VXA21/22

Refer to table q for configuration.

Series PF2W Digital Flow Switch For Water

DC+ 1 Brown q N.C. 2 Not used w DC 3 Blue e IN: 1 to 5 V 4 White r Power supply/Output connector (8P) Power supply/Output connector (accessory) i u y t r e w q Pin No. Pin no. Terminal 7 Green CH4_OUT1 8 Yellow N.C.

PF2A/PF2W

These vortexes are stable under certain conditions, and their frequency is proportional to the flow velocity, resulting the following formula. f = k x v f: Frequency of vortex v: Flow velocity k: Proportional constant (determined by the vortex generator's dimensions and shape). Therefore, the flow rate can be measured by detecting this frequency.

2.0

LPV22 (N.O.) y y r r t i t u u o e e w w q q Component Parts No.

VXD21/22/23

59 59 60 P Port size Rc VXD2140 Q R a b c d e f M L K J H F E D C B A N 69 (76) 77 (84) 87 (97) Q N 61 69 79 Q N 61 (68) 69 (76) 79 (89) N 61 (68) 69 (76) 79 (89) Normally open Normally closed VXD2142 , 30 30 35 59 59 62 57 74 81 34 51 58 29 37 43 34 43 47 20 20 23 92 92 95 104 (116) 26 44 59 66 28 35 40 3 8 8 14 23 39 47 47 48 39 65 78 86 42 46 56 52 56 66 63 80 90 3 8 1 2 32.5 118 (136)

LEC-OM07605CN

(2) ()40 10(555) (10.1) P A = (10.1) K T 2] A: [m P: [W] T: [] K: [56] (10.1),P 10.1A 10.1 40() () () 10.2 10 4 10. 10.3 101 1000 EM1(1) EM1(1) LECSS2-T 400W [Pr. PF06][Pr.

VXZ

VXZ2230 VXZ2232 VXZ2240 VXZ2242 VXZ2350 VXZ2352 VXZ2360 VXZ2362 H Y F X E W D U V C S T B K R A J N Q N 79.5 87.5 101.5 106.5 L 108 117 130 135 1 4 3 8 , 28 35 43 45 26 30 38 43 14 17 22 22 7.5 8.5 9 9 24 33 42 47 1.6 2.3 2.6 2.6 22 28 36 42 5.5 6.5 6.5 6.5 40 52 65 70 6 7 7 7 11 14 18 21 93 102 115.5 120.5 25 25 28 28 89 97 112 117 67 75 87 92 50 63 80 90 23 23 25.5 25.5 35 35 40 40 25.5

1

0 w o u q!1 !4 JA MXH MXQ CDJ2RA10/16-SZ-B MGP CY CX CJ2RA-TZ CK1 !3 r e !2 yit!0 w o u q !5 !1 !4 C(L)K C(L)KU CKQ CDJ2RA10/16-TZ-B CKZ2N WRF Component Parts No.

High Vacuum Angle Valve

N P R Port P (Pressure port) In case of double solenoid valve Port R (Exhaust port) Q K L M B EB EA P A In case of single solenoid valve Port R (Exhaust port) (mm) P K L M N Q R Model XLCV-50 XLCV-63 XLCV-80 12.5 9.5 9.5 1 1 23.5 52.6 17.4 9.5 9.5 1 1 18.6 62.3 23.5 9.5 9.5 1 1 12.4 70.8 Other dimensions are the same as the XLC.

ZP

H F K H F Width across flats 7 Width across flats 7 Hexagon width across flats 12 M8 x 1.25 Hexagon width across flats 12 M8 x 1.25 Hexagon width across flats 12 Hexagon width across flats 3 3 Y 2.5 2 A B A B Stroke 20 to 50 mm Stroke 20 to 50 mm Dimensions: 10 mm Stroke Dimensions: 10 mm Stroke (mm) (mm) Model A B C D F H I J K P Q: 6 Q: 8 Model A B C D F H I J K P Q: 6 Q: 8 Y K P K P ZPT20F10

Table of Contents

5 No. q w e r t y u i o !0 !11 !2 !33 !4 !5 !

Table of Contents

mm) A B C D E F G H J K L M N P Q Port size Model IDU3E IDU4E IDU6E 3/8 455 498 283 275 15 270 1/2 31 42 80 230 32 15 240 80 284 483 13 568 355 300 3/4 485 15 7 9 Series IDF/IDU E Option Specifications 1 Refer to pages 2 and 5 for How to Order of options.

NCQ8

Q J E D-rod Dia.

ZP

Construction Series ZPT Series ZPR Series ZPY r Buffer r Buffer y Adaptor e Adaptor e Adaptor r Buffer t Adaptor w Lock ring w Lock ring w Lock ring q Pad q Pad q Pad q Pad With buffer With buffer With buffer Component Parts Material Note No.

CRB2/CRBU2/CRB1

Applicable shaft type: K The long shaft can be further shortened by machining a middle-cut chamfer into it. (The position of the chamfer is same as the standard one.) (If shortening the shaft is not required, indicate "" for dimension X.) Applicable shaft types: J, K, T (mm) W1 X L1 max. L3 max. (mm) Shaft type J K T J K T J K T J K T Size Size Y W2 L2 max. L4 max.

CA2

7 i q r e y @2 t !8 !9 !6 !1 !2 !4 !5 !0 !

MGG

C 4-O D Q 2-P T U W E S K L B AA A X AB I J R AP Y + Stroke V Z + Stroke Non-locking type Locking type 8-AF AC AD AE With rod side locking Q Y + Stroke R With head side locking For standard strokes Dimensions not marked with an "" are the same as standard.

High Vacuum Angle Valve

0 Air operated, With solenoid valve XLAV e Indicator/Solenoid valve direction w Flange type q Flange size Symbol Indicator Solenoid valve direction F With indicator Size 16 25 40 50 63 80 Symbol Type Applicable flange size Nil KF (NW) 16, 25, 40, 50, 63, 80 D K (DN) 63, 80 Rear flange surface Left flange surface G Rear flange surface J Right flange surface K Without indicator Right flange

MNB

B2 H + Stroke A K AL A S + Stroke H Width across flats B1 ?? ??

2/3 Port Valve

effective area Q=11S P(P2+1.033).kg/h Equation in the domain of sonic flow Calculation by Cv factor Q=98.9Cv(p1+1.033).kg/h Calculation by effective area Q=5.51S(P1+1.033).kg/h 4.2-38 VND Flow Characteristics Water/VND 2 to 7 should be N.O. to suppress water hammer.