Thermo-chiller

water inlet (Water-cooled refrigeration) 8 1 Fluid supply Automatic fluid fill port 2 2 6 Circulating fluid outlet 1 User's equipment 2 2 Circulating fluid return port 3 4 Overflow port To wastewater collection pit Tank drain port 5 Ensure that the overow port is connected to the wastewater collection pit in order to avoid damage to the tank of the thermo-chiller.

energy saving effect

2 6 Circulating fluid outlet 1 Users equipment 2 2 Circulating fluid return port 3 4 Overflow port To wastewater collection pit Tank drain port 5 2 8 7 Water-cooled refrigeration Facility water inlet 1 Facility water equipment 7 2 Facility water outlet * Ensure that the overflow port is connected to the wastewater collection pit in order to avoid damage to the tank of the thermo-chiller.

2.0

Pinch Valve Solenoid Type RoHS Power consumption Applicable tubing 2.0 W 2 Silicone PharMedBPT 1, Tygon 1 2 Built-in power saving circuit (Refer to page 2.) 2 Excludes 6 and 1/4" Size (O.D.) Metric 3, 4, 6 Inch 1/8", 5/32", 1/4" Compact 20 mm Valve width Valve type N.C. (Normally in clamping position) N.O.

Table of Contents

6/Rc 1 8 6/Rc 1 8 ZH07B ZH10B ZH13B ZH05D ZH07D ZH10D ZH13D ZH15D ZH18D ZH20D 12/Rc 3 8 Body ported type (Without silencer) 8/Rc 1 8 10/Rc 1 4 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 8/Rc 1 8 8/Rc 1 8 10/Rc 1 4 10/Rc 1 4 3 8 12/Rc 10/Rc 1 4 12/Rc 3 8 12/Rc 3 8 16/Rc 1 2 16/Rc 1 2 13-5-2 3 Series ZH Vacuum Ejector: Box Type (Built-in Silencer)/Body Ported Type Ejector JIS Symbol Body

LEC-OM07605CN

PA09]) 6 2 6 (2) Yes 2 1 () 2 No Yes No Yes No No 1 Yes Yes OK? No 2 Yes OK? No No OK? 2 2 Yes Yes OK?

One-touch Fittings

9 1/2 15 to 30 14 to 15 2) The gasket can be reused up to 6 to 10 times.

HRX-OM-W060

commercial losses) (6) Expenses and compensation not covered in 2.

Digital Flow Switches

1 2 3 4 7 3 Load +0.5 0 Brown 19.4 6 2 + 36 Blue 5 1 12 to 24VDC 5 6 7 8 Series PF2W5 PF2W31-A The applicable panel thickness is 1 to 3.2mm.

PF2A/PF2W

View A Data Terminal block number 4 3 2 1 1 2 3 4 5 6 7 8 8 7 6 5 16-11-25 22 For details about certified products conforming to international standards, visit us at www.smcworld.com.

Series PF2W Digital Flow Switch For Water

40.3 Load OUT2 40 4.3 8 4 Sensor input Load Black OUT1 Main circuit Main circuit 7 3 Sensor Sensor Brown DC(+) DC(+) 2 6 + SMC FLOW SWITCH Blue DC() DC() 1 5 12 to 24 VDC 35.8 A 40 UNIT RESET -1 PNP (2 outputs) SET Load OUT2 8 4 3 x 7.2 (= 21.6) 8 x M3 Sensor input Load Black OUT1 7 3 6.4 Brown DC(+) DC(+) 2 6 + Blue DC() DC() 1 5 1 2 3 4 12 to 24 VDC 19.4 Terminal block numbers 5 6 7

PFA/PFW

unit DIN rail 8-M3 3 x 7.2 ( = 21.6) 36 2-3.4 6.4 15 1 2 3 4 6.5 26 FLOW SWITCH SMC 35.5 m30 56 (4.5) 44 UNIT RESET SET 5 6 7 8 29 38 15.2 7 Series PFA Digital Flow Switch for Air Dimensions (mm)/ Separate Type For Air 1in=25.4mm Scale: 70 % PFA5 0-m m (N) 1 5 Sensor Unit 98 56 82 60 42 6 17 1.6 48.2 34 54 44 24 2-Piping port size 4-4.5 40 50 (43.5) 42 2 1 4 3 4 Connector pin numbers 43

VXD21/22/23

50A 50 2 0 17-3-33 2 The VX series will be revised shortly.

VXA21/22

IN MaterialO Model Body Seal Brass, Stainless steel NBR, FPM, EPR Orifice size (mm) Model Port size Rc(PT) VXA212 , 1 8 1 4 , 1 8 1 4 , 1 4 3 8 , 1 4 3 8 , 1 4 3 8 , 1 4 , 3 8 1 2 0 2 3 4.5 VXA213 0 2 VXA223 0 2 4.5 6 8 VXA224 0 2 VXA225 0 2 10 VXA226 0 2 4.1-57 VXA21/22 Normally Closed (N.C.)/Normally Open (N.O.)

VXP21/22/23

LVH Variations LVD LVQ Electrical entry Valve LQ 0 1 0 0 (2" 0 39% " " LVN 2" 39% TI/ TIL " "3 2" PA Model Solenoid coil PAX 3 5 6 ) $ 5 4 ! + PB 7/ VXP2130 Threaded type # 7 8! , :! 7 # , :! 7 Rated voltage 7. -/ VXP214 VXP215 VXP226 VXP227 VXP238 VXP239 Flange type 2 0 2 0 # , 8 3 7// ! -// 8: ! 77/ ! --/ !

VXZ

Refer to pages 17-6-3 to 17-6-10 for Safety Instructions and Solenoid Valve Precautions. 17-3-62 3 Series VXZ22/23 Pilot Operated 2 Port Solenoid Valve For Zero Pressure Differential Operation The VX series will be revised shortly. N.C.

VXR21/22/23

# $ VXR215 VXR226 VXR227 VXR238 2 0 Material 2 0 2 0 . ' + . / . 01$ 2 0 VXR239 2 0 17-3-53 2 The VX series will be revised shortly. Series VXR21/22/23 Normally Closed (N.C.)

33

6 0.04 0.04 4 4 Allowable operating range Allowable operating range Return port Return port 0.02 0.02 2 2 0.00 0.00 0 2 4 6 8 10 12 14 16 0 2 4 6 8 10 12 14 16 Circulating fluid flow rate [L/min] Circulating fluid flow rate [L/min] Option (-T): High Pressure Pump Mounted HRSE -A-10-T 012 018 012 018 024 Option (-T): High Pressure Pump Mounted HRSE -A-20/23-T 0.3 0.3 Circulating fluid pressure

VXA21/22

LVH LVD Table (1) Port/Orifice Size Table (2) Bracket Part No. Model Orifice size (No.) 2 (3 mm) 3 (4.5 mm) 4 (6 mm) 5 (8 mm) 6 (10 mm) Part no.

Clean Exhaust Filter

L/min (ANR) 11 M5 x 0.8 3 42 R1/8 65 52 R1/8 130 53 R1/4 130 73 R1/4 200 Symbol Port size Max. flow capacity L/min (ANR) 3A 4 30 4B 6 65 5C 8 130 7D 10 200 Male thread type One-touch fitting type Symbol Applicable tubing O.D.

VXA31/32

Port R Operating Fluid and Ambient Temperature Operating fluid temperature (C) (3) Vacuum Ambient temperature (C) Temperature conditions Air (Standard) Oil (Standard) (V) Port P Port A Maximum Minimum 60 5 (1) 40 5 40 40 5 5 (2) Note 1) Dew point: 5C or less Note 2) 500 cSt or less Note 3) V in parentheses is option symbol. Option Material No.