Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Material Description Part number No. 4 5 10 NBR Gasket VVQ5000-80A-1 Type 10 NBR Gasket VVQ5000-80A-2 Option A 1 station Note) Spare parts consist of sets containing 10 pcs. each.

VQ5000

A Unused A Unused A Unused A Unused A Unused A B A B A B A B A B A A A B A B A B A A A A 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 6 7 8 9 10 11 12 13 14 15 0 0 1 2 3 4 5 Type SC OMRON Corporation SYSBUS Wire System Type SD SHARP Corporation Satellite I/O Link System ADDRESS NO. STATION NO.

Table of Contents

10 16 10 17 24 14 19 25 20 22 20 22.5 20.5 23 21.5 23.5 24.5 22.5 24.5 25.5 21 1 8 17.5 2.5 15.5 10 9.6 1 4 1 8 2-Applicable tubing 21.5 5 32 18 3 16 10.4 10 1 4 1 8 1 4 22.5 22.5 24 24.5 25 26 26.5 27 3 16 19.5 3.5 11.4 16.5 10 1 8 1 4 3 8 13.2 20.5 4.6 17 1 4 10 Connection thread 1 8 1 4 3 8 5 16 15.2 23.5 6 18.5 12 46 27 24 31 30 29.5 30 27 26.5 1 4 17.46 3 8 1 2 3 8 17.9 25.5 7 21 17

smcmaintenancepartslist

135211 Stainless steel 1 132656 13289 132713 Handle 10 ABS 13414 1 Note 1) Diaphragm is included.

Air Fittings & Tubing

8 1 4 3.2 10 14 8 8 10 14 10 10 12 14 17 15.5 3.4 2.9 M5 X 0.8 M6 X 1.0 12.7 13.9 8 4 4 4 1 8 1 4 18 13.5 14.7 14.9 18.5 17 15.5 24 20.5 15.5 26 27.5 22.5 19 28.5 23.5 22 33 27.5 5.6 4 16 M5 X 0.8 M6 X 1.0 10 4 4 13.5 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 6 13.1 10.4 17 14 8 26.1 18.0 18.5 17 26.1 26.1 17 21 10 3 8 41.5 29.5 22 1 2 1 4 19 12 3 8 22 58.3 46.1 30 22 1 2 81 (81) 113

rep-modular-e

9 @0 @1 @2 @3 @4 @5 @6 @7 @8 @9 #0 #1 #2 #3 #4 #5 #6 #7 #8 Diaphragm Body 1 1 Chromate treatment Spring Diaphragm shell 2 1 Zinc chromate treatment Zinc chromate treatment Diaphragm shell Diaphragm 1 1 Chromate treatment Washer Valve spring 1 1 Spring holder Chamber 1 1 Chromate treatment Zinc chromate treatment Diaphragm shell holder Seal 1 1 Stem O-ring 1 1 JIS B2401 P7 Valve O-ring 1 1

Modular Pressure Control Equipment F.R.L. Replacement Procedure

9 @0 @1 @2 @3 @4 @5 @6 @7 @8 @9 #0 #1 #2 #3 #4 #5 #6 #7 #8 Diaphragm Body 1 1 Chromate treatment Spring Diaphragm shell 2 1 Zinc chromate treatment Zinc chromate treatment Diaphragm shell Diaphragm 1 1 Chromate treatment Washer Valve spring 1 1 Spring holder Chamber 1 1 Chromate treatment Zinc chromate treatment Diaphragm shell holder Seal 1 1 Stem O-ring 1 1 JIS B2401 P7 Valve O-ring 1 1

2

Connection thread Metric 2, 3.2, 4, 6, 8 M3 x 0.5, M5 x 0.8, M6 x 1.0 Metric 3.2, 4, 6, 8, 10, 12, 16 M5 x 0.8 R, Rc, G1/8, 1/4, 3/8, 1/2 10, 12, 16 R, Rc1/8, 1/4, 3/8, 1/2 Inch 1/8", 5/32", 1/4", 5/16" 3/8", 1/2" 10-32UNF NPT1/8, 1/4, 3/8, 1/2 1/8", 5/32", 3/16", 1/4" 10-32UNF 5/16", 3/8", 1/2" NPT1/16, 1/8, 1/4, 3/8, 1/2 Inch 1/8", 3/16", 1/4" 5/16", 3/8", 1/2" M5 x 0.8 R, Rc1/8, 1/4, 3

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1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111 14-3-9 10 Series AV2000/3000/4000/5000 Connecting Spacer for Modular Style F.R.L.

LEC-OM07605CN

(2) (10.2) 50 [ms] 40 30 T8 T9 20 T7 10 T6 T5 0 0 1000 2000 3000 4000 5000 6000 [r/min] LE-T10.3.2 [] LE-T5LE-T6LE-T730 LE-T8LE-T910 6 10. 10.4 a 1 10 8 5 10 7 1 10 7 5 10 6 a: [ms] 1 10 6 5 10 5 b: SSCNET 1 10 5 5 10 4 1 10 4 b 5 10 3 1 10 3 4 7 10 20 40 70 100 200 [mm] 10.5 2500kVA1mAC240V()LECSS2T5LECSS2-T9AC200V (A0-P) (L1L2L3) (L11L21) LECSS2-T5LECSS2-T7 LECSS2-T8

VFR

Description Pilot valve assembly AXT627-42-1(M5 x 50) AXT627-10-1 VFR51 AXT627-10-1 VFR52 AXT627-42-1(M5 x 50) AXT627-10-1 VFR53/54/55 NBR Hexagon socket head screw Gasket i AXT627-42-1(M5 x 50) Refer to How to Order Pilot Valve Assembly on page 3-5-78. Steel o !

VFS

Description Material Return spring Gasket Stainless steel NBR VFS5000-9 AXT627-10-1 AXT627-10-1 AXT627-18 AXT627-10-1 o !0 !1 Hexagon socket head screw Steel M5 x 50 M5 x 50 M5 x 50 !2 Detent assembly AXT510-9 Refer to How to Order Pilot Valve Assembly on page 3-8-86. Pilot valve assembly !

Stability of suction position,

Tube I.D. 9 10 8 7.5 6.5 6 Equivalent conductance [dm 3/(sbar)] B 4 5 2 4.5 4 ZP3 1 ZP3E ZP3E 0.6 3 2.5 0.4 2.18 ZP2 2 0.2 ZP2V 0.1 ZP 0.06 A ZPT ZPR 0.04 0.5 1 5 10 20 2 3 XT661 Tube length [m] How to read the graph Example: Tube size 8/6 and 1 meter length By extending leftward from the point at which the 1 meter tube length on the horizontal axis intersects the line

Filter Regulator IW Series

Description Material y Stainless steel 1301-002 1301-1202 1301-2502 1301-902 6 Pilot valve Stainless steel/NBR 1301207#1 1301207#1 u 7 Element Bronze 1301-5B 1301-5B !

With Factory Installed

Part no. oescriP~del AR2001 I AR2501 I AR3001 I AR4001 Bracket B220 I B220 I B320 1 B420 GC30-10 I 1.0MPa 1 1 Okgf/cm2 1 GC30-2 I 0.2MPa 12.0kgflcm21 Gauge How to Order Symbol Rc(PT) Optional specifications N NPT Regulator 1 O.2MPa [2.0kgf/cm21 setting F G (PF) N Non-relieving R IN-OUT reversal Body size When specifying more than one option, please list numerically then alphabetically.

Symbol: 11 (Body Ported), Voltage: 5 (24 VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Reverse Mounting Prevention Pin: None, Bracket: None, Lead Wire Length: 10 (Grommet, 1000mm; Light/Surge: No)

Symbol: Body Ported, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: FKM, Reverse Mounting Prevention Pin: None, Bracket: None, Lead Wire Length: Grommet, 1000mm; Light/Surge: No, CE Compliant: -

KJ

Note 1) D: Max. diameter Note 2) ( ): Values for soft nylon. 13.6 18 13.5 16.7 22 19.5 17 18 22 19.5 17.8 19 14.7 14.9 22.5 23 22 28 26.5 22 30 33.5 29 27 34.5 12.7 7 7 1 8 1 4 3.2 10 14 8 8 10 14 10 10 12 14 17 15.5 3.4 2.9 M5 x 0.8 M6 x 1.0 13.9 12.7 8 4 4 4 1 8 1 4 18 13.5 5.6 4 16 M5 x 0.8 M6 x 1.0 Connection thread 13.5 10 4 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 6 18.5 17 15.5 24 20.5

Table of Contents

ON-flow 0.04 40 B p ipe pe 3/4 B p pi 3B 30 1 0.03 2B, pipe 20 0.02 , 5B , 4B pe 1/4 1 B pi 10 Max.

Proposals for Energy Saving

type (without silencer) 10/Rc 1/4 8/Rc 1/8 Threaded Threaded 6/Rc 1/8 6/Rc 1/8 6/Rc 1/8 6/Rc 1/8 10/Rc 1/4 6/Rc 1/8 8/Rc 1/8 10/Rc 1/4 12/Rc 3/8 12/Rc 3/8 8/Rc 1/8 10/Rc 1/4 12/Rc 3/8 12/Rc 3/8 16/Rc 1/2 16/Rc 1/2 Refer to page 3.4-1 of No. 3 for details.