VQ5000 (mm) 1in 25.4mm Bottom port diagram 2-G3/4 Conduit port 2n-1/2 (ports A, B) 144.5 143 112.5 83.5 55.5 M5 ground screw 106 59.2 46.8 9 9 34.5 34 n U side 12 X B 2 A 4 6 B A B 2 A 4 5 B A B 2 A 4 SMC SMC SMC SMC 4 B A L2 L1 58.5 P=41 B 2 A 4 3 B A B 2 A 4 2 B A 34.5 48 68.5 P=41 B A 4 1 B A 2 X 12 Stations D side 42 16 107.8 179 15.5 22 51 69 117 2-1/8 (external pilot port) L n Dimensions
Q Q L2 L2 2 x N 2 x O Q Q Applicable tubing b Applicable tubing a Different Diameter Cross: KQ2TY Applicable tubing b Applicable tubing O.D.
Port size P, A port R port Model Effective area (mm2) (Cv) Flow characteristics C (dm 3/(sbar)) to VEX3 20 1 3 1 8 1 2 160 to 670 160 to 670 160 to 670 2.4 to 9.8 Air operated 1 2 24 VEX3 00 5 7 9 3 4 to 2 VEX3 21 1 3 to 1 8 1 2 2.4 to 9.8 Body ported External pilot solenoid valve 24 1 2 to 2 3 4 VEX3 01 5 7 9 VEX3 22 1 3 to 1 8 1 2 2.4 to 9.8 Internal pilot solenoid valve 24 1 2 to 2 3
2 !2 i i o o u u y y w w t t r r q q e e With buffer (Vacuum inlet: Vertical) With buffer (Vacuum inlet: Lateral) Component Parts No.
VQ1000/2000 Series VQ1000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w VQ1100 VQ1101 2(B) (A)4 2(B) (A)4 r r (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQ1201 VQ1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P
VJ10-20-4A-6 2 pcs. Ordering example) ZX1051-K15LOECN 1 pc. VJ10-20-4A-6 2 pcs. ZS-10-5A-50 1 pc. (For 110 VAC) 3A 36 VJ10 6 Ejector System/Recommended Model (The models below will have shorter deliveries.)
exhaust with silencer box: U side exhaust IP65 enclosure Model 5 VQ5000 O A Without SI unit With general type SI unit (Series EX300) (2) (2) Manifold Mitsubishi Electric Corp.: MELSECNET/MINI-S3 Data Link System (2) B 1 Plug-in unit (2) Mitsubishi Electric Corp.: MELSECNET/MINI-S3 Data Link System (2 power supply systems) BB (3) Stations (2) C D F1 J1 J2 K Q R1 R2 U V G H OMRON Corp.: SYSBUS
A A 215 15 P = 25 44 L1 L2 B 2 A 4 5 B 2 A 4 5 L1 L2 B 2 A 4 26.5 38 50.5 P = 25 4 26.5 38 50.5 P = 25 B 2 A 4 4 B B Indicator light B B B 2 A 4 3 B 2 A 4 3 P = 25 B 2 A 4 2 B 2 A 4 2 B 2 A 4 1 B 2 A 4 1 44 Stations X Indicator light Manual override Stations U side D side U side D side 12 16.5 43.5 12 16.5 43.5 D side entry (LD) AMC610-10 Exhaust cleaner 29 215 AMC610-10 Exhaust cleaner
power supply systems) EX124U-SDN1 EX124D-SDN1 Q OMRON: CompoBus/S (16 points, 2 power supply systems) EX124U-SCS1 EX124D-SCS1 R1 OMRON: CompoBus/S (8 points, 2 power supply systems) EX124U-SCS2 EX124D-SCS2 R2 JEMANET (2 power supply systems) EX124U-SJN1 EX124D-SJN1 U Mitsubishi Electric: CC-Link (2 power supply systems) EX124U-SMJ1 EX124D-SMJ1 V 47
(For details, refer to page 359.) 344 5 Port Solenoid Valve 10-SYJ7000 Construction (A)4 2(B) 2(B) (A)4 2 position single 2 position double 1 (P) (R1)5 3(R2) 3(R2) 1 (P) (R1)5 y e q t r q t r w w (B) 2 (A) 4 (A) 4 (B) 2 i i 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 (R2) 1 (P) u 3 position closed center/exhaust center/pressure center 3 position closed center 2(B) (A)4 t q r w 3(R2) 1 (P) (R1)5 (A) 4 (B
www.stevenengineering.com I FOR FURTHER TECHNICAL DETAILS ON THIS PRODUCT, REQUEST CATALOG REFERENCE E210 & N320 1.123 LINEAR ACTUATOR: COMPACT CYLINDER SERIES NCQ2/CQ2 A C C E S S O R I E S ( M M ) S E R I E S N C Q 2 / C Q 2 S I N G L E R O D C L E V I S ( R O D E Y E ) A C C E S S O R I E S ( M M ) S E R I E S N C Q 2 / C Q 2 D O U B L E R O D C L E V I S ( R O D E Y E ) CQ2 SINGLE ROD
Type 41P, 42P, 43P Blanking plate assembly Round head combination screw Gasket Series Assembly part no. 10-SY3000 SY3000-26-9A(-Q) 10-SY5000 SY5000-26-20A(-Q) 10-SY7000 SY7000-26-22A(-Q) 10-SY9000 Series Gasket assembly part no. SY3000-GS-2 SY5000-GS-2(-Q) SY7000-GS-2(-Q) Series Assembly part no.
Description No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !
Description Material Note q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No.
Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300
Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300
OO 3.24 5 . 1 2 8.01 Techn Vacuum System Specification (continued) 2.
OO 3.24 5 . 1 2 8.01 Technic Vacuum System Specification (continued) 2.
P (2) AXT100-2-F (2) AXT100-2-TB1 (4) AXT100-2-TB2 (4) SY SYJ q SX VK VZ VF U S U S U S w e r t U S VFR Note 1) S kit is composed of a flat cable housing ass'y (AXT100-2-PU20) of q SI unit and q P kit (20 pin).
When P2 + 0.1 b, choked flow P1 + 0.1 293 Q = 600 x C (P1 + 0.1) (1) 273 + t When P2 + 0.1 > b, subsonic flow P1 + 0.1 2 P2 + 0.1 b P1 + 0.1 Q = 600 x C (P1 + 0.1) 1 (2) 1 b 293 273 + t Q : Air flow rate [dm3/min (ANR)], dm3 (Cubic decimeter) of SI unit are also allowed to described by l (liter). 1 dm3 = 1 l .