33

Model Description Material Qty Note q Body PP 1 w EJ202S-005X11 Element PP/PE 1 EJ202S-075X11 e Particle filter bracket SGCC 1 r Nipple Stainless steel 1 Conversion from R to NPT t Extension piece Stainless steel 1 Conversion from NPT to Rc y Tapping screw 4 u Handle 1 When -H is selected i Sealant tape PTFE 1 206 HRSE Series Cooling Capacity Calculation Required Cooling Capacity

VXA21/22

Thread T F N Orifice size 2 3 4 5 6 Rc(PT) NPTF G(PF) NPT 3mm 4.5mm 6mm 8mm 10mm Refer to table q for configuration. Port size 01 02 03 04 1 8 1 4 Valve/Body 0 2 Normally closed (N.C.)/single unit Normally open (N.O)/single unit 3 8 1 2 Refer to table q for configuration.

VXP21/22/23

Thread 1 1 VXP2272-12 1 4 1 2 AC 1 VXP2382-14 2 VXP2392-20 VXP2272-32 VXP2382-40 VXP2392-50 32A 40A 50A Flange DC Note) Surge voltage suppressor is attached in the middle of lead wire.

VXD21/22/23

LQ Hexagon width across flats Bracket 2-Rc , , 4 1 8 3 2 1 LVN TI/ TIL Conduit terminal: T PA PAX PB Bracket 2-Rc , , 4 1 8 3 2 1 : Port size Rc 1/2 17-3-39 8 The VX series will be revised shortly.

Series PF2W Digital Flow Switch For Water

DC+ 1 Brown q N.C. 2 Not used w DC 3 Blue e IN: 1 to 5 V 4 White r Power supply/Output connector (8P) Power supply/Output connector (accessory) i u y t r e w q Pin No. Pin no. Terminal 7 Green CH4_OUT1 8 Yellow N.C.

PF2A/PF2W

size (Rc, NPT, G) 3/8 1/2 1/8, 1/4 Note 1) The system accuracy when combined with PF2A3.

VXR21/22/23

S L, Z S L, Z 1 1 1 1 4 1 2 PB AC 2 Ordering example (Example) Series VXR22, Rc 1 1/4, 200 VAC, Conduit terminal (Part no.)

HRX-OM-X037

HRX-OM-X037 Contents Contents Chapter 1 Safety Instructions . 1-1 1.1 Before Using the Product . 1-1 1.2 Reading the Manual . 1-1 1.3 Hazards . 1-2 1.3.1 Level of hazards . 1-2 1.3.2 Definition of Serious injury and Minor injury . 1-2 1.4 Product Label . 1-3 1.5 Safety Measures . 1-4 1.5.1 Safety instructions for use . 1-4 1.5.2 Personal protective equipment . 1-4 1.6 Emergency Measures.

HRX-OM-Y098

HRX-OM-Y098 Contents Contents Chapter 1 Safety Instructions . 1-1 1.1 Before Using the Product . 1-1 1.2 Reading the Manual . 1-1 1.3 Hazards . 1-2 1.3.1 Level of hazards . 1-2 1.3.2 Definition of Serious injury and Minor injury . 1-2 1.4 Product Label . 1-3 1.5 Safety Measures . 1-4 1.5.1 Safety instructions for use . 1-4 1.5.2 Personal protective equipment . 1-4 1.6 Emergency Measures.

LEC-OM07605CN

1) (1) (1) 46.2 2 SD (1) (1) (1) 46 46.3 SD (1) (1) (1) (1) 46.5 3 DB (1) (1) (1) 46.6 4 DB (1) (1) (1) 47 47.1 SD 47.2 SD 50.1 1 SD (1) (1) (1) 50.2 2 SD (1) (1) (1) 50.3 4 SD (1) (1) (1) 50 1(1) 50.4 1 SD (1) (1) (1) 50.5 2 SD (1) (1) (1) 50.6 4 SD (1) (1) (1) 51.1 3 DB (1) (1) (1) 51 2(1) 51.2 3 DB (1) (1) (1) 8 4 8.

VXZ

Note 1) B B Polyacetal Stainless steel, Silver Note 1) Stainless steel Silver Note 1) H Stainless steel H Note 1) Note 2) Note 1) Note 2) Brass or BC6, Copper B Note 1) Note 2) Note 1) Note 2) Polyacetal B H Brass or BC6, Copper Stainless steel Note 1) Non-lube type.

1

SY 3 5 1 0 0 1 q w r e t y u i o !0 !1 Base mounted q Series !

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Note Description SY940 M2: 0.16 Nm M3: 0.8 Nm M4: 1.4 Nm Aluminum die-casted 1 4 3 8 3 8 1 2 SY5000-27-1 (-Q) : SY7000-27-1 (-Q) : SY7000-27-2 (-Q) SY3000-27-1 (-Q) : SY9000-27-1 (-Q) : SY9000-27-2 (-Q) Sub-plate Note) 6 Pilot valve assembly Refer to How to Order Pilot Valve Assembly on page 130.

High Vacuum Angle Valve

0 o 102 0.2 2-1 132 q 134 O-ring Part No.

Table of Contents

(inch) H (Width across flats) Connection thread NPT Model Min. port size 2-Applicable tubing Note) Weight (g) Q A M D L P KQ2U01-34S KQ2U01-35S KQ2U03-34S KQ2U03-35S KQ2U05-34S KQ2U05-35S KQ2U07-34S KQ2U07-35S KQ2U07-36S KQ2U09-34S KQ2U09-35S KQ2U09-36S KQ2U11-35S KQ2U11-36S KQ2U11-37S KQ2U13-35S KQ2U13-36S KQ2U13-37S 9.6 40.5 9.6 1 8 1 4 1 8 1 4 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1

SY

SS5Y34, #1 (#1 + #5 + #6 + #7 + #17) SS5Y3-45FU-B .

ZP

134 135.5 13 32 35 Additional Dimensions by Stroke (mm) Additional Dimensions by Stroke (mm) K P Q: 6 Q: 8 K P 5.1 K P Q: 6 Q: 8 K P 5.1 Stroke H I Stroke H I 20 20 +10 3.6 +10 3.6 0 0 30 30 +1 1 +1 1 +20 +4.9 +6.4 +20 +4.9 +6.4 50 50 +25 +25 +40 +49.9 +51.4 +40 + 9.9 +51.4 13-11-110 New New Vacuum Pad More shapes and sizes of pads.

ZP

1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 ZCU AMJ Misc.

Table of Contents

Rc G NPT Nil F N Port size 04 1/2 (Female thread) 14-20-51 2 Series ADH4000 Construction Component Parts q o i u !1 No.

2/3 Port Valve

A B C NBR seal FPM seal EPR seal B Refer to Table q for application. 2 0 1 A VNA 15A Air operated VNA 15A 1 2 1 1 A T External pilot solenoid Manual override Rated voltage Valve size Port size Valve style Symbol Symbol 2 200V AC 50/60Hz 1 100V AC 50/60Hz Orifice size (mm) Symbol Port size RC(PT) 1 2 3Note) Valve size 1 to 4 3 110V AC 50/60Hz N.C. N.O.