SQ1000/2000

A Black 8A 6B Station 4 Black 6A Station 3 SOL. B White 7A 7B Station 3 White 7A SOL. A Black 6A 8B Station 3 Black Station 4 8A SOL. B White 5A 9B Station 2 Black 9A SOL. A Black 4A 10B Station 6 Black Station 1 Black 10A Station 5 SOL. B White 3A SOL.

Vacuum System Peripherals:

Connection 3.2, 4 6, 8, 10, 12, 16 KQ2 Nylon, Soft nylon, Polyurethane M5, M6, R 1/8 to 1/2 From 100 kPa One-touch fittings One-touch fittings/Manifold Series KM Applicable tubing: Nylon, Soft nylon, Polyurethane Tubing O.D.: 4, 6, 8, 10, 12 Port A piping port Port B port size No. of port A Piping specifications Port A Port B Model Model 4 6 8 8 10 12 Rc Rc 6 8 10 6, R 6, R 6, R 8, R 8, R

VDW Series

Thread type Rc G NPT Nil F N Voltage 1 2 3 4 5 6 100VAC (50/60Hz) 200VAC (50/60Hz) 110VAC (50/60Hz) 210VAC (50/60Hz) 24VDC 12VDC Port size Series Symbol Port size Consult SMC regarding other voltages. 300 200 M5 01 02 M5 1/8 (6A) 1/4 (8A) Electrical entry G Grommet Orifice size N.O. Orifice size mm N.C.

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

Thread type Rc G NPT Nil F N Voltage 1 2 3 4 5 6 100VAC (50/60Hz) 200VAC (50/60Hz) 110VAC (50/60Hz) 210VAC (50/60Hz) 24VDC 12VDC Port size Series Symbol Port size Consult P/A regarding other voltages. 300 200 M5 01 02 M5 1/8 (6A) 1/4 (8A) Electrical entry G Grommet Orifice size N.O. Orifice size mm N.C.

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

Back page 6

V100

to page 4-6-46.)

Compact 5-Port Solenoid Valve

9B 10B 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A Station 2 Station 3 Station 4 Station 5 10A COM 10B Station 6 1A COM 2A 3A 4A 5A 6A 7A 8A 9A 10A 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A 10B 10A COM 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B Station 7 Station 8 If alignment is not specified, the internal wiring will be double wiring (connected to SOL. a and SOL. b) regardless

2/3 Port Valve

VX22 0 5 6 VX23 0 5 6 VX070-029 4.1-3 VX21/22/23 Energized Closed (N.O.)

VNB

A: Non-locking extended type 4 Valve size 1 to 4 6A 8A 10A 1 8 1 4 3 8 5 6 24 VDC 12 VDC 1 7 B: Locking slotted type 7 240 VAC 50/60 Hz 9 Other 11 15 11 10A 3 8 Option 2 15A 1 2 15 14 3 20 16 Nil: Non-locking push type 20A 3 4 Valve size 5 to 7 25 4 25A 1 22 11 4 32A 5 32 Electrical entry/ With light/surge voltage suppressor 1 B 22 32 28 40 6 28 40 1 4 32F Flange 11 2 40A GS Grommet

Non-contact Gripper

P PL M ML C H D L XT661-4C-X321 M5 x 0.8 5 M4 x 0.7 8 32 6 39 XT661-6C-X321 M5 x 0.8 6 M4 x 0.7 6 47 11 59 XT661-8C-X321 M5 x 0.8 6 M4 x 0.7 6 47 17 79 XT661-10C-X321 Rc 1/8 M4 x 0.7 6 47 23 99 XT661-120E-X322 Rc 1/8 M5 x 0.8 7 72 30.5 120 XT661-150E-X322 Rc 1/8 M5 x 0.8 7 72 37.5 150 744 Non-contact Gripper XT661 Series Dimensions [Bernoulli Type] With guide assembly Size: 120 Size

Process Valve

Screw-in type (6A to 50A) and the flange (32F to 50F) are standardized.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

L SY3000-52-6A Dimensions SY5000-52-4A Applicable fittings size d 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" Model A L D 16 18 20.5 22 24 16 18 20.5 22 SY7000-70-2A 10-KQ2P-04 10-KQ2P-06 10-KQ2P-08 10-KQ2P-10 10-KQ2P-12 10-KQ2P-03 10-KQ2P-07 10-KQ2P-09 10-KQ2P-11 6 8 10 12 14 6 8.5 10 11.5 32 35 39 43 45.5 32 35 39 43 EXH block disk By installing an EXH block disk in the exhaust passage of a manifold

VQ4000

Maximum stations are 18. 16 4 17 5 18 6 19 7 20 8 21 1.

70pvvna

Threaded type from 6A to 50A is standardized.

VM

Lubrication Not required/Turbine oil #1 (ISO VG32) Port size (Nominal size) Rc(PT) (6A) 110g 1 8 Weight (Basic) Model Actuator part No.

Process Valve

Threaded type from 6A to 50A is standardized.

Proposals for Energy Saving

8 @4 #3#0 #4$0#9@5#2w @6 @3ue !6!5 !1 !2 !0 #7@1#5@2 @8@7#6@0#8 End lock !3 !4 Parts list No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 No.

Coolant Valve

Note) 3, 5 components determine the valve composition. 6 Aluminum alloy 7 Piano wire 8 Stainless steel 9 Replacement Parts Part no. Description VNC1 -6A, 8A, 10A VNC2 -10A, 15A VNC3 -20A VNC4 -25A VNC5 -32A, 32F VNC6 -40A, 40F VNC7 -50A, 50F No.

0.4

connectors, so switching from the F kit (D-sub connector) to the S kit (serial transmission) can be done simply by changing the kit section. 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 6 7 8 9 10 (Refer to the connector wiring diagram.)

VQC

Connector wiring diagram (mixed wiring) Connector type manifold 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing