Orifice diameter of LVM11: 1.5mm, Orifice diameter of LVM10: 1.4mm , Available with power-saving circuit , 2 port N.C. or N.O. types; 3 port Universal type , Diaphragm choice of EPDM, FKM or Kalrez« , Wetted part material: PEEK or PFA (body/plate), CHEMICAL VALVE, CHEMICAL VALVE, 2 PORT, B07, 0.034 lb

5-Port Solenoid Valve

SY5000221-5A (2 pcs.) SY7000221-5A (3 pcs.) B B C Individual SUP (EXH) spacer assembly C A Valve q: SY3000-23-32A w: SY5000-221-3A e: SY7000-221-3A Individual SUP (EXH) spacer assembly A SY300023-32A (2 pcs.) SY5000221-3A (2 pcs.) SY7000221-3A (3 pcs.)

1

22 mA Note 2) 15 V Max. rated input signal 50 100 k Input impedance 0.05% F.S.

Table of Contents

VJ10-20-4A-6 2 pcs. Ordering example) ZX1051-K15LOECN 1 pc. VJ10-20-4A-6 2 pcs. ZS-10-5A-50 1 pc. (For 110 VAC) 3A 36 VJ10 6 Ejector System/Recommended Model (The models below will have shorter deliveries.)

0.4

-AXA 15 V 22 mA Note 2) Max. rated input signal 50 100 k Input impedance 0.05% F .S.

SQ1000/2000

(K) (Y) 5 6 5 6 5 6 u 4 For single VQ110LJ2-1 Negative COM: VQ110NJ2-1 5 For double (latching) SQ1C41 SQ1B41 SQ1A41 4 2 4 2 4 2 For double (double solenoid) on A side (K) (Y) 5 6 6 VQ110 (N)J3(B)-1 For 3P, dual 3 port on A side N.C. N.C. N.O. N.O. 1 5 3 1 5 3 N.O.

42

2) x G1/2 Conduit port SYJ M5 x 0.8 Ground screw 10.7 SZ U side 1/4" 4(A), 2(B) port 129.5 106 47 94.7 9 9 71.7 VF VP4 27 36.1 X 12 X 12 n VQ 1/2 B A 8 VQ 4/5 VQ 4/5 2 4 B A 7 VQC 1/2 2 B 2 B 2 B 2 B 2 B 2 B 4 6 A A A A A A B B B B B B VQC 4/5 1/4" Note) 5 SMC SMC SMC SMC SMC VQZ L2 L1 4 SQ 3 VFS VFR 2 P = 25 44 VQ7 1 2 50.5 Stations 38 D side 27 11.7 80.8 47.7 43.2 1/8" External pilot port

0.4

single 2(B) (A)4 1 F (R1)5 1 (P) 3(R2) kit 2 position double (Double solenoid) (1) 2(B) (A)4 2(B) (A)4 P 2 Lead wire is not included.

C85

C76 1 1 1 1 1 1 2 1 1 2 1 2 1 2 1 q y u i o !0 !1 !2 !3 (Switch type only) 2C C85 2D (2 for switch type) e r C95 5A CP95 (Switch type piston) 5B Nickel plating NCM C85RA B20/25 NCA D!6 i y !4 u q r e !1 t !5 !3 !0 !2 o 2C 2D !

C85

C76 1 1 1 1 1 1 2 1 1 2 1 2 1 2 1 q y u i o !0 !1 !2 !3 (Switch type only) 2C C85 2D (2 for switch type) e r C95 5A CP95 (Switch type piston) 5B Nickel plating NCM C85RA B20/25 NCA D!6 i y !4 u q r e !1 t !5 !3 !0 !2 o 2C 2D !

5 Port Solenoid Valve

VQZ n 6 5 4 3 2 D side U side Stations 1 1/8" PE. port SQ 3/4" 1(P), 5(R1), 3(R2) port 1/2" 3(R) port VFS 2 x M12 M5 x 0.8 Ground screw 4 x M8 VFR 117 B B 2 B 2 B 2 B 2 2 B B 2 2 0 0 BUS 19 3 1 69 55.5 53.7 1 60 12 X 51 1 2 VQ7 PWR 3 A 4 A 4 A 4 A 4 A 4 A 4 A 4 22 17 15.5 34 2 x M12 M3 69.5 34.5 1/2" 1(P) port 48 3/8", 1/2" 4(A), 2(B) port 68.5 1/8" External pilot port Note) The dimensions

AC Servo Motor Driver

OPTIONS AND AUXILIARY EQUIPMENT (3) Outline drawing (a) EMC filter HF3010A-UN [Unit: mm] 3-M4 4-5.5 7 3-M4 M4 32 2 110 4 85 2 IN Approx.41 258 4 65 4 273 2 288 4 300 5 HF3030A-UN HF-3040A-UN 6-K 3-L 3-L G 1 F 2 E 1 D 2 M J 2 C 1 C 1 H 2 B 2 A 5 Dimensions [mm] Model A B C D E F G H J K L M HF3030A-UN 260 210 85 155 140 125 44 140 70 R3.25, M5 M4 length 8 HF3040A-UN 260 210 85 155 140 125

5 Port Solenoid Valve

For mixed single and double wirings, enter -K to the order code options. Note 2) For SI unit part number, refer to page 76.

Compact 5-Port Solenoid Valve

68.6 D D B 2 S B 2 B 2 B 2 B 2 1 P P 1 A 4 A 4 A 4 A 4 A 4 * These figures show the JJ5SY3-10F2-05DR-C8.

SY

Scale: 25% For external pilot specification (Pitch) P = 24 24.3 22.2 11 18.3 18.8 39.3 18.8 3/5 R 3/5 R A 4 A 4 A 4 A 4 18 A 4 A 4 3/5 R 3/5 R A 4 A 4 A 4 A 4 39.3 40.1 A 4 A 4 63.3 79.8 1 P 1 P B 2 B 2 B 2 B 2 B 2 B 2 2-Plug [1 (P), 3/5 (R) port] 1 P 1 P B 2 B 2 B 2 B 2 B 2 B 2 2-One-touch fitting [1 (P), 3/5 (R) port] Applicable tube O.D.: 12 2n1-One-touch fitting [4 (A), 2 (B) port] Applicable

VQ4000

A A 215 15 P = 25 44 L1 L2 B 2 A 4 5 B 2 A 4 5 L1 L2 B 2 A 4 26.5 38 50.5 P = 25 4 26.5 38 50.5 P = 25 B 2 A 4 4 B B Indicator light B B B 2 A 4 3 B 2 A 4 3 P = 25 B 2 A 4 2 B 2 A 4 2 B 2 A 4 1 B 2 A 4 1 44 Stations X Indicator light Manual override Stations U side D side U side D side 12 16.5 43.5 12 16.5 43.5 D side entry (LD) AMC610-10 Exhaust cleaner 29 215 AMC610-10 Exhaust cleaner