Air Fittings & Tubing

8 1 4 3.2 10 14 8 8 10 14 10 10 12 14 17 15.5 3.4 2.9 M5 X 0.8 M6 X 1.0 12.7 13.9 8 4 4 4 1 8 1 4 18 13.5 14.7 14.9 18.5 17 15.5 24 20.5 15.5 26 27.5 22.5 19 28.5 23.5 22 33 27.5 5.6 4 16 M5 X 0.8 M6 X 1.0 10 4 4 13.5 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 6 13.1 10.4 17 14 8 26.1 18.0 18.5 17 26.1 26.1 17 21 10 3 8 41.5 29.5 22 1 2 1 4 19 12 3 8 22 58.3 46.1 30 22 1 2 81 (81) 113

rep-modular-e

9 @0 @1 @2 @3 @4 @5 @6 @7 @8 @9 #0 #1 #2 #3 #4 #5 #6 #7 #8 Diaphragm Body 1 1 Chromate treatment Spring Diaphragm shell 2 1 Zinc chromate treatment Zinc chromate treatment Diaphragm shell Diaphragm 1 1 Chromate treatment Washer Valve spring 1 1 Spring holder Chamber 1 1 Chromate treatment Zinc chromate treatment Diaphragm shell holder Seal 1 1 Stem O-ring 1 1 JIS B2401 P7 Valve O-ring 1 1

Modular Pressure Control Equipment F.R.L. Replacement Procedure

9 @0 @1 @2 @3 @4 @5 @6 @7 @8 @9 #0 #1 #2 #3 #4 #5 #6 #7 #8 Diaphragm Body 1 1 Chromate treatment Spring Diaphragm shell 2 1 Zinc chromate treatment Zinc chromate treatment Diaphragm shell Diaphragm 1 1 Chromate treatment Washer Valve spring 1 1 Spring holder Chamber 1 1 Chromate treatment Zinc chromate treatment Diaphragm shell holder Seal 1 1 Stem O-ring 1 1 JIS B2401 P7 Valve O-ring 1 1

2

Connection thread Metric 2, 3.2, 4, 6, 8 M3 x 0.5, M5 x 0.8, M6 x 1.0 Metric 3.2, 4, 6, 8, 10, 12, 16 M5 x 0.8 R, Rc, G1/8, 1/4, 3/8, 1/2 10, 12, 16 R, Rc1/8, 1/4, 3/8, 1/2 Inch 1/8", 5/32", 1/4", 5/16" 3/8", 1/2" 10-32UNF NPT1/8, 1/4, 3/8, 1/2 1/8", 5/32", 3/16", 1/4" 10-32UNF 5/16", 3/8", 1/2" NPT1/16, 1/8, 1/4, 3/8, 1/2 Inch 1/8", 3/16", 1/4" 5/16", 3/8", 1/2" M5 x 0.8 R, Rc1/8, 1/4, 3

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

10 [V] 10 [V] 10 [pulse] 10 [pulse] 0 0 10 [pulse] 10 [pulse] -10 [V] -10 [V] CW direction CW direction App. 20 APPENDIX Setting value Output item Description Setting value Output item Description 0A Feedback position (Note 1, 2, 3) (10 V/1 Mpulse) 0B Feedback position (Note 1, 2, 3) (10 V/10 Mpulse) CCW direction CCW direction 10 [V] 10 [V] 1 [Mpulse] 10 [Mpulse] 0 0 1 [Mpulse] 10 [Mpulse

Table of Contents

1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111 14-3-9 10 Series AV2000/3000/4000/5000 Connecting Spacer for Modular Style F.R.L.

LEC-OM07605CN

(2) (10.2) 50 [ms] 40 30 T8 T9 20 T7 10 T6 T5 0 0 1000 2000 3000 4000 5000 6000 [r/min] LE-T10.3.2 [] LE-T5LE-T6LE-T730 LE-T8LE-T910 6 10. 10.4 a 1 10 8 5 10 7 1 10 7 5 10 6 a: [ms] 1 10 6 5 10 5 b: SSCNET 1 10 5 5 10 4 1 10 4 b 5 10 3 1 10 3 4 7 10 20 40 70 100 200 [mm] 10.5 2500kVA1mAC240V()LECSS2T5LECSS2-T9AC200V (A0-P) (L1L2L3) (L11L21) LECSS2-T5LECSS2-T7 LECSS2-T8

VFR

Description Pilot valve assembly AXT627-42-1(M5 x 50) AXT627-10-1 VFR51 AXT627-10-1 VFR52 AXT627-42-1(M5 x 50) AXT627-10-1 VFR53/54/55 NBR Hexagon socket head screw Gasket i AXT627-42-1(M5 x 50) Refer to How to Order Pilot Valve Assembly on page 3-5-78. Steel o !

VFS

Description Material Return spring Gasket Stainless steel NBR VFS5000-9 AXT627-10-1 AXT627-10-1 AXT627-18 AXT627-10-1 o !0 !1 Hexagon socket head screw Steel M5 x 50 M5 x 50 M5 x 50 !2 Detent assembly AXT510-9 Refer to How to Order Pilot Valve Assembly on page 3-8-86. Pilot valve assembly !

Stability of suction position,

Tube I.D. 9 10 8 7.5 6.5 6 Equivalent conductance [dm 3/(sbar)] B 4 5 2 4.5 4 ZP3 1 ZP3E ZP3E 0.6 3 2.5 0.4 2.18 ZP2 2 0.2 ZP2V 0.1 ZP 0.06 A ZPT ZPR 0.04 0.5 1 5 10 20 2 3 XT661 Tube length [m] How to read the graph Example: Tube size 8/6 and 1 meter length By extending leftward from the point at which the 1 meter tube length on the horizontal axis intersects the line

Filter Regulator IW Series

Description Material y Stainless steel 1301-002 1301-1202 1301-2502 1301-902 6 Pilot valve Stainless steel/NBR 1301207#1 1301207#1 u 7 Element Bronze 1301-5B 1301-5B !

With Factory Installed

Part no. oescriP~del AR2001 I AR2501 I AR3001 I AR4001 Bracket B220 I B220 I B320 1 B420 GC30-10 I 1.0MPa 1 1 Okgf/cm2 1 GC30-2 I 0.2MPa 12.0kgflcm21 Gauge How to Order Symbol Rc(PT) Optional specifications N NPT Regulator 1 O.2MPa [2.0kgf/cm21 setting F G (PF) N Non-relieving R IN-OUT reversal Body size When specifying more than one option, please list numerically then alphabetically.

AC Servo Motor Driver (Network card type ）

: +8 V/800 V) _ _ 0 E Speed command 2 (8 V/max. speed) _ _ 1 0 Load-side droop pulses (10 V/100 pulses) (Note 2) _ _ 1 1 Load-side droop pulses (10 V/1000 pulses) (Note 2) _ _ 1 2 Load-side droop pulses (10 V/10 pulses) (Note 2) _ _ 1 3 Load-side droop pulses (10 V/10 pulses) (Note 2) _ _ 1 4 Load-side droop pulses (10 V/1 Mpulses) (Note 2) _ _ 1 5 Servo motor-side/load-side position deviation

AC Servo Motor Driver (Pulse input type/Positioning type ）

frame 10 A 20 Note 1.

KJ

Note 1) D: Max. diameter Note 2) ( ): Values for soft nylon. 13.6 18 13.5 16.7 22 19.5 17 18 22 19.5 17.8 19 14.7 14.9 22.5 23 22 28 26.5 22 30 33.5 29 27 34.5 12.7 7 7 1 8 1 4 3.2 10 14 8 8 10 14 10 10 12 14 17 15.5 3.4 2.9 M5 x 0.8 M6 x 1.0 13.9 12.7 8 4 4 4 1 8 1 4 18 13.5 5.6 4 16 M5 x 0.8 M6 x 1.0 Connection thread 13.5 10 4 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 6 18.5 17 15.5 24 20.5

Table of Contents

ON-flow 0.04 40 B p ipe pe 3/4 B p pi 3B 30 1 0.03 2B, pipe 20 0.02 , 5B , 4B pe 1/4 1 B pi 10 Max.

Proposals for Energy Saving

type (without silencer) 10/Rc 1/4 8/Rc 1/8 Threaded Threaded 6/Rc 1/8 6/Rc 1/8 6/Rc 1/8 6/Rc 1/8 10/Rc 1/4 6/Rc 1/8 8/Rc 1/8 10/Rc 1/4 12/Rc 3/8 12/Rc 3/8 8/Rc 1/8 10/Rc 1/4 12/Rc 3/8 12/Rc 3/8 16/Rc 1/2 16/Rc 1/2 Refer to page 3.4-1 of No. 3 for details.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

VQ 0 5 1 1 0 1 10 CE compliant Series 10-VV5Q11-08C6SV 10-VQ1100-51 10-VQ1200-51 10-VQ1300-51 VVQ1000-10A-1 1 setManifold base part no. 2 setsValve part no. (Stations 1 to 2) 4 setsValve part no. (Stations 3 to 6) 1 setValve part no. (Station 7) 1 setBlanking plate part no.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

VQ 0 5 1 1 0 1 10 CE compliant Series 10-VV5Q11-08C6SV 10-VQ1100-51 10-VQ1200-51 10-VQ1300-51 VVQ1000-10A-1 1 setManifold base part no. 2 setsValve part no. (Stations 1 to 2) 4 setsValve part no. (Stations 3 to 6) 1 setValve part no. (Station 7) 1 setBlanking plate part no.

KR

(mm) A Weight (g) L D M Model Soft nylon Urethane KAH23-M5 17 8.5 14 13 2.1 M5 x 0.8 M6 x 1 7 17.5 12.5 8.5 3.4 2.9 4 Applicable tubing 1 8 KAH23-M6 KAH23-U01 8 10 3.2 KAH04-M5 17 M5 x 0.8 M6 x 1 9.5 14 13 2 4 4 8 KAH04-M6 17.5 4 1 8 KAH04-U01 13.5 18.5 5 14 10 10 16 5.6 5.6 K 1 4 KAH04-U02 16.5 10.5 10 KAH06-M5 18.5 M5 x 0.8 M6 x 1 15 14 4 4 11.5 3 10 KAH06-M6 19 Connection